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Centro Nacional de Microelectrónica (CNM)

Instituto de Microelectrónica de Barcelona (IMB)

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Biocampus

CIN2

IBB CRAG

LP CSIC - UAB

CeBEP

CEB

ICMAB

MATGAS

CNM

INc

CReSA

PTA

CED IERMB

IUEE

ICPS

IGOP

CEO

InCOM

IFAE

CVC

CRM

CELLS LLS

CBATEG

PIC

IIIA

IAE

IEEC

CREAF

CTETMA

ICTA

Biotech and Biomedicine

Animal Health / Food Safety and Technology

Experimental Science & Technologies

Social and Human Sciences

Environmental S&T

Nanocluster

BNC-b

PRUAB: The UAB Park. CEI Label

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NATIONAL MICROELECTRONICS

CENTER (CNM)

D+T Microelectrónica, A.I.E.

MICROELECTRONICS INSTITUTE OF

BARCELONA (IMB)

MICROELECTRONICS INSTITUTE OF MADRID

(IMM)

MICROELECTRONICS INSTITUTE OF SEVILLA

(IMSE)

LARGE SCALE FACILITY

(Integrated Clean Room)

Analog and mixed IC design

Compound semiconductors

Silicon-based micro and nanosystems

SPANISH COUNCIL FOR SCIENTIFIC RESEARCH (CSIC)

MINISTERIO DE ECONOMIA Y COMPETITIVIDAD

Centro Nacional de Microelectrónica (CNM-CSIC)

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Instituto de Microelectrónica de Barcelona

2013 Budget: 9,95 M€ -External funding: 43,4 %

Running Costs: 2,35 M€ - CSIC Funding: 52,6% - CNM Funding: 47,4%

Centro Nacional de Microelectrónica

Personnel No. % women % men % staff % contracts Researchers 67 25% 75% 55% 45%

PhD Students 25 24% 76% 0% 100%

Group Technicians 16 13% 88% 0% 100% CR Technicians 39 41% 59% 72% 28%

Other general Labs 8 13% 88% 88% 13%

Admin 12 92% 8% 67% 33%

Other general services 8 25% 75% 75% 25%

Total 175 31% 69% 49% 51%

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In 30 years many things happen:

From microelectronics and semiconductor devices... ... To micro and nanotechnologies and materials other than silicon

S/V L/S

Fluid

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Nano is a matter of size, form

and surface geometry …and in

some cases is even a matter of

quantum effects

(10-9m)

Nanoscience is the study of phenomena,

and manipulation of materials, at atomic,

molecular and macromolecular scale,

whose properties significatively differ from

those at higher scales

Nanotecnology is the design,

characterization, production and

application of structures, devices

and systems by controlling their

shape and size at namometric

scale.

0,3 8000

2 100

1500

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Courtesy of Siegmar Roth

Max Planck Inst.

Synthesis Self-assembly

Technology intensive additive & subtractive

structuring

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• Abundant • Mature and enabling technology • Cost effectiveness and economy of scale • Miniaturized systems and dense architectures

Why Silicon

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Microsystems are miniaturised systems that connect the physical and the digital world

Nano is often inside for increased functionality and performance

Chip/device

Miniaturised instruments

Component

or

subsystem

Wafer

portable benchtop on-line

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From ENIAC SRA:

Infotainment e-society Communication Energy & environment

Security & safety Health & wellness Transport & mobility

Micro and Nano Technologies:

Transversal for Societal Challenges

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Micro & Nanosystems Department

Systems Integration

Department

ICTS: Micro & Nanointegration Clean Room

Centro Nacional de Microelectrónica: Structure

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Advanced dielectrics thin films 3 people

NEMS & Nanofabrication 11

Micro & Nano Tools 6

Micro energy sources and sensors

integration 11

BIO-MEMS 14

Chemical Transducers 21

Radiation Detectors 11

Power Devices and Systems 22

Biomedical Applications 6

Integrated Circuits and Systems 24

IMB-CNM Research Groups

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Main CR

• 1,500 m2

• Class 100-10,000

• CMOS integrated circuits

• Microsystems processes

• Nanolithography and nanofabrication

Back-end CR

• 40 m2

• Class 1,000-10,000

• Chip packaging

• Hybrid circuit assembly

Integrated Micro and Nano Fabrication Clean Room

ICTS

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Research Indicators /per year

• <120 International publications • <180 Conference Communications • 7-9 Patents filed • 7-10 Thesis

Training Indicators

• 1600 hours of Technical Training

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Thank you !