ultrasonic motor - innovation matrixinnovation-matrix.com/products/datasheets/th/technohands catalog...

Ultrasonic motorTiny Utrasonic Linear Actuator　TULA series

PUMR series

Technohands Co., Ltd. www.technohands.co.jp

Overview

What are Ultrasonic Motors?

Main Features of Ultrasonic Motors

Applications

The ultrasonic motor operates using a piezoelectrical mechanism to convert a vibration movement into a

displacement movement. Ultrasonic motors are used in either rotary modules or linear modules.

• Attain low speed and high torque (thrust) without slowing down the machine

• Maintain high torque (thrust), with no electric current present, therefore, no

heat is generated

• When movement is stopped, frictional force brings movement to a complete

stop with no unwanted vibration

• Direct mechanism allows high machine responsiveness

• Simpler and fewer parts allow for decrease in mass production cost

• Nonmagnetic construction allows for unaffected operation in presence of magnets

• Vacuum application is available by changing materials.

・ Microscope stage　　

・ Small interferometer stage　　　　　　　　　

・ Stage for vacuum use　　　

・ Stage for medical devices　　　

・ Stages for zero gravity　

・ Stage for semiconductor equipment

・ Stage for precision small-scale application 　　　　　　　

・ Mirror alignment unit for optical system 　　　　　　

・ Stage for strong magnetic field environment

・ Flow adjustment for valve and nozzle

Ultrasonic Motor　

TULA （Tiny Ultrasonic Linear Actuator)

1

In general, actuators in mainstream use are electromagnetic and fluid (air and oil pressure) types, but in recent years,

ultrasonic motors have appeared as a completely new trend. They were previously used in the industrial field, but they

are now increasingly being used as mobile actuators for digital cameras and cellular phones. We coordinate with our

company partners to commercialize new products, offering much sounder, better service. From rotary modules to linear

modules, we supply our customers with a wide variety of this latest developed ultrasonic motor.

・ Camera (AF, Zoom, Anti shake)

・ Small manipulator

・ IR filter for camera

・ Laser beam adjustment unit

・ Surveying equipment

・ Stage for object lenses

・ Small robot

・ Unit for braille

・ Actuator for surveillance camera

・ Industrial shutter


2

Drive Principle

Uni-morph typefr: 114kHz Coupling coefficient : 24%

up Down

Bi-morph typefr: 128kHz Coupling coefficient : 43%

Elastic material

Piezoelement

Elastic material

Piezoelement

Piezoelement

Uni-morph typefr: 114kHz Coupling coefficient : 24%

up Down

Bi-morph typefr: 128kHz Coupling coefficient : 43%

Elastic material

Piezoelement

Elastic material

Piezoelement

Elastic material

Piezoelement

Piezoelement

Elastic material

Piezoelement

Piezoelement

Pi = dijkTjk

Sij = dkijEk

Direct piezoelectric effect

Inverse piezoelectric effect

Micro-miniature Ultrasonic Linear Actuator: TULA, is either a unimorph or bimorph type of next generation actuator that operates through piezo-ceramic vibration control. Piezoelectric ceramic is fixed to the end of the drive shaft, putting the preloaded friction in the drive shaft, preventing heat emission and vibration that would occur with electromagnetic motors. The principle mechanism is the transference of vibration from the piezoelectric ceramic to the drive shaft. The movement from the vibration pulls the friction by changing the duty ratio of the forward and reverse movement, using this action to create motion. Minute movement is controlled by high frequency vibration, allowing the actuator to move smoothly. For its micro-miniature shape, it can provide high thrust and motion retention; it is an ideal actuator for micro positioning.

Drive Principle of TULA

Unimorph Type

Bimorph Type


3

Example of Friction Body Structures

・ Trembler Diameter ：φ7.5mm

・ Shaft Length : 22 (available from3 ～ 30mm)

・ TULA70W (available from3 ～ 45mm）

・ Thrust ： 40gf

(Varies with the pressure force of the moving body)

　　・ TULA70W ： 50gf

・ Load ： 100ｇ

　　　・ TULA70W ： 150ｇ

・ Holding Force ： 150gf

(Varies with the pressure force of the moving body)

・ Stroke ： 3 ～ 30mm

・ Vibration Frequency ： 30 ～ 70KHz

・ Drive Voltage ： 20 ～ 38V

(19.5)(22)

1

7.6

(15)(22)(30)(40)(45)

1

7.6

TULA70 TULA70W “W” notation is for double piezo

(28)


・ Shaft Length : 14mm (available from 3 ～ 14mm）

・ Thrust ： 15 ～ 25gf

・ Holding Force ： 30 ～ 80gf



・ Drive Voltage ： 12 ～ 30V　　　　　　　

TULA35

14

1 0

4

3.60

23

2.43

1.50

3


・ Shaft Length : 22 (available from3 ～ 22mm)

・ Thrust ： 25 ～ 40gf

・ Holding Force ： 100 ～ 150gf



・ Drive Voltage ： 10 ～ 38V

TULA50

（16.5,20,22）

φ1.32 0+0.005

18.6

Standalone Actuator Specification (TULA35, 50, 70, 70W)　

elements on both sides

+0.005

φ1.32 00.005


4

●ST50S-16.5 Type●ST70S-22 Type

●ST50A-16.5 Type●ST70A-22 Type

●ST35P-14 Type ●ST50P-16.5 Type●ST70P-22 Type

PCD302 Type

＋

5V Power supply, USB cable

＋

Drive Thrust

Holding Force

30 ～ 40gf 40 ～ 60gf 25 ～ 40gf

100gf

PCD301 TypeCompatible Driver/Controller

150gf 80gf

The Ultrasonic Linear Actuator operates using friction caused by the repetition of the expansion and contraction of the axel

(impact type) with the vibration from the piezoelectric element. This is why the moving body (friction body) is an important

element in TULAs.

Evaluation Kit (with friction body) Open Loop Type

●ST50S-16.5 Type●ST70S-22 Type

●ST50A-16.5 Type●ST70A-22 Type

●ST35P-14 Type

●ST50P-16.5 Type

●ST70P-22 Type

1

23

4

5

A A

1.70

0.20

236°

72°

1.2

Cross Section A-A

ST***-***Type

1

1

()

( )Spring wire diameter 0.2

()


5

Encoder Type　●　Ultra Small Ultrasonic Linear Stage

Capable of high precision with integrated high precision optical encoder.

This product features significant strong holding force capability for an Ultrasonic actuator. 8.

68

14

511

2526.23

12 14 18

4-M2.5 Deep2.0

2-TULA50(16.5mm)

7 16 23

101222

2-M 1.40

2- 1.20

2.502.50

Encoder FPCB = 150mm

● X Axis Stage (st:4 ㎜ )Model Number ： XDT50-042 Type

-Specifications-1. Stroke ： ±2mm2. Resolution: 1μm/p (A, B Phase) Option ： 0.1μm/p3. Repeatability ： ±3μm4. Thrust ： 80ｇｆ5. Holding Force ： 300ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA50 (16.5mm)

1. X Axis Stage・ XDT50-042 Type 5P・ XDT70-102 Type 　6P・ XDT70-152 Type 　6P

2. XY Axis Stage・ XYDT50-042 Type 7P

3. Theta Axis Stage・θDT70-0062 Type 7P

4. XY-Theta Axis Stage・ XYDT50-042/θ70-0062 Type 8P

5. XY Axis Hollow Stage ・ XYHDT50-042 Type 8P

6. X Axis Stage (Resolution 1μm, 5μm)・ XDT50-041 Type 　9P (Avago)・ XDT50-069 Type 9P (Micro E)

Slider

Leaf spring

TULA70

scale

Optical encoder

BaseShaft


6

Encoder Type　

8.68

511

1425

26.23

12 14 18

Enco

der F

PCB

= 15

0

Mot

or F

PCB

= 15

0mm

4-M2.5

2-TULA70(22mm)

12 21.5

028

.50

1210

22

2-M1.40

2- 1.20

5.25 5.25

-Specification-1. Stroke ： ±5mm2. Resolution ： 1μm/p (A,B Phase) Option ： 0.1μm/p 3. Repeatability ： ±3μm4. Thrust ： 60ｇｆ5. Holding Force ： 300ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA70 (22mm)


8.68

12 14 22

1425

26.23

511

4-M2.5Deep2mm

Mot

or F

PCB

= 15

0mm

Enco

der F

PCB

= 15

0mm

2-TULA70(28.0mm)

10

1222

18 27 38

2-M1.40

2- 1.20

8 8


-Specification-1. Stroke ： ±7.5mm2. Resolution ： 1μm/p (A,B Phase) Option ： 0.1μm/p 3. Repeatability ： ±3μm 4. Thrust ： 50ｇｆ5. Holding Force ： 300ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA70 (28mm)


7

Encoder Type　17

.35

4-TULA50（16.5mm）

14

144-M2

18

25

Mounting hole for 2-M1

12

7

22

23

2.40 4

10 12.1

0

15

10.5

0

7

20

2612

2- 1.20

2-M1.40Deep 3.0

22°

2-TULA70(22mm)

58 15

.50 23 26

3151820

32

4-M2.50 Deep 2.5


● XY Axis StageModel Number ： XYDT50-042 Type

● Theta Axis StageModel Number ：θDT70-0062 Type

-Specification-1.Stroke ： XY±2mm2.Resolution ： 1μm/p (A,B Phase) Option ： 0.1μm/p 3.Repeatability ： ±3μm 4.Thrust ： 60ｇｆ5.Holding Force ： 250ｇｆ6.Moving Speed ： 10mm/ｓ7.Driver ： PCD302 Type8.Actuator ： TULA50 (16.5mm)

-Specification-1. Movement Amount ： ±3° Option ： 360°Can be Changed2. Resolution ： 1p ： 0.005° Option ： 1p/0.0005°3. Repeatability ： ±3p ： 0.015°4. Torque ： 50ｇｃｍ5. Holding Torque ： 150ｇｃｍ6. Moving Speed ： full Moving 0.4seconds or less7. Driver ： PCD302 Type8. Actuator ： TULA70 (22mm)


8

Encoder Type　

● XY-Theta Axis StageModel Number ： XYDT50-042

-Specification-1. Stroke ： XY±2mm, θ±3°2. Resolution ： 1μm/ｐ, θ0.005°/1ｐ3. Repeatability ： ±3μm, ±0.015°4. Thrust ： 60ｇｆ, 50ｇｃｍ5. Holding Force ： 250ｇｆ, 150ｇｃｍ6. Moving Speed ： 10mm/ｓ, full Moving 0.4seconds or less7. Driver ： PCD302 Type8. Actuator ： TULA50 (16.5mm), TULA70 (22mm)

71418

2.505

11

2628.62

25

4-M3

12.1

08.

688.

68

2.50 2.50

25

29.4

5

TULA50(16.5ｍｍ）

TULA50(22mm)

0.30

0.30

0.27

2.50 2.50

Linear Scale

22

7

5.5


7

15 20

32

7.50

15

21

5

4-M2.50Deep2.5mm

Encoder

● XY Axis Hollow Stage Model Number ： XYHDT50-042 Type

-Specification-1. Stroke ： XY±2mm2. Resolution ： 1μm/p (A,B Phase) Option ： 0.1μm/p 3. Repeatability ： ±3μm 4. Thrust ： 60ｇｆ5. Holding Force ： 250ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA50 (16.5mm)

2.10 2.10

4.70

16

4

2.10 2.10

4-TULA50(16.5mm)

4-Guide Shaft(15mm) Encoder FPCB 150mm

24

30

38

2036

14 17

4-M2

30

36

7

4- 3.20

45

24

45

2040

30 36 45

4-M2

4- 3.20 ThruCounterbore 5.7Deep1.5

/θ70-0062 Type


9

● X Axis Stage (Resolution ： 5μm/p)

Model Number ： XDT50-041 Type8.

85

Encoder(AEDR-850x)

10

5

18

84

1125

4-M2

26.23

1.65 15

.05

912.06

2-TULA50(16.5mm)

5

9.50

612.50

22

21

2-M2Screw Holes（Mount from rear）


8 2.502.50

18.60

Encoder Housing(Molex 53048-0810)

-Specification-1. Stroke ： ±2mm2. Resolution ： 5μm/p (A,B,Z Phase)3. Repeatability ： ±15μm4. Thrust ： 80ｇｆ5. Holding Force ： 300ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA50 (16.5mm)

● X Axis Stage

Model Number ： XDT50-069 Type

-Specification-1. Stroke ： ±3mm2. Resolution ： 1μm/p3. Repeatability ： ±3μm4. Thrust ： 60ｇｆ5. Holding Force ： 180ｇｆ6. Moving Speed ： 10mm/ｓ7. Driver ： PCD302 Type8. Actuator ： TULA50 (22mm)

21. 61

16

19.5

A

A

10

10

2.53

24.6

4-M2

B B

2-M33

2.3

2.3 3

20

10

12.4

1520.6

5.4

FPCB

14.66

±0.0

5

1

1.3

-0.20

Cross Section A-A

32.62

64.38

1.38

Cross Section B-B

Encoder Type　

Stage for a Strong Magnetic Field

General Purpose Stage


10

Open Type　

7.37

TULA50 (22mm)

1410

18

1015

5

17

4-M2

5-M2

21

17

22.50

41.

70 7.37

● Open X Axis Stage

◆（A） XDT50-06 Type -Specification-　　　　1. Stroke ： 3.5mm 　　　　2. Thrust ： 50ｇｆ　　　　3. Holding Force ： 120ｇｆ　　　　4. Load ： 100ｇ

（A）

（B）

（C）

◆（B） XDT50-09 Type -Specification-　　　　1. Stroke ： 6.5mm　　　　2. Thrust ： 40ｇｆ　　　　3. Holding Force ： 120ｇｆ　　　　4. Load ： 100ｇ

◆（C） XDT50-11 Type -Specification-　　　　1. Stroke ： 8.5mm　　　　2. Thrust ： 35ｇｆ　　　　3. Holding Force ： 120ｇｆ　　　　4. Load ： 100ｇ

XDT50-11 Type

17

6.21

8

6.50

3

6.60

2.50

4.501.50

4-M1.4Thru

88.94

1

◆XLT35-06 Type

-Specification-　　　　1. Stroke ： 5.5mm　　　　2. Thrust ： 20ｇｆ　　　　3. Holding Force ： 60ｇｆ　　　　4. Load ： 50ｇ ● Small size X Axis Stage

Model Number ： XLT35-06 Type


11

35 3941

.50

15

5

7

4.70

4-M1.7Deep 3

4-M2Thru

7.80

17.7TULA70W TYPE 7.70

Aluminum（BLACK Aluminum）

Electroless nickel

Aluminum（BLACK Aluminum）

　　　　1. Stroke ： 27mm　　　　2. Thrust ： 30ｇｆ　　　　3. Holding force ： 60ｇｆ　　　　4. Load ： 50ｇ

● X Axis StageModel Number ： XST70W-27 Type

● X Axis StageModel Number ： XST70-09 Type

7.57

17.50

19.50

3.50

3-M2

2-M2

8

5.500 8

1 1

4.32

3.15

Aluminum

Teflon

SUS304

Aluminum

-Specification-　　　　1. Stroke ： 9mm　　　　2. Thrust ： 40ｇｆ　　　　3. Holding Force ： 170ｇｆ　　　　4. Load ： 50ｇ

Open Type　

-Specification-


12

TULA Applications

-Specification-1. Stroke ： Maximum 4㎜2. Thrust ： 30gf3. Holding Force ： 200gｆ4. Load：50ｇ or less5. Resolution：1μm, 5μm6. Moving Speed : 10mm/s

3 6 20 24

50

42

39

37

2 guide pin

2 Penetration

3- 1.40 Penetration

PCD 46

PCD 45

54

scale bar 10mm

CCD Substrate

Enco

der F

PCB

= 15

0 51.110 1

encoder

TULA70(22mm)

● Auto Focus Unit for CCD

● Manipulator & Finger Unit

23

23

719

7

24.5

0

Enco

der F

PCB

= 15

0mm

2- 1.20

Counterbore 3Deep1.0(M1.4 Screw)

2- 1.5

14.3

1 5

1.50

24.5

0

2.50

2.50

3.50

28.6

°

2-TULA50(8mm)

2.90

32.2

7

11.5

013

.50 22

.18

24.1

8

42.6

8

13.9023

7

412

23

2- 1.20

Counterbore 3 Deep1.0(M1.4 Screw)

2- 1.5

-Specification-1. 2 Axis Finger Stroke： 2.9mm2. Finger Thrust： 10ｇｆ3. Finger Holding Force： 30ｇｆ4. Control : Pulse Control （open）


13

TULA Applications

31

16

TULA70W (40mm)

TULA70W (45mm)

Crossroller

Width2.5 Deep1.5 Home Processing(Fixed Wiring)

40 50 51

4-M2Bolt Hole

3.0ADeep2.012- 1.6Thru

20- 3.2Thru24-M1.6 Deep4.0

35

60

3840

43

50546075

48 4553 504-M3.0Thru

4-

3.0Deep1.010- 1.6Thru

405- 2.3Deep4.0

12-M2Thru

11.7

020

Encoder

Crossroller

YAxis

XAxis

XAxis

● XY Axis Hollow Microscope StageModel Number ： XCT70W-302/YCT70-202 Type

31.50

R7.20

R2.50

11.507.20

R9

18

8.20

8.30

32

6.506.50

28.2021.65

26.75

R7

3.70

15.50

6.90

5.80

TULA50

A A

Drive Section Film Cover

Cross Section A-AScale1 : 1

● IR Filter Changer for CCTV

※Customization of the IR filter for surveillance

-Specification-1. Moving Speed ： 10mm/s

2. Drive Frequency ： 65 ～ 75KHz

3. Power Consumption ： < 40mW

4. Operating Temperature ： -10 ～ 50℃

（option : -30 ～ 70℃）

5. Dimensions(W×L×H) ： 32.0×32.0×18.9mm

6. Actuator ： TULA50 (20mm)

1. Motor Type : Ultrasonic Linear Motor (Friction Motor)2. Movement Direction : X, Y 2 directions3. Driving Mode : 　 Impact type of piezoelectric ceramic4. Maximum Stroke : 5. Effective Max. Stroke :6. Table Dimensions :7. Minimum Resolution :8. Positioning Accuracy :

9. Repeatability :10. Withstand load :11. Holding Force :12. Mass :

13. Encoder Model :

1μm75mm × 70mm

5μm300ｇ150ｇ

Item Specification （standard）

XAxis：±15.3mm, YAxis：±10.1mm

320ｇ

CE300-40E (Micro E)

XAxis：±15mm, YAxis：±10mm

±3μm

cameras are available.


14

TULA Applications

● Shake Prevention Unit

-Features & Application- 　

Shake Prevention Unit for Digital Camera

1. High responsiveness and retentive force leads to

replacement of VCMs

2. Surveillance cameras with reduced vibration and

unwanted motion

3. Shake prevention for video cameras, and more.

● micro pump

2

51

TULA35

10

R61.50

63.20

11.

508

black alumiteAluminum

brass

4

10

stroke:0～2mm

stroke changesAdjustment board for

-Specifications-1. Stroke ： 0 ～ 2mm

2. Thrust ： 10gf

3. Holding Force ： 30gf

● Braille Module

-Specifications-1. TULA35, TULA50 Type2. Thrust ： 20gf3. Speed： 8㎜/sec　（Applications）* ATM with braille support, small braille unit for mobile, display surface with braille.

-Specifications-1.Vacuum state : 10-6 Pascal2.Stroke : 3 axis 6 mm3.Thrust : < 40gf4.Holding Force : 150gf

●Vacuum actuator (under development)

FE SEM

XYZ Stage

※Vacuum unit shall be tested by customer.

● Auto Focus Module (under development)

-Features & Application-1. TULA35, TULA50 Type2. Auto focus for bar code reader3. Auto focus zoom for digital camera4. Auto focus zoom for mobile phones5. Auto focus module for industrial use


15

TULA Applications ●Objective Lens

XY Axis Drive

28.1

Z Axis Drive

S=6

S=4S=442.8

64.38

60

35

28.1

Constant Preload Spring Fixing Bold Holes

S=4S=4

11.31

35.82

M2

28.1

-Specification-

1. Effective Stroke (mm) : X (+/- 3.2), Y(+/- 3.2), Z (+/- 2.7)

3. Holding Force (gf) : X(160), Y(160), Z (130): with preload spring (130)

4. Body Weight (g) : XYZ axes (70)

5. Control : Manual operation or command control from PC

6. Option : JOG controller

⇔

⇔

⇔

3 Axis JOG Tracking Unit

● Industrial Lens Drive Unit

rens 25

49

R16.50

R18

44

25

24

34.9

A A

24

5640

4

28

44

3

25

storke 7.6 Effective Stroke10

Glass scale

Encoder PC Board (Avago)

R84.66

25

10

Cross Section A-A Scale 1 : 1

-Specification-

1. Thrust ： 45ｇｆ

2. Holding Force ： 150ｇｆ

3. Resolution ： 5μm

4. Positioning Accuracy ： ±10μm

5. Max Lens Payload ： 70ｇ

6. Stroke ： ±4 ㎜

Attachment Unit

Encoder

Glass Scale

Rens

Lens barrel

2. Thrust (gf) : X(40), Y(40), Z(25): with preload spring (50)


16

Driver ＆ Controller　

PCD-301 Type(1Axis)

Features

　1. Compatible to TULA 35, TULA50, TULA70

　2. Precise Position Control

　　・ High precision achieved with use of optical encoder

　　・ Open Pulse Drive (under 70nm per pulse under in-house test)

　3. Digital P.I.D. Tuning

　4. Input Command Types:

　　　1） External digital pulse commands

　　　　　・ step/dir

　　　2） Command input

　　　　　・ LabView/TeraTerm via USB

　　　3） Analog control input (0 ～ 3.3V, Option)

　5. JOG Motion

　6. Manual Operation from LCD Panel

Specifications

　1. Driving Frequency : 20 ～ 110 KHz

　2. Drive Voltage : 16 ～ 40V

　3. Drive Duty : 0 ～ 100%

　4. USB Interface to PC (use FTDI FT232R)

　5. PC Monitor Program

　　・ Driver Program (Tera Term) included

　6. Supply Power : DC12 ～ 24V, 1A

Pulse Generator PID Controller

Feed forward

Speed calculator

PWM Modulator

H bridge C ircuit

DC Step up

TULAMechnical Part

OpticalEncoder

FT232 Rcommunicationexchange

D ifferentialLine driver

RS232

QEI

Signal conditioner

commanddirective

pulse directive

(

Step/Dir )

speed directive( option )

Jog wheeldirective

D IO

ADC

QEI

LCD panel

16 char

.

X 2 line

PCD-301

dsPIC 33 F128MC804

1 msec sampling time

Block Diagram

　

(Power、USB cable included)


17

Driver ＆ Controller　

Block Diagram

Features

　1. Compatible to TULA 35, TULA50, TULA70

　2. Precise Position Control

　　- High precision achieved with use of optical encoder

- Open Pulse Drive

(under 70nm per pulse under in house test.)

3. Digital P.I.D. tuning

　4. Input Command types:

　　　1） External Digital Pulse Commands

　　　　・ step/dir

　　　2） Command Input

　　　　・ LabView/TeraTerm via USB

　　　3） Analog Control Input (0 ～ 3.3V, Option)

　5. JOG Motion

Specifications

　1. Driving Frequency: 20 ～ 110 kHz

　2. Drive Voltage: 16 ～ 38V

　3. Drive Duty: 0 ～ 100%

　4. USB Interface to PC (use FTDI FT232R)

　5. Supply Power: DC5V, 1A

　6. PC Monitor Program

　　・ Driver Program (Tera Term) to be downloaded

① 5Ｖ Power、USB Cable　　

PCD-302 Type(1Axis)

Closed Type

Open Loop Type

③ 1Axis JOG Unit

　　　　

2. Closed Loop Type PCD-302E Type　

1. Open Loop Type PCD-302 Type　

◆Options② Encoder Cable：1ｍ　　Motor Cable：1ｍ　　　

TeraTerm

④ 3Axes JOG Unit　　　　

pulse지령(option)

PCD-301

Master microprocessor (dsPIC33F128MC804)

ADC

RS232 ch1

QEI

DIO

PulseGenerator

QEI

Speed Calculator

PIDController

FT232Rcommunication

exchange Feed foward

H bridgeCircuit(1/2)

PWMModulator

DC Step up

signalconditioner

1msec sampling time

TULAMechnical Part

OpticalEncoder

joy stick

directive

(option)

command

directive

pulse

directive

(option))

jog wheel

directive

(option)

DifferentialLine driver

(option)


18

・ No electromagnetic noise; can be used in MRI and other medical applications

・ Large blinds or roll screens for hospitals, offices, and factories

・ Actuator for surveillance cameras

・ Fingers and arms for robots, manipulators, etc.

・ Flow control for various types of valves and nozzles

Features

・ Low speed with high torque without a gear reduction

・ No heat is generated when paused with high positioning control

・ Simple, slim and lightweight design

・ High responsiveness and quiet operation

・ Does not contain magnets

Shaft Diameter （mm）

Dimensions （mm）

Drive Voltage （Ｖ）

Drive Frequency （KHz）

Rotary Speed （rpm）

Torque （kgf・cm）

Max. Torque （kgf・cm）

Maintain Toque （kgf・cm）

Encoder （p/r）

Operating Temperature Range (℃）

Temperature during continuous

motor operation (℃）

Storage Temperature Range (℃）

Life （Hrs）

Ａ・ＢPhase ： 1,000(Option ： 5,000)

−20〜60

34〜37

91

φ6

44×44×19

3,000

−10〜50

（Motor surface） 55

Ａ・ＢPhase ： 1,000(Option ： 5,000)

2.5

2

1

80

120

40〜44

270

φ8

65×65×22

3,000

10.2

5.5

3

100

120

Application Examples

Specification

Camera AF (Auto Focus) Unit

PUMR40（Cut Model)

RotorStator

Piezoelectric ElementSpring

Friction material

Rotary Ultrasonic Motor　

Specification Model PUMR 40 PUMR 60

Weight （ｇ）

Ultrasonic motorTiny Utrasonic Linear Actuator

Technohands Co., Ltd.

[email protected]

6-29-34-103 Ookurayama,

Kohoku-ku. Yokohama-shi,

Kanagawa-ken, 222-0037, JAPAN

-U.S. Sales Rep. & Distributor- Innovation Matrix, Inc.

3080 Olcott St., B105

Santa Clara, CA 95054, USA

Tel: +1(408) 329-4422

-Head Of�ice-

Fax: +1(408) [email protected]

ultrasonic motor - innovation matrixinnovation-matrix.com/products/datasheets/th/technohands catalog...

Documents