Report

BY SHAHID ALI

Institute of Materials Science and NanotechnologyNational Nanotechnology Research CenterBilkent University, Ankara 06800

w w w . n a n o . o r g . t r 204/19/2023

BInN (26 supercycles) Rms=8.691nm

w w w . n a n o . o r g . t r 304/19/2023

BInN (0.3B) Rms=6.563nm

w w w . n a n o . o r g . t r 404/19/2023

w w w . n a n o . o r g . t r 504/19/2023

BST17 (Rms=760.433 Pm)

w w w . n a n o . o r g . t r 604/19/2023

BST 17 Annealed Rms= 1.688nm

w w w . n a n o . o r g . t r 704/19/2023

BST 4 (Rms=1.028 nm)

w w w . n a n o . o r g . t r 804/19/2023

BInN (26 supercycles) Rms=8.691nm

w w w . n a n o . o r g . t r 904/19/2023

BInN (0.3B) Rms=6.563nm

w w w . n a n o . o r g . t r 1004/19/2023

BInN 0.5 Rms= 2.852

w w w . n a n o . o r g . t r 1104/19/2023

BGaN 3B RMS=3.517nm

w w w . n a n o . o r g . t r 1204/19/2023

BGaN 0.3B Rms=4.683nm

w w w . n a n o . o r g . t r 1304/19/2023

BGaN 10B Rms= 751.221 pm

w w w . n a n o . o r g . t r 1404/19/2023

w w w . n a n o . o r g . t r 1504/19/2023

BST 4 Annealed Rms=1.93 nm

w w w . n a n o . o r g . t r 1604/19/2023

BST 8 As deposited Rms=0.317 nm

w w w . n a n o . o r g . t r 1704/19/2023

BST 4 As deposited Rms=0.162 nm

w w w . n a n o . o r g . t r 1804/19/2023

BST 17 As deposited Rms=1.88 nm

w w w . n a n o . o r g . t r 1904/19/2023

BST 17 Annealed Rms=1.71 nm

w w w . n a n o . o r g . t r 2004/19/2023

w w w . n a n o . o r g . t r 2104/19/2023

w w w . n a n o . o r g . t r 2204/19/2023

w w w . n a n o . o r g . t r 2304/19/2023

w w w . n a n o . o r g . t r 2404/19/2023

w w w . n a n o . o r g . t r 2504/19/2023

w w w . n a n o . o r g . t r 2604/19/2023

w w w . n a n o . o r g . t r 2704/19/2023

w w w . n a n o . o r g . t r 2804/19/2023

w w w . n a n o . o r g . t r 2904/19/2023

ResultsSample Afm Mode Rms(roughness

BInN (26 supercycles)

Non-contact

8.691 nm

BInN (0.3B) Non- contact

6.563 nm

BInN (0.5) Non-contact

2.852 nm

BST 4 (Annealed)

// 1. 93 nm

BST 17 (Annealed)

// 1.688 nm

BST 17 (As deposited)

// 760.433 pm

w w w . n a n o . o r g . t r 3004/19/2023

ResultsBGaN 3B // 3.517 nm

BGaN 0.3 B // 4.683 nm

BGaN 10B // 751.221 nm

BST 8 As deposited // 0.317 nm

Bst 4 As deposited // 0.162 nm

Bst 17 as deposited // 1.88 nm

STO 15 As deposited

// 120.831 pm

STO 15 Annealed // 2.748 nm

Sto 14 annealed // 1.524 nm

Sto 14 As deposited // 156. 102 nm