TiAlN/CrN 奈米結構多層硬膜

電漿製程與分析研究室指導教授 張銀祐

+

-

Arc powersupply Bias power

supply

Reactive gas, Ar

Substrate

-

-

TiAl Cr

+

+

TiAlN/CrN 奈米結構多層硬膜

電漿光激發光譜分析

330 340 350 360 390 4000

1000

2000

3000

4000

5000

6000

N2 N

2

+

N2

Ti Ti+

N2

N2N

2 N2

+

Inte

nsity

(ar

b. u

nits

)

Wavelength (nm)

N2

Al

410 415 420 425 4300

200

400

600

800

1000

Inte

nsi

ty (

arb

. units

)

Wavelength (nm)

N2

++

N2

+

N2

+

Ti

330 340 350 360 410 420 4300

1000

2000

3000

4000In

tensi

ty (

arb

. units

)

Wavelength (nm)

N2 N

2

+

N2

N2

++

CrCrCr

N2

+

260 265 270 275 280 285 2900

1000

2000

3000

4000

5000

Wavelength (nm)

Cr+

Cr+

Inte

nsi

ty (

arb

. units

)

Cr+

Nanolayered TiAlN/CrN coatings

Periodic thickness= 18 nm Periodic thickness= 7 nm

AFM analysis of TiAlN/CrN

Mechanical properties

Coatings CrN TiAlN TiAlN/CrN-5rpm TiAlN/CrN-2rpm

Crystallite size (nm)

48 41 38 31

Lattice strain (nm) 4.3x10-3 4.3x10-3 4.9x10-3 5.7x10-3

Elastic modulus (Gpa)

290 570 520 480

Hardness (GPa) 24 31 36 37

H3/E*2 (GPa) 0.144 0.081 0.152 0.193

Residual stress (GPa)

-6.6 -5.4 -11.2 -10.1

Critical load (N) 45 35 46 50