thin films deposition
TRANSCRIPT
Thin
film
s deposi
tion
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The environment friendly vacuum deposition
technologies enable various nature of substrates to
be coated (metals, ceramics, polymers, glass) with
layers over a wide range of compositions. The
components could be treated at
low temperature (as low as 50°C),
without surface finishing.
The PEMS™ technology, devel-
oped by HEF™ Groupe offers an
optimization of the coatings
properties in a large field of
applications, such as mechanical, tooling,
decorative, optical, electromagnetic shielding…
A W I D E R A N G E O F T H I N F I L M S
EXAMPLES OF VARIOUS FIELDS OF
APPLICATIONS :1. MECHANICAL,2. DECORATION,3. ELECTROMAGNETIC,4. TOOLING,5. OPTICAL.
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The thin films bring to the surface of parts and
components multiple properties :
Low friction coefficient :
• Self-lubricating layers.
Wear resistance :
• Abrasion ;
• Erosion ;
• Adhesion.
Cosmetics :
• Metallic aspect on polymers, glasses ;
• Hard films on metals, glasses.
Optical properties :
• Non reflecting ;
• Filter ;
• Reflector.
Electrical properties :
• Conductivity ;
• Electromagnetic shielding.
P R O P E R T I E S O F C O M P O N E N T S T R E AT E D W I T H H E F ™ G R O U P E T H I N F I L M S
1. PLASMA
2. COATING EQUIPMENT IN CLEAN ROOM
3. THIN FILM CROSS SECTION MICROGRAPH
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The PEMS™ (Plasma Enhanced Magnetron
Sputtering) technology developed and patented by
HEF™ Groupe produce high quality coatings.
The PEMS™ technology allows several benefits :
• Combination of the advantages of magnetron
sputtering (consistent and accurate composition of
the layers, wide range of composition achievable,
absence of surface defects on the coatings…) and
high ionization to produce coatings with maximum
density.
• Operations :
- in PVD (Physical Vapor Deposition) mode,
- in hybrid PAVCD (Plasma Assisted Chemical
Vapor Deposition) / PVD mode,
- in plasma treatment mode for duplex coatings
(example : plasma nitriding followed by hard
coating deposition).
• Independent adjustment of the ion flow and
energy, which ensures optimization of process
parameters whatever the nature of the hard
coating.
• An efficient homogeneous etching of the parts
while sputter cleaning the targets, in order to
create a good adhesion and an accurate compo-
sition of the layers.
P E M S ™ : A F L E X I B L E T E C H N O L O G Y
1. COMPONENTS IN A PLASMA SOURCE
2. DUPLEX COATING CROSS SECTION
MICROGRAPH (ION NITRIDING + Cr N)
OPTIMIZATION OF THE DENSITY OF A TiN FILM BY INDEPENDENT
ADJUSTMENT OF THE PROCESS PARAMETERS (ION FLOW AND ION
ENERGY).
CO
ATI
NG
DE
NS
ITY
(AR
BIT
RA
RY
UN
ITS)
ION FLOW(ARBITRARY UNITS) ION ENERGY
(ARBITRARY UNITS)
Mechanical applications
HEF™ Groupe tradename CERTESS™ covers low
friction and wear protection coatings. These
coatings are developed to meet the requirements
of customers who design precision components
subjected to friction and wear. These tribological
coatings properties have been optimized by
assessing their behaviour on the Tribology
Department test rigs. This department belongs to
the research center of HEF™ Groupe.
HEF™ Groupe has developed a series of coatings that covers all applica-
tions of thin films : friction and wear reduction applications on compo-
nents, tool lifetime enhancement, electromagnetic shielding on polymers,
decorative and optical purpose on polymers and glass, corrosion
resistance on aluminum alloy.
HEF™ R&D, research center of HEF™ Groupe, also
develops custom-made coatings for specific require-
ments.
A C O M P L E T E S E R I E S O F C O A T I N G S
DECORATIVE REFLECTIVITY CORROSION COLOR
(ACCORDING RESISTANCE
TO WAVELENGTH)
ALUMINUM ASPECT ••• ••• Aluminum
NICKEL CHROME ASPECT •• ••• Nickel
GOLD ASPECT • ••• Gold
Electrical applications
Decorative applications
ELECTROMAGNETIC ADHESION CORROSION COLORSHIELDING ON POLYMER RESISTANCE
PROCEM™ 1 •••• •••• •• Silver
PROCEM™ 2 •••• •••• ••• Nickel
COMPARISON OF THE PROPERTIES OF THE VARIOUS DECORATIVE LAYERS
Optical applicationsOPTICAL REFLECTIVITY COLOUR
(ACCORDING TO WAVELENGTH)
COPPER BASED ••• Silver
ALUMINUM BASED •• Aluminum
GOLD BASED • Gold
COMPARISON OF THE PROPERTIES OF THE VARIOUS OPTICAL LAYERS
COMPARISON OF THE PROPERTIES OF THE VARIOUS PROCEM™ LAYERS
COMPARISON OF THE PROPERTIES OF THE VARIOUS CERTESS™ LAYERS
CERTESS™ HARDNESS FRICTION OXIDATION COLORRESISTANCE
CERTESS™ X •• •• •• Steel
CERTESS™ N • • ••• Steel
CERTESS™ TiN •• • •• Gold
CERTESS™ SD •••• •• ••• Champagne
CERTESS™ TiCN ••• • •• Blue gray
CERTESS™ TiAlN •• • •••• Mauve
CERTESS™ DLC • •••• • Black
Components parts :
• Automotive : piston, piston ring, piston wrist
pin, rocker arm, tappet, injector ;
• Hydraulic : slide valve, ball valve ;
• Medical (prostheses, tools), textiles (thread
guide) ;
• Miscellaneous : pulleys, ball bearings, gears,
axles…
• Precision parts.
Tools :
• Stamping, punching, dies ;
• Abrasive material cutting ;
• Moulding, polymers injection ;
• Machining (milling, turning, tapping,
drilling…).
Decorative, optical and electrical :
• Trim components ;
• Bottles coatings ;
• Logos ;
• Reflectors ;
• Antennas ;
• Circuit breakers contacts.
T H I N F I L M S A P P L I C A T I O N S
CERTESS™ SDULTRA HARD NANOCRYSTALLINE LAYERS
ON TOOLS
CERTESS™ TiNFUNCTIONAL HARD DEPOSITS
OPTICAL
COATINGS WITH REFLECTIVE PROPERTIES
OR ATTENUATION
ELECTRICAL
CONDUCTIVE COATINGS FOR THE SHIELDING
OF POLYMERS AND COMPOSITE MATERIALS
FOR ELECTROMAGNETIC COMPATIBILITY
DECORATION
DECORATIVE COATINGS ON GLASS SUPPORT
EQUIPMENT OF 2 M OF DIAMETER AND 2 M
HEIGHT FOR THE PROCESSING
OF LARGE PARTS OR GREAT SERIES
CERTESS™ DLC : SELF-LUBRICATING HARD LAYERS
ON COMPONENTS AND TOOLS
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Specific developments to meet your
specialized technical need :
Thanks to continuous innovation, renewal of
coatings and equipment research, HEF™ Groupe
offers you the best solution for your project.
In order to optimize the thin film for your
particular application, HEF™ Groupe research
center could generate specific developments.
Customized deposition systems can also be
designed and manufactured thanks to its
expertise and flexibility.
Customized access to the technology :
HEF™ Groupe is able to adapt their technology
offer and their technology transfer to the
customer’s need, as following :
• through their production units, TECHNIQUES
SURFACES, present all over the world (and
specially close to major customers),
• through their world wide Joint – Venture
network,
• through their own international l icensees
network,
• by integration of our technology on your
production site : technology transfer, technical
assistance, sale of equipment and consumables
HEF™ Groupe offers a large choice of techno-
logical transfers with the best customer’s service
in terms of quality, price, and delivery time.
An international quality policy :
HEF™ Groupe ensures to their customers that all
the treatments will be handled with the most
recent quality systems.
The procedure covers the monitoring and
control, from the inspection of incoming material
to their cleaning, processing, inspection and
shipment.
Production units such as, TECHNIQUES
SURFACES which are ISO 9002 certified,
enforce the quality policy. The licensees and
partners also comply with the quality standards
set by HEF™ Groupe.
H E F ™ G R O U P E : S E R V I C E S S U P P L I E R
1. TSD2200 COATING UNIT
2. CONTROL OF TREATED COMPONENTS
3. ASSEMBLY HALL FOR THE COATING UNITS
4. TSD900 COATING UNIT
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HEF™ Groupe technologies are also available
through licensing. 350 licenses have been granted
by HEF™ Groupe in 30 countries, on different
patents.
Licensing covers technological transfer, equipment
and consumables supplying, staff training.
This technological transfer ensures the technical
assistance to partners companies for the resolution
of specific problems, continuous process
improvement through the introduction of the latest
technology developments.
Within HEF™ Groupe, TECMACHINE is the company
in charge of development and manufacturing of
HEF™ Groupe vacuum coating equipment. The
equipment range covers R&D systems to units
designed for large volume industrial production. All
units are equipped with State-of-The-Art systems for
pumping, process monitoring and control, safety.
• PEMS™ technology ;
• PVD, PACVD and hybrid PACVD/PVD modes in
standard ;
• Low pressure, low bias voltage arcless etching
for efficient and homogeneous substrate
cleaning ;
• OES (Optical Emission Spectroscopy) for
reactive gas flow control ;
• Independent control of ions flow and ions
energy for coatings properties optimization ;
• Multi-chamber multiplexing option ;
• Quick change magnetron sources ;
• Computer controlled and user-friendly
operations ;
• Batch processing parameters reports ;
• High performance and reliability pumping
systems ;
• Modem connection for remote maintenance.
These equipment have been validated through
several industrial operations years in our production
sites and in our partners.
L I C E N S I N G O F V A C U U M T R E A T M E N T S
1. CATHODE
2. TSD800 COATING UNIT
3. CONTROL MONITOR
4. COMPONENTS IN A PLASMA SOURCE
5. TSD350 COATING UNIT
6. TSD400 COATING UNIT
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E Q U I P M E N T O F V A C U U M C O A T I N G S
HEF™ Groupe latest developments rely upon its
research center.
HEF™ R&D center is one of the leading European
research centers, with more than 80 international
patents in the field of Surface Engineering. Their
team of 40 researcher has been involved in
20 European research projects (EUREKA, BRITE-
EURAM) and 7 on-going programs.
It has its own facilities for coatings and process
development, as well as friction and wear
assessment through its Tribology Department.
For constant renewal, this research center seeks
innovations for advanced processes, better
controlled treatment parameters and optimization of
material surface properties.
And specially in the following directions,
• Study of the influence of the chemical composition
of nanocrystalline TiBN coatings deposited by
reactive cathodic magnetron sputtering.
• Study of the morphology of PVD coatings as a
function of ion bombardment parameters applied
during growth.
• Study of control of chemical composition of
coatings deposited in reactive mode through
plasma optical emission.
R E S E A R C H I N H E F ™ G R O U P E
1. ANALYSIS LABORATORY
2. LABORATORY PROCESSING LINE
I N T E R N A T I O N A L I M P L A N TA T I O N
FRANCEHeadquarters :Rue Benoit Fourneyron42160 Andrézieux-Bouthéon cedexTél. (33) (0) 4 77 55 52 22Fax (33) (0) 4 77 55 52 00e-mail : [email protected] Web : www.hef.fr
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HEADQUARTERS :Rue Benoit-Fourneyron / Z.I. SUD - 42160 Andrézieux-Bouthéon - France
Phone + 33 (0) 4 77 55 52 22 - Fax + 33 (0) 4 77 55 52 00
e-mail : [email protected] - Website : www.hef.fr
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