Tiny wireless chip and

miniaturized glucose sensor

embedded between two

layers of soft contact lens

material

Accurate glucose monitoring

for diabetics using bodily

fluids, i.e. tears

Prototypes can generate one

reading per second

Experimenting with LEDs to

serve as early warning for the

wearer

Smart Contact Lens Google X

2 Source: Google X

Noninvasive Blood Monitor UCSD

Digital tattoo monitors blood below

the skin

Tattoos are needle-less, sensor-laden

transdermal patch and are painless

for the user

Tiny sensors “ink” can read blood

levels of sodium, glucose, kidney

function, and electrolyte balance

from a smartphone

Prototypes contain probes on the

wireless, battery-powered chip to

continually test up to a hundred

different samples Transdermal patch or “digital tattoo”

Source: 9TO5MAC 3

Wearable electronic head-impact

monitoring patch

Patch contains MEMS motion sensors,

microcontroller, low-power radio

transmitter, and power management

circuitry

A cloud-based system combines

athlete concussion history, pre-season

neurocognitive function, balance, and

coordinate-performance data to

create a baseline for comparison after

a suspected injury event

Concussion Sensor STMicro & X2 Biosystems

Source: ST Microelectronics 4

Electronic pill to treat

gastrointestinal cancer

An ingestible pill is

swallowed by the patient,

finds its way to the tumor,

dispenses the drugs and

passes harmlessly from

the body

Smart pill contains

reservoir for drug supply,

fluid pump for drug

delivery, pH sensor (for

navigation), thermometer,

microprocessor and radio

for communication

Source: Popular Science 5

Ingestible Drug Delivery System Phillips

Proteus Digital Health is the first

company to receive FDA clearance

for an ingestible biomedical sensor

that monitors medication adherence

Embedded into a pill, the sensor is

activated by stomach fluid, then

transmits a signal through the body

to a skin patch

Indicates whether a patient has

ingested medication or not

Source: Gizmag

Ingestible Biomedical Sensor Proteus

6

Micropump devices based on skin

contact actuation for drug delivery

Actuation mechanism only requires

body heat, no other external power

Induced actuation can result to a

gradient of 100 Pa/oC, sufficient to

drive liquid drug through microneedle

arrays

Prototypes exhibit low fabrication

costs, employment of biocompatible

materials and battery-less operation

Suitable for single- or multiple-use

transdermal drug dispensers

Microneedle Drug Delivery System Purdue

Source: Purdue University 7

Laser-driven, handheld spectrometer

for analyzing food

Scanned information is sent to a

cloud-based application that examines

the results

Data is accumulated from many users

to develop warning algorithms for the

allergic, vegetarians and other

selective diets

Can measure: Chemicals Gluten Dyes Allergens Neurotoxins Molds Bacteria

Dietary Spectrometer Sensor TellSpec

Source: Financial Post 8

Wearable UV Exposure Sensor Sunfriend

Wristband for monitoring UV exposure

Allows user to maximize vitamin D

production while reducing the risk of

sun over-exposure and skin cancer

LED indicators light up as UV exposure

accumulates and flash once the safe

limit has been reached

UV Sensor

Source: Gizmag 9

Intraocular Pressure Sensor Sensimed & ST

STMicroelectronics teamed up with

Switzerland’s Sensimed AG to develop

a smart contact lens called Triggerfish

Contact lens can measure, monitor,

and control intra-ocular pressure levels

for patients and catch early cases of

glaucoma

The sensor itself, a MEMS strain gage

pressure sensor, is mounted on a

flexible substrate

MEMS strain gage

Source: Electronic Design 10

MEMS enabled implantable

technology for hearing restoration

Eliminates electronics outside the ear

associated with reliability issues and

social stigma

Accelerometer-based microphone

successfully tested in cadaver ear

canals

Prototype measures 2.5 x 6.2mm and

weighs 25mg

MEMS Microphone University of Utah

Wire bonds

Microcontroller

MEMS microphone

Source: IEEE Spectrum 11

Micro-mirrors enabling handheld

ophthalmic swept source OCT model

for retinal 3D imaging

Replaces bulky galvanometer scanners

in a handheld OCT probe for primary

care physicians

Ultrahigh-speed two-axis optical beam

steering by use of the compact,

gimbal-less MEMS mirrors

MEMS actuator with a 2.4 mm bonded

mirror and an angular reach of +6°

Low power consumption of <100mW

including the MEMS actuator driver

Retinal 3D Imaging Mirrorcle

MEMS mirror on PCB substrate

MEMS mirror in leaded IC package

Source: OCT News 12

Cellphone-based rapid-diagnostic-test

(RDT) reader platform

Lateral flow immuno-chromatographic

assays and similar tests to sense the

presence of a target analyte in a sample

Device connects to the camera on a cell

phone and weighs only 65 grams

Various types of RDTs can be inserted

to be imaged in reflection or

transmission modes under light

emitting diode (LED) based

illumination

Source: Royal Society of Chemistry

Cell Phone Diagnostics Platform UCLA

13

Organ-on-a-Chip Johns Hopkins University

Silicon substrate for living human

cells in a controlled environment

Emulate how cells function inside a

living human body

Replace controversial and costly

animal testing

Lab-on-a-chip: a cost effective end to animal testing

Source: Sound Color Vibration 14

Cerebral Pressure Sensor Fraunhofer

Fraunhofer Institute for Biomedical

Engineering has developed a sensor

to monitor cerebral pressure that can

lead to dementia

Pressure changes in the brain can be

measured and transmitted a reading

device outside the patient’s body

Operating at very low power, the

sensor module is powered wirelessly

by the reading device

Pressure diaphragm

Source: Gizmag 15

FDA approved, implantable micro

device for monitoring and treating

aneurisms, a leading cause of heart

failure

RF-addressed wireless pressure

sensor are powered by inductive

coupling and do not need batteries

MEMS pressure sensor and wireless

antenna are inserted near the heart

with a catheter

Blood-pressure readings are sent to

a wireless scanner for monitoring

Pressure changes deflect the transducer’s diaphragm and change the LC circuit’s

resonant frequency

Source: Electronic Design

Implantable Aneurism Monitor CardioMEMS

16

Fully implantable within the brain

Allow natural studies of brain activity

in moving subjects and represents a

potential major step toward cord-free

control of advanced prosthetics that

move with the power of thought

Wireless charging

Prototypes transmitted brain activity

data wirelessly for more than a year in

early stage tests

Source: National Institute of Biomedical Imaging and Bioengineering

Implantable Brain Activity Sensor NIBIB, NIH

17

Wireless, implantable brain sensor, shown next to a U.S. quarter for size comparison.

Implantable Blood Analyzer Chip EPFL

Source: Implantable Devices

Tiny, implantable device for

instantaneous blood analysis

Wireless data transmission to a doctor

Applications include monitoring

general health, and tailor drug delivery

to a patient’s unique needs

Includes five sensors and a radio

transmitter

Powered via inductive coupling from a

battery patch worn outside the body

18

Acoustic receiver

Antenna/sensor

PDMS membrane

Ferrite

RF radiation

Acoustic wave

Rectifier buried in PDMS

Implantable miniature pressure

sensor, powered by an acoustically

actuated cantilever from Birck

Nanotechnology Center, Purdue

University

No battery required as acoustic

waves in the 200-500 hertz range

cause cantilever to vibrate,

scavenging energy to power

pressure sensor and electronics

Source: Popular Science

Implantable Pressure Sensor Purdue

19

Wearable Skin Sensor KTH

Source: Chemistry 2011

Bio-patch for measuring and collecting

vital information through the skin

Inexpensive, versatile and comfortable

to wear for the user

Data being gathered depends on

where it is placed on the body:

• Chest: electrocardiography (ECG)

• Skull: measure brainwaves (EEC)

• Forearm: measure muscle

response to stimulation from the

nervous system (EMG)

Skin sensor on flex substrate

20

Implantable MEMS drug delivery

system

Device can deliver a vasoconstrictor

agent on demand to injured soldiers to

prevent hemorrhagic shock

Other applications include medical

implants for cancer detection and

monitoring

Implant can provide physicians and

patients real-time information on the

efficacy of treatment regimes

MEMS Drug Delivery Devices CPRL

Source: MIT 21

Wireless shoe insert to help diabetics

manage peripheral nerve damage

Insole collects data of where wearers

are putting pressure on their feet and

transmits wirelessly a wristwatch-type

display or a smartphone

Prevent amputations that often stem

from diabetic foot ulcers

Pressure Sensor for Damaged Nerves Orpyx

Source: Mobile Health News

Wireless transmission from insole to wrist watch using ANT+

22

Endoscope using MEMS scanning

mirror for gastrointestinal and

urological imaging

Alternative to biopsies in cancer

detection

A laser beam pointed at the mirror is

precisely deflected and steered by the

scanning mirror to reach a target point

Endoscope Probe Santec

Source: Santec

Optical Fiber

Sheath Collimator

Focus Lens

MEMS Scanner

Ferrule

Photovoltaic Cell

Beam Splitter

ϕ 5 mm

λ 1.5 um

λ 1.3 um

23

Microfluidic MEMS for diabetes

treatment

Watertight pump mounted on a

disposable skin patch to provide

continuous insulin infusion

Controlled by a dedicated smartphone

device incorporating a BGM (blood-

glucose meter)

Insulin Micropump Debiotech

Source: Micronews 24

Micromachined surgical tools; silicon

MEMS tweezers

Used for minimally invasive surgical

(MIS) procedures where diagnosis,

monitoring, or treatment of diseases

are performed, performing with very

small incisions

MEMS based microsurgical tools is a

key enabling technology for

angioplasty, catheterization,

endoscopy, laparoscopy, and

neurosurgery

Microsurgical Tools Microfabrica

Source: ElectrolQ 25

Biomedical engineers at Washington

University have developed a custom-

fitted, implantable device for

treatment and prediction of cardiac

disorders

Working prototypes were developed

on inexpensive 3D printers

The 3D elastic membrane is made of a

soft, flexible, silicon material precisely

shaped to match the outer layer of the

heart

Implantable Heart Sensor Wash. University

Source: Kurzweil

3D elastic membrane integrated with a heart

26

About Us

Rogue Valley Microdevices was

founded in 2003 and is dedicated to

providing fabrication services for the

MEMS and microelectronics industry

Located in Medford, Oregon we

maintain a 200mm MEMS device

foundry supporting our customers

from the early R&D phase through

pilot production

We are dedicated to providing foundry

services for the MEMS, nanotech, and

biotech industries. Our wafer

processing modules are designed to

handle silicon wafer substrates as well

as a variety of other materials such as

quartz, glass, sapphire, and ceramic

wafers

27

INDUSTRIES

Semiconductor

MEMS and nanotechnology

Sustainable technology

Biotechnology

Optoelectronics

Telecommunications

MEMS Foundry

CUSTOMERS

Device Manufacturers

Government

Universities

Equipment manufacturers

Materials distributors

Research and development

Government Academia

Emerging tech R&D Proof of concept

Large Company Product development

Small R&D projects

Start up company R&D small batch device

fabrication

Midsize company Process optimization

Pilot production

Rogue Valley Micro MEMS Foundry

We provide manufacturing services to a worldwide customer base that spans

many high-tech industries

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Our Services

Full Service MEMS Foundry with dedicated 200mm Production Line

Photo mask layout

MEMS fabrication on CMOS wafers

Suspended membrane fabrication

Front – to – back alignment

I-line stepper lithography

Precious metal deposition and patterning

Multi-layer metal films including Au/Sn solder

Reactively sputtered dielectric and Resistive Materials

LPCVD and PECVD dielectric film deposition

KOH and TMAH silicon etch

Metal liftoff processing

Polyimide processing

PROCESS CAPABILITIES

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One Stop Shop vs. Pit Stop

Rogue Valley Micro

Design but no manufacturing capability

Thin Films Deposition

Photo

Patterning

Etch

Design Review

Device Singulation

Fabless Customer

Fab Short Customer

Design but limited manufacturing capability

Final Inspection

Flexible equipment set

Small batch sizes

Creative and experienced engineers

Ability to work with non-standard materials

Great customer service

Willing to provide data

Research and Development We are not too big for small

R&D projects

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R&D Device Manufacturing

Contact Us

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