telemedicine agreement
TRANSCRIPT
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8/17/2019 Telemedicine Agreement
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
Thin Film Measurement solutionSoftware, sensors, custom developmentand integration
SiCN Measurement
Samples of SiCN deposited on Si were measured with MProbe UVVisSR system (200-1000nm wavelength range) to determine thickness, optical dispersion and bandgap of theSiCN material.
SiCN dispersion was represented using Tauc-Lorentz approximation that includes a bandgap fitting parameter (Eg).
Fig. 1 Fit of the model to measured data. Thickness (615.6nm) and dispersion aredetermined from the fit.
Fig. 2 Dispersion of the sample determined from the measurement.
Bandgap is 1.32 eV
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8/17/2019 Telemedicine Agreement
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
Fig. 3 Sample#2 Fit of the model to the measured data.
Thickness 598 nm
Fig. 4 Sample # 2 Optical dispersion is determined from the measurement.
Bandgap=0.854 eV