tw201127939 a
TRANSCRIPT
;4 00 (19) 'f.~ ml ~a ~J!~A..NJj , (12)~~{-'Jt~~~M]* (ll)~MIMHt: TW20ll27939Al
~ ~?rFc~~a' ~ II l=f (43)~MI a : 'f"~ iJ 100 (2011) 1f- 08 A 16 a
(22) 'f "tt E3 : rf -f. ~@ 99 (2010) 1f- 09 A 27 E3
C09G1104 (2006.01)
(21)'f"tt~~t : 099132615
(51)Int. Cl. : C09K13100 (2006.01)
1l01L211306 ~OO~O~
(30)11: 7t;fJ : 200911 0/24 J- @ 61/254,688
(71)'f"ttA.: *ffi\~(J-@)LEE,WAIMUN (US)
J-@
(72)~aAA. : *ffi\~ LEE, WAI MUN (US)
(74 )1JU£ A. : ~*- ,"t )R;j~
'f"tt}fB.~ : $.it, 'f"ttl-*~j[!IJ:r~tt: 20:r~ ii\.tt: 0 # 37 Ji
(54)~{~
#~T~(Troika acid)~~B~~m*~&~ffl~*
TROIKA ACID SEMICONDUCTOR CLEANING COMPOSITIONS AND METHODS OF USE
(57H~*
ffl ~~:1f ~5f.%tJl &~Aij 1t.JI-if. aSa 00 J:..~,r;Yasa 00~~ ~B~l£ ffl #Jl*4bJ ' ~ ~~7~& - 3X. § {£4ii~T@t~~(~{!!A~~ a,a-"::'Jfx.1\~":=" rg ij5~7J3X. a-U~£52.Mt£)~@i£ L.. @t~~) , ~~~~ , &~1>t1AbJ 0
;4 00 (19) 'f.~ ml ~a ~J!~A..NJj , (12)~~{-'Jt~~~M]* (ll)~MIMHt: TW20ll27939Al
~ ~?rFc~~a' ~ II l=f (43)~MI a : 'f"~ iJ 100 (2011) 1f- 08 A 16 a
(22) 'f "tt E3 : rf -f. ~@ 99 (2010) 1f- 09 A 27 E3
C09G1104 (2006.01)
(21)'f"tt~~t : 099132615
(51)Int. Cl. : C09K13100 (2006.01)
1l01L211306 ~OO~O~
(30)11: 7t;fJ : 200911 0/24 J- @ 61/254,688
(71)'f"ttA.: *ffi\~(J-@)LEE,WAIMUN (US)
J-@
(72)~aAA. : *ffi\~ LEE, WAI MUN (US)
(74 )1JU£ A. : ~*- ,"t )R;j~
'f"tt}fB.~ : $.it, 'f"ttl-*~j[!IJ:r~tt: 20:r~ ii\.tt: 0 # 37 Ji
(54)~{~
#~T~(Troika acid)~~B~~m*~&~ffl~*
TROIKA ACID SEMICONDUCTOR CLEANING COMPOSITIONS AND METHODS OF USE
(57H~*
ffl ~~:1f ~5f.%tJl &~Aij 1t.JI-if. aSa 00 J:..~,r;Yasa 00~~ ~B~l£ ffl #Jl*4bJ ' ~ ~~7~& - 3X. § {£4ii~T@t~~(~{!!A~~ a,a-"::'Jfx.1\~":=" rg ij5~7J3X. a-U~£52.Mt£)~@i£ L.. @t~~) , ~~~~ , &~1>t1AbJ 0
201127939
U.S. Provisional Appl. No. 61/254,688 (1£ 2009 ~ 10 fj
~~m·~ffiI.·~.I.·~~I.·•• ·~~~
• ~ ~lJ R. f@ to/] '11 ~OJ ~4 0
- 5 -
201127939
~~,~ ..~.~.®~~~~.~~.m~~.£(~~~ •• ·~ •• ·~.· •• ~~.~M)~~
mo$~~~.m•• ,~~m_z~.£~~mB~~
Jl B §l: ~ • ~ ~ z ~ ~ ~~ ( f9U ~D Ei ~ if ~ ( meg a son i c s )
~~~-~R.g)Z~m~.Mo~~,.~~~~~
.L-J- m_ ~ ~ ~ m~ 1t • «'0 0
*$~Zm~*~ •• m$z.m~~~.~~~.~~o~g.~B~tt~B~~'~$~ffi~~~$-OO
$ {J\ ~ g • ~ m E!3 ~c {1L fI ~ *'6 ¥ =~ ~ :g, Z ~F ~ g i* ~ (
~{:i'l£) 0 fi~~Z.J11~~.5:2 •• ~~U' £*L~~D~.
OH£Z~~~$~w~*m~~~.~~Z~.~~~
~.,m~*m~$Z~~o~~•• tt~.~~m~~
{1L • ~ ~ Z t5B ~ , ® ~ $ 'L\ ( ~ 1m ) i* ~ fF ~ ~ - • ~
~o~~.~~~~~Zm~$~~~~~m~,~~m
~~~$~mo~~~ •• ~~~m~~~zm~~,~mE!3~~~~mg~~~.~OOL~®~m~~~o
• ~ ~U Z If 19U ~ 19U ~D ~ £ -= Z. ( NT A) • {$ Z £ =D~ jlg Z. ( EDT A) • N, N ' - ~ ( 2 - 1~ £ ~ £ ) {$ Z £ =D~
£ =Z. ( H P ED) • .=. {$ Z £ jlg ~ £ 1\ Z. ( T T H A) •
1~ WT ~F ffM ~F ffM ng f!J3 B ( des fer r i fer rio x ami n B) • N, N ' , N "
.=. [2- ( N-f~ £ fJJR £) Z £ ]-1,3,5-~ =. m. e H~ ( BAMTPH
) • {$ Z £ = H~ = r~ f~ £ ~ £ Z. ( ED D H A) • {$ Z £
=H~ jlg {$ Ej3 £ ~. ( EDT M P) • a - ( f~ £ .5:2 D~ £ ) ~.
. {$ ~ £ =H~ jlg Z. ( PDT A) • ~ £ {$ ~ ~ =H~ jlg Z •
- 6 -
201127939
(HPDTA) ,~**W~~~=z,~ (ISDA) , (3 -r3ij~~~=z,
~~ ( (3 - A D A) , 1~ ~ z, ifC = ij~ ~ , = 1$ z, ~ - ij~ IZB Z, ~~
~~&.~)*~~~~tt~~~~~~gm~~~~~
.&~ •• ~~=~(OO~~&.~~)~M~o~~#
PIT fiX L *'5 :W: 1£ iW * {* gJ ~ • • 1t ~o/.) 9~ m~o/.) ffiJ ~F gJ ~ • * ~
~ ~ .. fU $ 8:pJ ~ 6 , 1 4 3 , 7 0 5 ' 6, 3 1 0 , 0 1 9 ' 6, 3 9 5 , 6 9 3 '
6,410,494 ' 6,440,856 ' 6,514,352 ' 6,514,921' 6,534,458
, 6,541,434 ' 6,716,803 ' 7,250,391 ' 7,312,186 ' &
*~a~~Lm~~&~$o~~m~~&~ffl~$~m
1if A * Y:.. fF ffiS ~ ~ 0
fj; ~ .. fU $ 8:pJ ~ W 0 2 0 0 9 0 8 5 0 7 2 ' W 0 2 0 0 9 0 5 8 2 8 8 '
W02009058278 ' W02009058277 ' W02009058275
W 0 2 0 0 9 0 5 8 2 7 4 ' JJz. W 0 2 0 0 9 0 5 8 2 7 2 D §ifH - * 37U ~ ~ § ij~
- 7 -
201127939
~~~~~.~mo~m~m~~:&~m~$~.mA*
Y:. 11= ~ ~ ~ 0
~~,m~~®m~~._~~~W~tt·§&~W
rm '11 :& 1m ~ ~~ '11 @ 55U 1t ~ ~ ~ *'5 ~ f~ mtJ ~ ~ pJT _ ~ m~
%( ~~ , ~D ~ ~ W- ffj 6, 3 9 5 , 6 9 3 :& 6, 5 4 1 , 4 3 4 ep pJT m5I!1 S'9 0
~ ~ W- ffj 7, 4 2 7 , 3 6 1 m5I!1 ~ ~ *'5 ~ ~ • ~ itfU 1t ~ ~ 1£
~ lIft ~ fJi: T WI ~ m ~ , J3. tl ~ ~ y - @ ~ EI ""f ~U ~ ~ ~g ~
~:~~~'~M~'~~'9~~'~~~'9~~~
.~~~.~~~.~~~.~~~.~~.~~.~~
·«~~·m~~·~~~~·~.~H~·:&~m~~
fJr!JJ'[;#1!~~*JCr:p 0 ~~~*JC'§M~ (~Zm~M) . ~ (
zm~M) . ~ (~m~) • ~ (fi3~~m~) . ~ (~
m~m) . ~ (fi3~~m~§I) . ~ (:t1G~~mMm) .
~(J[~Tm=~) '~(Z~zm~) ·~(Zm~)·
~ (~m9n~) . ~ (i\~~m~m) . ~*I*M;f4':&
~ *J3. ~ ~ ~ ~ ~ to/.] 0 ~ ~ , l' [qj I¥J gB 5t ~ EI 5t 55U tfu ~ lIft ~
~ ~ ~ ~ ~ ~ ~F ~ * !l '§ 13' ~ f§ [qj 5t T ep 0 :93:$7} , ~'3 6 1
W- flJ l' '§ 15 1m :& W§ gB 5t ' J1:t =g3 5t 5t 55U W~ 1~ $ 5t m f~ 111
!f-!j !¥J tB, * %( * 0 ~ ~ , ~ '3 6 1 W- flJ yj ~ t~ SJI ~ ~g ~ ~ ~~
~U ~ tJ !f-!j 55U 15 A ~ lIft ~ ~ ~ ~ ~ ~ ~ ~ $ 5t !¥J ~~ ~U m _ '11
~ ~ ~ flJ 7, 5 2 7 , 7 3 3 • 6, 2 1 8 , 5 6 3 • 5, 9 4 8 , 9 3 1 •
5,945,082' 5,935,542' 5,905,163' 5,861,525' 5,859,290
• 5,859,278 :& 5,858,317 mmt a - ( 1.m ~ 52 n~ ~ ) g~ Ii ~
- 8-
201127939
N
"OH
o
01-1
/N
2!f 51 ~IJ BfJ m~ • f$: ;L =11 f§ r~ £ III ;L {f - l§- 8"1 it ~ &. Jf! '11- 9 -
201127939
~.~.~z~~~~m.~,~~~.~~o~.~:
~m~~~~,~~~.m~'~ffi~~m(M~~)~
o~~=m~$,~~~~g~.~·~=.~~~~&
~~z~~~~m~M~~~~~£5~$'~~-~~
lJU 3i: JE Z ~F)iU 0 mil 1i~ ~ =• ~ fl ~ fPJ ~ £ ~ fU B~ r:iJ ,L-j. ft ffi
pH & ~ ~ m~ M Z ~ ~ ffl it ffij c)l ~ 0
ORl, D-M++ OR, /OR2 011p/ t
h P/
~ 'C::::::N
o~'r\o :;;...-- \I OllC a::::::::C, /M++
ORJ-----~0 0
E-~.~~JJll~~ z-~*¥j~~JM~~
~ffij~m~m~~~ffi •• m&~£~~~.~~~• ~ , W\ t!P E -~ • ~ ~ t~ 0
o~@§.~~8~~~~.~~~8~~./~ffi~Z
*mBW~.~~~o~~'.~r:iJm~.-A~&~m
~~$~~~~M~~8~~m$~~~§~~~~o
- 10-
201127939
~- ,- 0~
m~~~~~U~§ffi~~'Z~'~~'T~'~
~ , :$: ~ , ~;f - ii~ ~ :$: ~ , R. r~ - ii~ ~ ~ ~ *,g gIG z ~ {* ~ t=j:J
- 11 -5
201127939
'B~~~~~~~~U~ffW~~z~~~~~o
~~~~~U~§ffi~~,=~a~~,~~~~,
=f~~~~~' 2-f~~Z~=~~~' &= (2-f~~Z~
)~~~m~z.~~$'B~~m~~~U~ffW~~
zm~~o
~~m~~,~m~~~~m~~u~-w~~=~
~w~m~~~,m~~~g~zW~~~~~o
~~.m&m.z~*,m~~fu~~~~mM.'
•• '.~'~OOmttM,~~a~&m~M~z~~~
, m1t ~~ & ~ 1t ~ °
~mft*~$m~~z~m~~znffi~.m~*~
R~ffo~mm~Z~~~U~MU~~~:m~-~ff
,~~~-~~~m~R&~k~mffRz~OO&-~~
mmm'~~Hm~'~OO~Hm~'&.~M~-~~
~~.ft~~OO~ ~~~ffZ~~OOW~~~z~~U
~~~zm~~~ w*~mm~zm~-~~~~-~
m~~,~m~~,m~~~li~~~~~*m~;~$
~~~ft~~~~&mN~~~~m~~~~~~~ft*
~R~~m~~~z~OOHW~&~~~o~R~~~U
~ 19~ ~D *t:J 1 0 fly ~ *t:J 30 5t i! J3. rE! N ~ tJ ~ 19~ ~D ~ rE! ~ ~
50°C °
~-m~*~.ft~m~~&.~~HW~m~~~
m rl3~ 1iff! no * Y:. $ z ~ m --F ~ ~ 7.1< *Ji ~ ~ ~ * ~ R ~ ff ° ~
-~m~*~~ftm~~~M~1iff!~*~$z~m--F.~
- 12 -
201127939
Ez. 1£ ~ it ~ ~ ~ zP: lID it * ,~ W3 rs~ =~ ~ 1j[ m1£ flj m~ /f flj
m~~~mM~n~~~~~~ZP:lID~*RM~o
~~~~~~.~~~(~~~~~~~~.~~~.~
~~.~~~.~~~.~~.. ~~ .. ~~~~~~
~·Ez.~m~~m~~~~~~.~~~)~~~~·~
~~·.E·E~E&~~mmMRo~mmlli~~~~
~.~~~&~~~~~~~~~&~~~n~~~~o
~~*·~~~·.Em~·~~*,&~~~o
~D 1£ it ~ ~ ~ fM 7'C ~ zP: lID it ~ f~ mz ~ ~ 1* t~ 1=lf flj m~~~~~~~7'C~~mo~~ili~~*mm~~o~~
- 13 -
201127939
~u~* •• ~~·#*•• ~~·~*•• ~~:&.~*
.~~~~~~o~~~L~U~~~m~~~~o~®
~ ~ Ii} ~) flJ ffl C M P 15 Bi tJr!J:7'G 0 ~ f~ £ ~ ~ ~D G a As' 1£ ~
:If 15 L ~ ~ . ~ 1£ *'~ ~ a L ~ ~ ( SOl) ~.L-J flJ ffl C M P 15
BitJr!J:7'G°
l£-~a.~$,~ ••• tJr!J:7'G.&~U~~.~M
. m~~u· ~m'l:1jill~mM~' :&.~*,s~~~wm~~~~
~.$~o.~~.m~.Rtt~·~$Rtt·~gRtt
M ~ ~ ~. *J3. ~ 0 fL '[1: f;f ~ fg( W~ R -t ~ ~ I)( ~ 0 * W~ I U PAC
f~ ~c Bi ' • fL '[1: ~ ~ ~ ~ IJ\ 1n 2 ~ * ~ fL @: 1~ , $ fL '[1: tt
~ ~ ~ 1£ fTt:J 2 ~ * :&. fTt:J 5 0 ~ * ~ rl3~ ~ fL @: 1~ , g fL '1:1 tt
~ ~ ~ *- 1n 5 0 ~ * ~ fL ~ 1~ 0 •• m~ ~ f~ ~ § E!3 ~) T *fI.
~ z M $ : -WU ~D P S - D VB, C h e 1ex' ~ H3i: ' *~ H3i: c5c ~ z ~
zm-=zm£~·~~~E-~H.m·:&..~~~~
~mM~Wm~ 0 ~f~~~~.ij~ (~~DLJU~~{~.g~~
#1~!fo/J) ~ffl1n~~~*ft$ 0
l£-®.m$'l£*~$Z~~~~U~~~~-~
~m~:!I~~fTt:J 99 m:l:%~~.m~u, -~~m~;.fTt:J
0.001 ~fTt:J 45 m:l:%~.~' -~~m~:I:*9 0.001 ~*9
45 m:l:% ~~~, -~~m~JlfTt:J 0.001 ~*9 25 m:l:%
~ fr5 1t ~U ' - ~ ~ fl -21 :I: fTt:J 0 . 00 1 ~ *9 25m:l: % z ~ ~
• 1-1:: :&. ~ JJj{ 11 fm ~ 1-1:: ~ ~ , - ~ ~ m ~ :I: ~ ~ fTt:J 15m:l:
%~g~}~m~~~~~tl 0
l£~ffl-~~m~OOfr5ttM~.R$'.~~~~U
- 14-
201127939
[ • ilfJi :1J ~ ]
~¥ *m ~ SA
~UL*~~~~~$'&~*~~~~~~~'.
-WU 15<. !-) T $ gflf W flj lB III $ , ~ ~ * ~ sA ~ ¥-i= 55U ¥-i= ~ 0 ~ J
~~ : ~ * ~ sA ~ $ * ~ sA ~ t~ 7G 'E1 t3 Itt fl ¥-i= 55U ¥-i= ~ ~ pJT 1§
¥-i= 55U $ gflf W flj lB III ~ L T )( $ I¥J 'I¥J ¥5t T ' ~ ¥-i= ~ fu J:iJ !-) 1£
-g- ~ I¥J fR m L * ffl 1£ ;it {itt ¥-i= 55U ~ ~ • -WU 15<. $ gflf W flj lB III $
, 15<. - JiR '1:1 rfu ffl 1£ * ~ sA $ 0
*)($~~~m~OO~I¥J~~~15<.'E1~-~~m¥-i=m
~.~-g-~,;itm~~,~;it •• (~1§-~~OO¥-i=m~
011
- 15 -5
201127939
~ ep R I J5<. R z i}f- 11111. ~ § El3 ~ , m £ ' ~ m £ ' 7:j £
~7:j£' J5<.m£~7:j£~*J3.~z~$ J5<. R 3 ~1111l.~
§El3~,m£,~m£,7:j£,~7:j£,~~~z7:j~J5<.
~£~7:j£f1i:*J3.~Z~ $ 0
m£~7:j£ffi~§El3~£'Z£'~£'T£'~£
'~£J5<.~1J;A:m*J3.~z~$ 0
~~~z7:j~ffi~§El3~~£~£'~~£~£J5<.~
fPJ :m *J3. gIG Z ~ $ 0
m£J5<.7:j£f1i:ffi~§El3~~f1i:~~~~~~z~ep,
~~~~~=.a£f1i:'~~~~~£~'.~~~£~
EJ3 £ t§. , ~ ~ it 2 - 1~ £ Z £ .=:. EJ3 £ t§. , J5<. ~ ~ it.=:. ( 2 - 1~
£Z£) EJ3£t§.J5<.~iJ;A:m 0
*B~Z-~R.~ffi~*~Mm~.,~~m~~
1:il:~~~*J3.-g-~~EtJMm~. 0
*B~z~R.~ffi~~~~~~-g-~EtJMm~M$
- 16 -
201127939
7t ' ~ Po ~ ~ ~ flj 5, 3 1 4 , 5 1 2 ' 7, 4 2 7 , 3 6 1 * pJT illt ;L ~ if ~Jt
o~
~ Z ~ E ~ ~ ~ ; ~ * R I ' R 2 ' R 3 ' R 4 ' R 5 & R 6 1* ~ EI
- 17 -s
201127939
~*~$~~-A •• ~~M-~~.~~~.~~.g- fm 1'1= F.S - ~ ~ • ~ ~ --F ~ 1t .g-!fo/.] :
A=
;it $ x I ' X2:& X3 1m 53U 1Jij 1l ~ EI EI3 0, NR3 ' :& S fffi
~,m~'~~'~~~zm~:&~~~z~~m~zM
$ Y I ' Y 2 ' :& Y 3 ~:¥ Y - ~ {* ~ EI EI3 {$ m~ , ~ ~
- 18 -s
201127939
:ff Mz JF 1m ; £L R I ' R 2 ' Y I ' Y 2 ' Y 4 ' EZ. Y 5 ~ .¥ j; - :ff ~
EI ill PS-DVB' Chelex' ~ ~~ , *~ ~~ 251: jf ~ ~ 6 m-= G m
EZ. ~J! {tl- :ff *J3. ~ ~ g~ ep 0
~*~ep~~-~ •• ~~m-~~mUT~.~~
A=
P...a--o\/O~
o==p XI4*
"C'--# C~HO""N~ ~O
A'=A~Rl
- 19 -
201127939
;!t $ 110 £ 5JJf L JJj{ T ~ 7]\ ~ t1t ~~ ; N,..., 0 ~ 7]\ {~~ Z ~
E ~m~L~*,J5 ; XI' X2' X 3 ~ X 4 ~J1.j:ili~ EI EI3 0,
N R 4 ' 75<. S *Jl ffX. L M $ ; X I ~ t1t ~ t1t :¥ ~ Wij~ ; Y 2 75<. y 3
~J1.~E1E13~~~'~~~~~'~~~~~'~~~'
*~ ml {~ L 1$ ~ ~ , ~ 1$ ~ ~ , 75<. *~ ~ {~ ~ ~ 1$ ~ ~ ; R I '
R2 ' R 3 ~ R 4 1;] J1. ~ EI EI3 i\ ' ~ ~ , ~ ~ , *~ ~ {~ ~ ~ ~
, 75<. *~ ~ {~ ~ ~ ~ *Jl J1X ~ M $ ; J3. n ~ 1 :¥ 5 0 1$ Ej3 ~ I:iJ
.L-J ~ )7} fff ~ tJ ~ ffX. 1~ ~ -~ H~ ~ , '& n = 1 tJ m1~ 1$ Ej3 ~ ~
~ $ '& n = 1 .L-J ~ 1~ 1$ Ej3 ~ , J3. ~ 1$ Ej3 ~ * fIT ~ tJ ~ ffX.
1~ ~ -52 H~ ~ 0 ;!t $ n= 1 tJ m 1~ 1$ Ej3 ~ , J3. ~ 1$ Ej3 ~ * frr
~ tJ Jfg ffX. 1~ ~ -~ H~ ~ 0
*~$ffi~~Mm.m~~~~8~.tt~~~~~
~o~~,~.~~~.~~.~.e~~J3.~~.~&
Vltj 11 ~ti ffij ~ ti tt 5& $ I¥J ff!! ffl 0
*~~~-~mW~~~~ffl-.~~Mmf.'~
m~~,~mmL~*~J1X~~*~mff!!ffl$,;!t$Mm
f.m~~~W~~OOL'~~$~~~OOL75<.~~$1¥J
~ JIti ( iz JIti ~ it ~ ) ~ ~ 0
*~~~-~m.~~~~ffl-.~~Mmf.W~
W\ ~ ~ to/.) ( 11' NP ~ ~ - ~ ~ 11 Mm f • m '§' ~~ ~ L {t i5' to/.)
)L~*~J1X~~*~mff!!m$'~$Mmf.W~W\~
~~~~~W~~OOL'~~$~~~OOL75<.~~$I¥J~
JIti ( iz JIti ~ {t ~) jf1l i5' 0
- 20-
201127939
*~~z~~~~u~~~£z-~~~~~~~~
it €I ~o/.) ffiJ f~ ~ *J1 ~ ~o/.) §g ~ fjJ. JiB ~ ~ 1£ * 2!f: 1m ~ ~ ~ f~ Wj rl3~
ii:~z~OO91~~o/.)EZ.fj~~o/.) 0
l£*~~z.~~'*~U~*k~m~*~~~~
€I~A~~m~R~~€I~z-~~®~A*2!f:A~~m
~o/.) r:p 0
~~~~~~~~~u~m~z-~~M®~*£
*~ 1 ~*~ 99 ££% Z~~~U 0
* ~ SA Z *J1 ~ ~o/.) fu ~ 13 0 £ £ % ~ *~ 9 9 £ £ % £!. ~
~ ~ JiB *~ 1 £ £ % ¥ if=] 8 0 £;. % Z W 71< Ii m® f§ f~ ~~ ~U
,~r:p~m~~~~~~W*IimZf§.m~oW*Iim
Z f§ • ~~ ~U S"J Jf f9U ~ 13 {8 /f ~N 1l~ = Ej3 ~ Z It ijt ( D MAC )
, N - Ej3 ~ ott O~ 13t ~ (N M P) 'N - Z ~ otc ~ m~ (N E P) ,
N - f~ ~ Z ~ ott O~ 13t rtJ ( H E P) , N -~ a ~ ott O~ m~ ( C H P
) '=Ej3~:s::2ti11 (DMSO) '~TtiII, =Ej3~tiIIltijt (
dimethylfonnamide' DMF) 'N-Ej3 ~ till It ijt ( DMF) 'till
It ijt ' ¥ Z ~~ ijt ( MEA) , = tt ~~ ijt ' = Ej3 ~ - 2 - OJlZ DIE ~
( D M P D) ,OJ§ Dif,f\ , N - a,~ Dif,f\ - N - ~ it to/.) ( N M NO) ; o;fE D~ DIE
~ ~ ( ~"tzD 1, 3 - = Ej3 ~ - 2 - o;fE D~ DIE ~ ' 1, 2 - = Z ~ - 2 - o;fE D~
DIE ~ ' ~ 1, 3 - =~ ~ ~ -2 - o;fE D~ DIE ~) ; ~ ~ ~J! ( ~ "tzO r -
Tpg~~ 0 -rt~~) ; 1Z9~*JlM' ~a~~, ~a~, ~
Z=M~EZ.~~=M~,tt~,tt~~~~,tt~-B~
~'Z=~,~=~,~~~=~,a=~,Z~EZ.~~
~&/~~~~'=tt~'~¥~T¥=ttM,a=M'
- 21 -s
201127939
Z=~~£~'Z=~Z£~'Z=~~£~'Z=~~
~T£~'=Z=~~£~'=Z=~Z£~'~=~~
£,z£~~£M'=~=~~£~Z£~'~~£'Z
~£~T~£-=:.1t~, ~T~£Z~£-2-~~' 3-~£
3-~~£T~' ~=~~-='T£~' &;!t:fii!rmij3C~' ~~j
~~~~mm,~m,~.m'~~~~~~~(H~~
£ rm ij3C m~ ij3C £ ~ m) , & i§: 1E9 1~ ~~ z r~ ~ ~m 0 'i' flJ m~
, !f!5t f~ z m~~ ~ = ~ £ Z Ii ij3C & = ~ £ -2-O~ UIE m ' = ~
£ ~ • & N - ~ £ OIt ~ ~ m " = 1t ~ ij3C ' &~ Z ~ ij3C 0
¥3 0.001 mil%~ 45 mit%zMm 0
~~zMm~m ••• m~~.M~'R~i§:1E9W;!t:
fili ~ 7t if§ ~ 0
•• Mm~mID~M'ID~.'~M'~M'~~M
, -:fA ~ M ' ~ M ' tif!1 M ' & m {l;J, ~ 0
~.Mm~m~R~&/~~~~~ •• m,;!t:~§
~~~.~Z~m~~~m~~M~,~.~z~m~~
~m~~.~,~m&~~mz=~M~'~~~'=&
-~Mm'~Mm'~£Mm'~~M~'~£M~&/
~~~Z~.~j~~{~~ 0
~§#~.~~m~~~mZ~~.mz~$:~M
(~.) 'ZM (MM) '~& (~£ZM) ,rtM (M
1\[&) ,a& (~nE&) '~&' $& (~mM) ':f&
(7(frfr~&) '~& (~m~&) ,+-&, +=M (,Fj f.t
&) ,+-=.&, +IZE& (~.Rft!&) '+1i&' +1\& (
- 22-s
201127939
f* f181 M) , + -t; ~~ ( ~ I* M) , + J\ M ( til mg M) , = +
~~ (1£~~~) ,=+=~~ (LLr~M) ,=+[9~~ (~~f*
M ' 1m tt • M ( petroselic acid) , 1m tt • ill ~~ (
petroselaidic acid) , 1m M ' D 1m ~~ , 2M 1m ~~ , 11 ~ ill
~~ ( linolaidic acid) R. -:(;( 2M M 0
~ E! 3Z ~ ~ ~ fD ~ ~ ~ fD ~ f~ ~~ ~j L tt$ ep : 2- Ej3 ~ D<;
M' 2-Z~cM' 2-~~~~~' 2-T£¥~~' 2-D<;£=E~~
'2-c£~~~' 2-~£+-M' 2-:¥£+=~~' 2-=E~+
-M' 2-~~+[9~~, 2-+-~+Ii~~' 2-+=~+t\~~
, 2- + - £ + -t; ~~ , 2-+ [9 £ + J\ ~~ , 2- + Ii £ + fL ~~ ,
~~~ ($L~~) 'f~~T=M (~~M) '2,3-=f~£T=
- 23-
201127939
~ (1YJjE~) '2-f~£-1,2,3-pq=f~~ (f$fj~) 'miJ
1tII ~ , 2-f~ £ $: Ej3 ~ ( 7.1< m~ ) JJz. 3 , 4 , 5 - - f~ £ $: Ej3 ~ (
19.~T~) 0
~ EI ~1~~~ 2-~1~pq~ (pq~~) JJz. 4-~{~jj(;~
(:tImEmt~) 0
~E1~£~~ZU$ pq~~'~~~'B~~'~
B~~'M~~'~~~'$:£pq~~'Ej3~~~'~~
~'~~~'M~~'~~~'*~~~'~~~~~'
~~~~,~~~~,~~~,~~~,m~~,JJz.~~
~o
~E1ffiEj3~~~'=Ej3$:~~'Ej3$:~~,+=m£
$:~~'=~Z~'JJz.~~~~~~ZU$o
*!J 0.001 m::Ii % ¥ 45 m::Ii % Z M 0
~~~.~ •• M~~•• '~~~®.
w~~~~m~o••• ~mM~~M'M~~.'
M~~~'M~~~JJz.~~~o~•• ~m~.~~JJz.~
~~£~M~~~o~.~~~~~m{S~~~m~~~
, ~ Jtj fj~ * ~ 8)3 ~ ~ W 7.1< B.. ~~ ~ 0
~-~ •• ~$,m~~~~-~,=~~=~~~
o~-~~ZA•• ~$,~m~~~~.~~,=~~
~=~~o~~~Z~~£~~A~1¥500~~To~
~ Z m ~ ntc ~J! Z • f9a ~ m{S ~ m~ ~ • Z ~ n3i ( MEA)
z~n3i' =z~n3i' ~-T£=Z~n3i~pq~n3i'2-ntc
£ -1-~ ~ , 3-ntc £ -l-pq M ' :W T M n3i ' 2-n3i £ -2-Z ~ £
- 24-
201127939
z ~, ' Ez. 2 - Wti ~ -2 - Z $, ~ FKj~' 0 Il9 *& i3t ~ i1i ii. $, it ~~ IiJ
1--) -§ t/5 is /f ~N ~ ii. $, it Il9 Ej3 ~ i1i ( T M A H) , T M A H E. 7.K
-Et to/] , ii. ¥\ it =f ~ Il9 Ej3 ~ i1i ( B T M A H) , ii. $, it Il9 T ~
i1i ( T BAH) , ii. $, it 2 - 1~ ~ Z £ -=. Ej3 ~ i1i ( Ilt ~) , Ez.
ii. $, it -=. ( 2 - 1~ ~ Z ~) Ej3 ~ i1i ( THE M A H) 0
~~ O. 0 0 1 £ .,;. % ¥ 2 5 £ .,;. % L $ it ~tl 0
NaB S) ) Ez. IE Ej3 ~ O,~ D*f\ ~~ Z m~ , 1ifrt ~~ Ej3 ~ ( M M A) , Ez.
x-Rl
\+R2:--N---tI--C--C~-C--NR]/ H, II,
n
~ep Rl ~-H' -CH 3 , C2-24-i3t~~-~~, ~~¥y
- @I ~ E! -CI ' -Br' -OH, -NH2 ' -CN L *~ If:SZ i-t L C2-24-
- 25 -
201127939
ml i-t ~ iJt ~ -~ ~ ~ 75 ~ , R 2 & R 3 Ii. fEi 1ii J1. ~ ~ Ei C H 2
CN ' -CH 3 ' -CH2-CH3 ' -CH 2-CH 2-CH 3 ' CH(CH3)-CH3 '
-CH 2-OH, -CH 2-CH 2-OH ' -CH(OH)-CH 3 '
-CH 2-CH 2-CH 2-OH ' -CH2-CH(OH)-CH3 ' -CH(OH)-CH 2-
CH 3 , -CH2CH2-0)nH, ;!t '* n=l' 2, 3, 4, 5 ~ 6, .§. x
~~.To
{f(.J 0 . 0 0 1 m ft % ~ 25m ft % Z ~ :¥I ¥\ it & ~ 1* 11 fm
~ it .g- 40/.1 0
~~~.g-~~m~~&&;!t •• (~~~~&.~~
,~~&~~.'~~&~~.'~~&~~.)~;!tm
~ ~ ( ~ ~D N, N - = z ~ 1<1 ~ H* ' N - 2f$: ~ 1~ ~ H3i: H# & ;!t 1'3
~~) ~¥\~.;.'.&~Z~~~.'.'~Z~
~~. &;!t~~¥\~~*~~~EirnUTm~ZM,*:
~~~.¥*.g-~,~~~.~*.g-~,~~~.';!t.
• & ;!t *fl.g- 0 rn M: ~ ijl Z"M( , 1~ ~ H3i: ~ ~ • ML ~F ~ {~ 0
~m*~~*~~Z~ffi~;!t~~.g-~~=§~~¥\
1t ~ , ~ ~D ~ ¥\ 1t = 2f$: Ej3 M 0
~ :¥I ¥\ 1t / ~ 1* 11 §~ Z :95 j} ~ ~ ~ :¥I ~ it .g- 40/.1 ~ ~ ~
~. ' ~ 55U 'If 19t1 ~ iJt ~ ~ ¥\ ~ • & 75 ~ ~ ¥\ ~ ~j 0 ,5t {~ Z
~~~(a)~~2f$:M&;!t •• ~~~m~~(~~iJt~
~ ¥\ 2f$: M.) ,{B iQ ~ tJ {~ m ~ ¥\ ~ -a-~ M & ¥ ~ ¥\ 2f$:
= Ej3 ~ ~, (b) H~ ll* ~ *~ ~ i-t Z ij~ ll* ~ ¥\ M. ( ~ ~D ~
~ ~ F.J f! ~ , ~ ¥\ ~ ij! ij~ M ' c - 2f$: = Ej3 9 H* ~ ~ ¥\ ~ a M
[2f$:= Ej3§2H3i:~~¥\~aM (PAP) ], r~-~~2f$:MH3i:~
- 26-
201127939
~~~~=M'=~~~+-~-M'=~~~~=~M
~Ji' 2-~~=~~~TiJt-l,4-=~~' N,N-t;f~= ~ M~=
- 27-
201127939
'=~Z£=~nZ~'~£-Z~~~~=Z~'~~
=Z~ 3-~~' ~**,fl3(~=Z~' N,N-= (."'.f~~Z~
) i:tfl3(~' N- (1,2-=m.~-2-f~~Z~) i:tfl3(~' N- (
1,2-=m.£-2-f~Z~) 7(~fl3(~:@G~£=Z~ (NTA) )
, ~!1 I¥J = ~ ~ ~ ( ~ tlo 1-f~ ~ Z m -1,1-= ~ ~ ( H E D P
) '~Z~~~~800~~TI¥J~~~~~'~~~~:@G
fl3(£Zf{j~~, JJz. 1-fl3(~Zm-1,1-=fl~~' ~Z~~~
~800~~TZ~~~~~'JJz.~~~~:@G~~zm~~
) 'fl3( ~ ~ ~ ( ~ tlo f$ Z ~ = fl3( [g ( f$ Ej3 ~. ~ ~) , = f$
Z£=~E(~Ej3~~~):@Gm~=(~Ej3~~~)) ,
fl~§~:g,~m.~ (~tlo 2-~rm~Tm-1,2,4-=m.~) &$
~ *~ ~ 0
*!J 10ppm ~ 5% Z ~ 1m fr5 '1:1 ~~ 0
**.~zm~~~~fu~U~~#.Ttt'~.T
tt'~.Ttt'&/:@G~tt~1mfr5tt~Wm~1mfr5tt~~
)to
~:;I: ¥J 0.001% ~ 10% z •• T 1Jj 0
•• T1Jj~~1B~~~=~~~,.~~,~.~'
7\ii.~~~pg, 1\~~JJz.lZYl\iI]~ 0
*.~zm~~m~~U~~~tt~)tz:g,.m~o
~~,~m~~~u~~:@G~*~~~~-.Mm~
~~~~&*m~ott~-~~nOO~,~m~~~u~
~~~-.Mm~~~~~'*&-:@G:g,.W*RmZ~
.m~ott~-~~nOO~,~m~~~u~~~~-.
- 28-
201127939
®,~mm~~U~~~Y-~~~TM~~~'*&
~~~.~~~o~~-.OO$,~mm~~U~~~Y
-~~~TM~~~'*'-~~~W*liw~~.wm
'&-~~~M~~~o~~-.OO$,~mm~~~~
~~Y-~~~TM~~~'*'&-~~~~*L~~
~ •• ~~~.~~~o~~-.OO$,~mm~~~~
~~Y-~~~TM~~~,*,-~~~.~m&/~
~ ~9! fm ftU ~U 0 ~ ~ - • {§U $ , ~ *43. mtm ~ tJ ~ ~ ~ Y - f~
~~T.~~~'*'-~~~W*liWZ~.m~&
~~~£*L~~~ •• ~~~.~~~o
~1tmz$~~~ 0
* ~ SA ~ - {§U 7R I¥J ~ 1m • {§U ~ - f~ Jjm, no ~ ~ Y 7]( & t~
- 29-
201127939
30fY:¥ 90fYZ*~i8l11pg 0
~~:¥~-R~m~.~~~zM~m.~~~~~
~ m TW * m f~ ( 19U ~D f«3 10 :¥ *,t.J 5 00 fg m~) 0
~*~OOm~ffW~~~~'.7m:~~Z~~m
£.~MW£M~®.~~~~~~R~®~z~~~o
~m~.~~~~~*m~~~~g~®~~m~~M(
~~.~~~~~m~.~~~M~~z~ •• ~~~~
~~) , mG ~ • ~ tt} JJO ~ ~~ W~ Z ~ 1M ~~ ~ ~ I¥J m mN ffij 1'1=
mM~~U 0
B.~~m~.m.~~~.tt.~~~~m~*$
,~~.tt.~~.~mo~~,~~m~.~~~Z~
~/M~~*~~.~~.pHmG~~~ffij~~o
~m*~$M.~z.~M~~~m~m£m~,*
.~~~~~M~*_ •• ~~~$M.mz~•• ~(
g~~ •• ~~~zgW~)~~~_~~~~Z~~~
1rif ' ~ 7JU ~ ~ frj m_ ij I jf ~ ( 1e a din g e d g e) ~ filLj I¥J 'f1f r£
$' ~$f~mm1'l=mf$_~g 0
*~$M.~z.~Mzg-.~~~R.~M~~
mf! ~ ~ * f~ m tJ 1'1= m 1& m C M P M~ ~U ' ~ m~ ® ~ 7JU
Z~~~W~ •• ~ffittm~A.tt~tt.·•• ~ ••
75<. THE M A H ml' ~ • 'f1 0 ~ - 19U ~ I¥J A 1m • 19U cp , ~ ~
~m~.~~~z~~~~~£M~~gW~ZTW(g~
1:E fJl •• ~ • ~ ~ r13~ ) ~ ji- m 71< mf! 0 1:E - ~ 7JU A • • 19U
$' m~{~~~f«3 10:¥*'t.J 500 0
- 30-
201127939
*B~Z-~R.~~~~-~~~R.~~~MM
ffi~~~~~W~~n$'~n$~mUT*~ m*~~'~~~~.&/~~.~~$~&/~M'U&~
~A.~~'BBm:~~~~~~~~gW~~~
·ffl~m~·&m~Am~m$*~~~~~~~~'~
~~*B~Bfr*~$~~~~~k~R·W~&.
~m~&~~'.7m*~~~~~m~§~ffi~ZMR
~~~ffi~~°fr*$~*$ffim&Zffi~~~~R'W
flJ & W flJ $ ~f!f * ~ m* 1ft A * ~ 1"1= m~ ~ 0
- 31 -
201127939
1~ a,ij -I;fU tt a)j t(*I'fl~W~~J:t ' Jltro':f ' ~W~l:~@;IJ , *§CMW~mW~)
- ~ .l1}J~.: (+~/~~)
~1~T~~ (Troika acid) *¥fmm~*J3.fflGtO/)&f~J1lI31t
Troika acid semiconductor cleaning compositions and methods of use
o
862640
(2006. au(2006. on
o
- 1 -
201127939
Semiconductor processing compositions for use with silicon wafers having an
insulating layers and metallization layers on the wafers comprising water and one or more Troika
acids which is also referred to as a, a -disubstituted trifunctional oximes or a-(Hydroxyimino)
Phosphonoacetic acids, their salts, and their derivatives.
- 2 -
201127939
b. 7.1< 0
2. tlo Efl ~N W flJ liB III ~ 1 Jj L *J1 fflG to/.J ' ;!t cp ~ !f,f m T
~ ~ , fa ~ to/.J WG m~ 'E1 ~ ,1:) T w J:t ;
OR, /OHP
~~N,OR t
OR3
°
;!tcp RI~1ID,' m£, ~m£, 15£' ~15£;
R2 & R 3 ~1ii:lL~ EJ E!31ID,' ilt£, ~m£, 15£' ~
3. tlo Efl ~N W flJ lB III ~ 2 Jj L *J1 fflG to/.J ' ;!t cp ~ m £ WG
15£~~EJE!3~£'Z£'~£'T£'~£'~£'
W-li~£~£' &m-li~£~£*J1fflGLMCP 0
4 . tlo Efl ~N W flJ liB III ~ 2 Jj L *J1 nx. to/.J ' ;!t cp ~ m £ ~
~~EJE!3~~'=$a£~,~~£~,~£~~£~,
2-1~£Z£-=.~£~' &-= (2-1<1£Z£) ~£~*J1nx.L
- 32-s
201127939
dendrimer) 0
~.ii%o
~~gm~·Mm·.m·~®mttm·~~~~~~~
M ffg z 1-1:: -@;- to/.) , m1-1:: ~U • & ~ 1-1:: to/.) 0
Me it m- fi ~ EI El3 p S - D VB· 11] ~IJ 5l ~JT ( C h e 1ex) . ~ ij7i
. *~ ij7i 2)(: !Jf z 2fS: Z m-=z m~ 2fS: • ij7i 1-1:: Z IDJ - Ej3 ~~ fM g~ .
& *~ ij7i 2)(: !Jf Z R 1$ ~~ * fM g~ *fI. ffX, Z !if $ s"J fM g~ 0
M~z~®&mm·~~g~~·~®~g~~·&~~
jlJz-~~flf~c~fr;!t~®J: ;
- 33-
201127939
OR2 OH
'p/cf:tN
, OR)
OR
o
;!t t:j:! RI ~ i\ ' m £ ' ~ m £ ' 75 £ ' ~ 75 £ ; R 2 :&
R3~.~~~~i\,m£,~m£'~£'~~£'M
,&m£~75£~m~z~;;!tt:j:!~~fr~~~M&~~
T~~~m~~~~~~~fr*~~~~MM~~Z~®
~£~~~~~£'Z£'~£'T£'~£'~£'
tt - ~#j £ ~ £ ' :& ~ - ~#j £ ~ £ HJl ~ Z M t:j:! 0
1 2. ~D EfI ~~ • to liB III ~ 1 0 Jj Z 15 f.t;. , ;!t t:j:! ~ m £ ~
~~~~~~,=~a£~,~~£~,~£~~£~,
2-1~£Z£=.~£n:, &:=. (2-1~£Z£) ~£~1i:HJl~Z
1 3. ~D EfI ~~ • to i'B III ~ 10 Jj Z 15 f.t;. , ;!t 9=' ~ ~ ~ -F
~~,m~~~m~9='~Y-~~~ffi=~~m~~-F~
~,m~~~;!tm~Zw~~~~~o
1 4 . ~D EfI ~~ • to i'B III ~ 1 0 Jj Z 15 1~ , ;!t t:j:! ~ HJl ~ ~o/.)
frR~~~&~~~HW~~~~mM~.~~~~*.
1 5. ~D EfI ~~ • to i'B III ~ 1 0 Jj Z 15 1~ , ;!t t:j:! ~ ~ ~ ~
~~ft~*.~~~15f.t;.MMZ~~~~~®~~~Z~
o
- 34-s
201127939
.~~oo~*.$~m-~~~¥~-~~m~9·~lli
~t~~~g~Jiz*Jimt~ 0
- 35-
201127939
\!9,~Jtft*lI1:
(-) *- *~ij Jtft* 1I1!J : 1ft.(~)*-ft*II1~~*~~AA~~~:1ft.
- 3 -
201127939
OR, /OHl'
~~N,OR\
OR3o
- 4-