fukuoka i3 center for organic photonics and electronics
TRANSCRIPT
Fukuoka i3 Center for Organic Photonics and Electronics Research
Industry-academia-government joint research anddevelopment center for practical applications
※ i3 stands for industry, international and incubation.
Fukuoka Industry, Science & Technology Foundation
The Fukuoka Industry, Science & Technology Foundation (Fukuoka IST) was selected for a Ministry of
Economy, Trade and Industry program to further establish facilities for the development and evaluation of
emerging technologies, providing a bridge for the transfer of technology between universities and industries, and
opened the Fukuoka i3 Center for Organic Photonics and Electronics Research with the support of Fukuoka
Prefecture and Fukuoka City.
Fukuoka IST has also allocated researchers, research engineers and equipment and operates as the leading
organization under the physical and financial sponsorship of the Kyusyu University Center for Organic Photonics
and Electronics Research(OPERA), Fukuoka Prefecture and Fukuoka City.
The mission of the facility is to develop joint research with domestic and foreign industries and promote
industrialization of organic photonics and electronics. The Center also offers an advantage that its framework
allows for a wide range of research and development such as basic materials science, physical properties
analysis technology and utility equipment in cooperation with basic research leader Kyushu University OPERA.
Many companies have come on board in partnership with the concept, and a number of joint research projects
to realize practical applications were launched from the first year of establishment. Also, joint research projects
with domestic universities and public research organizations which have received grants and subsidies from
various national projects have also gotten off with a smooth start.
Development of this kind of research field can be expected to be a significant industry leading to the
next-generation in the electronics industry including organic EL in the future. We look forward to your partnership
with i3 OPERA in support and development of new business opportunities.
Message from Center Director
Fukuoka i3 Center forOrganic Photonics andElectronics Research
Center Director
Chihaya Adachi
Opening ofFukuoka i3 Center forOrganic Photonics andElectronics Research
The Fukuoka Industry, Science & Technology Foundation (Fukuoka IST) opened “Fukuoka i3 Center for Organic Photonics and Electronics Research ( )” to promote industrialization of organic photonics and electronics including organic EL which is expected to become the core of future growth areas. (Opened on April 19, 2013)
i3-OPERA is operated by Fukuoka IST as the leading organization by providing technology seed funding fromKyushu University OPERA and grants and subsidies from Fukuoka Prefecture/Fukuoka City as well as support from ISIT researchers, etc.
Confidential base■ Joint research
Open base■ Information exchanges■ Support for practical
application research ■ Networking
Business summary
■ Acceleration of evaluations by collaboration■ Device optimization■ Trial manufacture of panels■ Development of human resources
■ Affiliated companies Materials, peripheral materials, equipment, panels, set makers, etc.■ Local companies
■ Fukuoka Industry, Science & Technology Foundation■ Institute of Systems, Informatio Technologies and Nanotechnologies■ Fukuoka Prefecture■ Fukuoka City
Development of new lifestyles byorganic photonics and electronics
■ Kyushu University Center for Organic Photonics and Electronics Research(OPERA)
１． Practical-application-oriented device research of organic photonics and electronics advanced materials and technologies
３． Forward-looking research and development
２． Evaluation support of organic photonics and electronics materials possessed by companies
４． Promotion of participation in the field of organic photonics and electronics by local companies and development of next-generation engineers
Accumulation of technologies for realization of flexible organic photonics and electronics
Trial manufacture of lighting panels and displays
Design engineering of organic photonics and electronics devices
Support for practical applications by various evaluations and analyses of materials accepted on a confidential basis
Acceleration of practical applications by rapid and high-level optimization of organic photonics devices manufactured using the most-advanced organic materials
Information exchanges with and promotion of participants from local companies through seminars and workshops related to organic photonics and electronics industrialization
Support for expansion into organic photonics and electronics of peripheral materials and technologies Bridging practical applications research for
thermally activated delayed fluorescence (TADF)
Proposal of new manufacturing processes and new technologies based on professional knowledge and experience
Confidential base■ 共同研究
Open base■ 情報交流
■ 実用化支援研究 ■ 人脈形成
■ 関連企業 材料、周辺部材、装置、 パネル、セットメーカー等■ 地場企業
■ 連携による評価加速■ デバイス最適化■ パネル試作■ 人材育成
■ 九州大学 最先端有機光 エレクトロニクス研究センター
■ （公財）福岡県産業・ 科学技術振興財団■ （公財）九州先端科学技術研究所■ 福岡県■ 福岡市
官学
有機光エレクトロニクスがもたらす新しいライフスタイルの展開へ
We will establish a coherent research/development system by bridging technologies from basic research to practical applications development of advanced materials in cooperation with the Center for Organic Photonics and Electronics Research, Kyushu University (OPERA), Institute of Systems, Information Technologies and Nanotechnologies (ISIT) and Kumamoto Institute for Photo-Electro Organics (Phoenics).
We will introduce a trial manufacturing line, evaluation equipment, etc., for manufacturing high-performance organic devices using substrates of a practical size that will lead to commercialization and will promote matching of company needs and seed the most advanced research to accelerate practical applications.
We will promote new entry of local companies to lead the development of an organic photonics and electronics industry and creation of venture companies.
We will utilize accumulated intellectual property rights to establish ourselves as an international R&D base in the future with a view toward global markets.
Education on device manufac-ture, evaluation and analysis techniquesfor host researchers
I ndustry
I ndustry
A Gcademia
A cademia
overnment
G overnment
The Fukuoka Industry, Science & Technology Foundation (Fukuoka IST) was selected for a Ministry of
Economy, Trade and Industry program to further establish facilities for the development and evaluation of
emerging technologies, providing a bridge for the transfer of technology between universities and industries, and
opened the Fukuoka i3 Center for Organic Photonics and Electronics Research with the support of Fukuoka
Prefecture and Fukuoka City.
Fukuoka IST has also allocated researchers, research engineers and equipment and operates as the leading
organization under the physical and financial sponsorship of the Kyusyu University Center for Organic Photonics
and Electronics Research(OPERA), Fukuoka Prefecture and Fukuoka City.
The mission of the facility is to develop joint research with domestic and foreign industries and promote
industrialization of organic photonics and electronics. The Center also offers an advantage that its framework
allows for a wide range of research and development such as basic materials science, physical properties
analysis technology and utility equipment in cooperation with basic research leader Kyushu University OPERA.
Many companies have come on board in partnership with the concept, and a number of joint research projects
to realize practical applications were launched from the first year of establishment. Also, joint research projects
with domestic universities and public research organizations which have received grants and subsidies from
various national projects have also gotten off with a smooth start.
Development of this kind of research field can be expected to be a significant industry leading to the
next-generation in the electronics industry including organic EL in the future. We look forward to your partnership
with i3 OPERA in support and development of new business opportunities.
Message from Center Director
Fukuoka i3 Center forOrganic Photonics andElectronics Research
Center Director
Chihaya Adachi
Opening ofFukuoka i3 Center forOrganic Photonics andElectronics Research
The Fukuoka Industry, Science & Technology Foundation (Fukuoka IST) opened “Fukuoka i3 Center for Organic Photonics and Electronics Research ( )” to promote industrialization of organic photonics and electronics including organic EL which is expected to become the core of future growth areas. (Opened on April 19, 2013)
i3-OPERA is operated by Fukuoka IST as the leading organization by providing technology seed funding fromKyushu University OPERA and grants and subsidies from Fukuoka Prefecture/Fukuoka City as well as support from ISIT researchers, etc.
Confidential base■ Joint research
Open base■ Information exchanges■ Support for practical
application research ■ Networking
Business summary
■ Acceleration of evaluations by collaboration■ Device optimization■ Trial manufacture of panels■ Development of human resources
■ Affiliated companies Materials, peripheral materials, equipment, panels, set makers, etc.■ Local companies
■ Fukuoka Industry, Science & Technology Foundation■ Institute of Systems, Informatio Technologies and Nanotechnologies■ Fukuoka Prefecture■ Fukuoka City
Development of new lifestyles byorganic photonics and electronics
■ Kyushu University Center for Organic Photonics and Electronics Research(OPERA)
１． Practical-application-oriented device research of organic photonics and electronics advanced materials and technologies
３． Forward-looking research and development
２． Evaluation support of organic photonics and electronics materials possessed by companies
４． Promotion of participation in the field of organic photonics and electronics by local companies and development of next-generation engineers
Accumulation of technologies for realization of flexible organic photonics and electronics
Trial manufacture of lighting panels and displays
Design engineering of organic photonics and electronics devices
Support for practical applications by various evaluations and analyses of materials accepted on a confidential basis
Acceleration of practical applications by rapid and high-level optimization of organic photonics devices manufactured using the most-advanced organic materials
Information exchanges with and promotion of participants from local companies through seminars and workshops related to organic photonics and electronics industrialization
Support for expansion into organic photonics and electronics of peripheral materials and technologies Bridging practical applications research for
thermally activated delayed fluorescence (TADF)
Proposal of new manufacturing processes and new technologies based on professional knowledge and experience
Confidential base■ 共同研究
Open base■ 情報交流
■ 実用化支援研究 ■ 人脈形成
■ 関連企業 材料、周辺部材、装置、 パネル、セットメーカー等■ 地場企業
■ 連携による評価加速■ デバイス最適化■ パネル試作■ 人材育成
■ 九州大学 最先端有機光 エレクトロニクス研究センター
■ （公財）福岡県産業・ 科学技術振興財団■ （公財）九州先端科学技術研究所■ 福岡県■ 福岡市
官学
有機光エレクトロニクスがもたらす新しいライフスタイルの展開へ
We will establish a coherent research/development system by bridging technologies from basic research to practical applications development of advanced materials in cooperation with the Center for Organic Photonics and Electronics Research, Kyushu University (OPERA), Institute of Systems, Information Technologies and Nanotechnologies (ISIT) and Kumamoto Institute for Photo-Electro Organics (Phoenics).
We will introduce a trial manufacturing line, evaluation equipment, etc., for manufacturing high-performance organic devices using substrates of a practical size that will lead to commercialization and will promote matching of company needs and seed the most advanced research to accelerate practical applications.
We will promote new entry of local companies to lead the development of an organic photonics and electronics industry and creation of venture companies.
We will utilize accumulated intellectual property rights to establish ourselves as an international R&D base in the future with a view toward global markets.
Education on device manufac-ture, evaluation and analysis techniquesfor host researchers
I ndustry
I ndustry
A Gcademia
A cademia
overnment
G overnment
FukuokaPrefecture
KumamotoPrefecture
Formation of organic photonics andelectronics research and development base in northern Kyushu
Currently, Kyushu University, Fukuoka Prefecture and Fukuoka City have jointly built the “Ito Science Park” in Nishi-ku, Fukuoka City. The three have organized and initiated wide-ranging joint research and development of organic photonics and electronics at 4 bases located in Fukuoka Prefecture and Kumamoto Prefecture centering around Kyushu University OPERA, and have shared basic research (OPERA), applied research (ISIT), practical applications research and development (i3-OPERA) and manufacturing equipment research and development (Phoenics) to improve effectiveness in their approach.In addition, they have realized the formation of an “organic photonics and electronics research and development base” in northern Kyushu with participation from the Organization for Promotion Academic City by Kyushu University (OPACK) in support of industry and research facilities and research institutes and have carried out activities as brain centers in Kyushu and Asia.
Ito Campus, Kyushu University
Kyushu University
Center for Organic Photonicsand Electronics Research[Basic research, seed emergence]
Most-advancedbasic research
area
New devicedemonstration
experimentarea
Building No.2 (3400ｍ2)
Fukuoka industry-academia Symphonicity (FiaS)(*Including rental spaces.)Institute of Systems, InformationTechnologies and Nanotechnologies (ISIT)Laboratory of Organic Device and Photonics[Applied research]
Fukuoka Industry, Science & Technology Foundation(Fukuoka IST)Fukuoka i3 Center forOrganic Photonics and Electronics Research[Practical application development and research]
Organic photonics andelectronics industrialization research seminars and workshops
Significant growth in organic photonics and the electronics field including organic EL and organic thin-film solar cells can be expected in the future. In order to promote research and development and practical applications, we hold seminars and workshops as forums for transmitting the latest technology information, exchanging ideas and developing personal connection networks.
Seminars are held on the latest technology and market trends, as are information exchange meetings (Number of seminars and exchange meetings: several times a year)
Membership requirements：company, university, research institute, individual Enrollment fee ：free
Outline
Activities
Kumamoto Industrial Research Institute(Manufacturing Department)
Kumamoto Institutefor Photo-Electro Organics (Phoenics)
Establishment of R&D basesto support next-generation
organic photonics and electronics
OPERA (2400ｍ2)
i3-OPERA (1741ｍ2)
1 F
2 F
Device manufacturing room Researcher room A
Clean room Meeting room Staff room
Researcher room B
Researcher room C Seminar roomDiscussion corner
The clean room of Class 10,000 and 300m2 is positioned in the center to create an environment where the world’s best organic EL devices can be produced and evaluated.Staff and researcher rooms and meeting rooms are also included.
There is an organic EL lifetime evaluation room, an i n s t r u m e n t a l a n a l y s i s r o o m , a n d a d e v i c e manufacturing room, where devices for research and development necessary for br idging pract ical applications research can be prepared.In addition, a seminar room and a discussion corner have been set up to realize spaces where practical applications research and discussions can be conducted from the most convenient location. Also, rooms for researchers of joint work companies who reside for long periods of time to conduct research are available.
Facilities
Functional materiallaboratory Device manufacturing
room
Panel characteristicsevaluation room
Open ceilingspace
Discussion corner
Seminar room
Researcherroom A
Researcherroom
C
Researcherroom
B
Instrumentalanalysis room
Lifetimeevaluation room
Basic physical propertyevaluation room
Clean room
Pretreatmentroom
Yellow room Clean room
Utility machineroom
MeetingroomCorridor for visitors
Exchange hall
Lockerroom
Entrance hall
Staff/researcherroom
Entrance
Meetingroom
Industry-academia-governmentpractical
application jointresearch development area
Building No.1 (2400ｍ2)
Site area ： ３,６８０m2
Scale ： 2 stories above ground
Total floor area ： 1,741m2 Parking space： 38 vehicles
Structure ： Steel reinforced concrete structure
Lecture presentations
FukuokaPrefecture
KumamotoPrefecture
Formation of organic photonics andelectronics research and development base in northern Kyushu
Currently, Kyushu University, Fukuoka Prefecture and Fukuoka City have jointly built the “Ito Science Park” in Nishi-ku, Fukuoka City. The three have organized and initiated wide-ranging joint research and development of organic photonics and electronics at 4 bases located in Fukuoka Prefecture and Kumamoto Prefecture centering around Kyushu University OPERA, and have shared basic research (OPERA), applied research (ISIT), practical applications research and development (i3-OPERA) and manufacturing equipment research and development (Phoenics) to improve effectiveness in their approach.In addition, they have realized the formation of an “organic photonics and electronics research and development base” in northern Kyushu with participation from the Organization for Promotion Academic City by Kyushu University (OPACK) in support of industry and research facilities and research institutes and have carried out activities as brain centers in Kyushu and Asia.
Ito Campus, Kyushu University
Kyushu University
Center for Organic Photonicsand Electronics Research[Basic research, seed emergence]
Most-advancedbasic research
area
New devicedemonstration
experimentarea
Building No.2 (3400ｍ2)
Fukuoka industry-academia Symphonicity (FiaS)(*Including rental spaces.)Institute of Systems, InformationTechnologies and Nanotechnologies (ISIT)Laboratory of Organic Device and Photonics[Applied research]
Fukuoka Industry, Science & Technology Foundation(Fukuoka IST)Fukuoka i3 Center forOrganic Photonics and Electronics Research[Practical application development and research]
Organic photonics andelectronics industrialization research seminars and workshops
Significant growth in organic photonics and the electronics field including organic EL and organic thin-film solar cells can be expected in the future. In order to promote research and development and practical applications, we hold seminars and workshops as forums for transmitting the latest technology information, exchanging ideas and developing personal connection networks.
Seminars are held on the latest technology and market trends, as are information exchange meetings (Number of seminars and exchange meetings: several times a year)
Membership requirements：company, university, research institute, individual Enrollment fee ：free
Outline
Activities
Kumamoto Industrial Research Institute(Manufacturing Department)
Kumamoto Institutefor Photo-Electro Organics (Phoenics)
Establishment of R&D basesto support next-generation
organic photonics and electronics
OPERA (2400ｍ2)
i3-OPERA (1741ｍ2)
1 F
2 F
Device manufacturing room Researcher room A
Clean room Meeting room Staff room
Researcher room B
Researcher room C Seminar roomDiscussion corner
The clean room of Class 10,000 and 300m2 is positioned in the center to create an environment where the world’s best organic EL devices can be produced and evaluated.Staff and researcher rooms and meeting rooms are also included.
There is an organic EL lifetime evaluation room, an i n s t r u m e n t a l a n a l y s i s r o o m , a n d a d e v i c e manufacturing room, where devices for research and development necessary for br idging pract ical applications research can be prepared.In addition, a seminar room and a discussion corner have been set up to realize spaces where practical applications research and discussions can be conducted from the most convenient location. Also, rooms for researchers of joint work companies who reside for long periods of time to conduct research are available.
Facilities
Functional materiallaboratory Device manufacturing
room
Panel characteristicsevaluation room
Open ceilingspace
Discussion corner
Seminar room
Researcherroom A
Researcherroom
C
Researcherroom
B
Instrumentalanalysis room
Lifetimeevaluation room
Basic physical propertyevaluation room
Clean room
Pretreatmentroom
Yellow room Clean room
Utility machineroom
MeetingroomCorridor for visitors
Exchange hall
Lockerroom
Entrance hall
Staff/researcherroom
Entrance
Meetingroom
Industry-academia-governmentpractical
application jointresearch development area
Building No.1 (2400ｍ2)
Site area ： ３,６８０m2
Scale ： 2 stories above ground
Total floor area ： 1,741m2 Parking space： 38 vehicles
Structure ： Steel reinforced concrete structure
Lecture presentations
Deposition equipment Equipment for device manufacturing, lifetime evaluation, device characteristics evaluation
Evaluation equipment / device manufacturing support equipment
Thin-film basic properties evaluation equipment
Main specifications
・ Maximum substrate size ： 200mm×200mm・ Load lock chamber ： 13-stage cassette・ Pretreatment chamber ： UV/ozone cleaning, heating, nitrogen cooling・ Organic deposition chamber ： Four-round revolver × 1 set Three-round revolver × 2 sets Resistance heating × 2 sets Total 12 of sources of material can be introduced and a maximum 4 of sources can be simultaneously evaporated.・ Metal deposition chamber ： Resistance heating × 2 set E-beam gun with controlled influence of suppressed secondary electrons on substrate × 1 set・ Sputter deposition chamber ： 6-inch cathode × 1 set・ CVD deposition chamber : SiO
xN
y film can be formed.
・ Spare port ： a chamber can be added depending on research content
Main specifications
・ Maximum film-depositiou range ： φ120mm・ 3-inch cathode ： 2 sets, magnetic and non-magnetic RF（300W）・DC（500W）・ 6-inch cathode ： 1 set (dedicated for ITO)・ Heating temperature during deposition： room temperature ～500ºC・ Gas introduction ： O2
,Ar,N2
・ 5-stage cassette type・ Automatic deposition by recipe input
Main specifications
・ 250W ultrahigh-pressure mercury lamp・ Radiation diameter:φ200(WD 180)・ Illuminance : 14mW/cm2
Main specifications
・ Work size ： 25×25 mm, 100×100 mm･ Bottom-emission and top-emission substrates can be measured.･ Luminescence, emission spectrum, chromaticity coordinates, etc., can be measured by emission angle by using the rotary stage.
Main specifications
・ Measurement of n (refractive index), k (extinction constant) and t (film thickness)・ Work size : approx. 20×20 mm～200×200 mm・ Measurement time : approx. 10 seconds・ Fitting model : Forouchi-Bloomer model
Summary of equipment（1F） Summary of equipment（2F）
Organicdepositionchamber
Organicdepositionchamber
Observation directionfrom entrance
Metaldepositionchamber
Metaldepositionchamber
Pretreatmentchamber
PretreatmentchamberSpare portSpare port
CVDchamber
CVDchamber
Sputteringdepositionchamber
Sputteringdepositionchamber
Load lockLoad lock
Transferrobot
Transferrobot
Glovebox
Glovebox
Glovebox
Glovebox
Main specifications
・ Circulated inert gas purification unit using dehydration/deoxidization catalyst・ Removal of circulating organic solvents by activated carbon・ Oxygen/moisture ： 1ppm or less・ Working space ： 1250×750×900（mm）・ Spin-coating speed ： 300～8,000rpm±3rpm・ 10 steps and 100 patterns of programming・ Substrate size ： approx. 10×10 mm～100×100 mm
Sputtering equipment
Transparent organic EL device made usingorganic device manufacturing equipment
UV irradiation equipmentOrganic EL total luminous flux measuring equipment / luminance orientation measuring equipment
Main specifications
・ Work size : 100×100 mm～200×200mm・ Cleaning method : high-pressure jet cleaning (9Mpa)・ Cleaning time : 2.5 minutes
Glass substrate cleaning equipment: HPMJ cleaning equipment
Optical thin film property measuring equipment
Main specifications
・ Measurement of film thickness and stress・ Work size: approx. 50 µm～55 mm・ Measurement time: approx. 3～400 seconds・ Sample stage size: φ150mm
Contact-type gap measurement
Organic device manufacturing equipment
Spin coater with glovebox dedicated for wet processes
Main specifications
・ Measurement of changes in light emission with continuous low voltage applied・ Maximum number of mounted devices : 150 Ch・ Constant temperature mechanism : 10ch × 15 patterns・ 4 patterns of load conditions per 1Ch (4 elements for one substrate)・ Trace of luminance changes with a luminance meter・ Observation of light-emitting state with a CCD camera
Main specifications
・ Organic photonics device storage characteristics
evaluation in constant temperature and
humidity control environment
・ Constant temperature control range : +5～+85ºC
・ Constant humidity control range : 40～95%rh
Main specifications
・ Organic transistor characteristics
evaluation
・ 3-probe and shield box
・ Semiconductor parameter analyzer :
Keithley-manufactured model 4100
Main specifications
・ Work function measurement of 3.4eV～6.2eV
・ Work size : 50×50 mm, thickness 10mm
One-point measurement
・ Measurement time : 10sec / 1 energy point
Main specifications
・ Mask size ： 25～100mm・ Minimum L/S : 0.8µm or less・ Alignment accuracy : within ±3µm・ Soft/hard contact and gap exposure
Exposure equipment with mask alignment mechanism
Device manufacturing equipment
Organic solar cell lifetime evaluation equipment Constant temperature/humidity storage tester
Organic EL lifetime evaluation equipment
Organic solar cell characteristics evaluation equipment
Atmospheric photoelectron spectrometer
Picosecond fluorescence lifetime measuring equipment Absolute luminescence quantum yield measuring equipment
Organic transistor characteristics evaluation system
Spectrophotometer
Absolute luminescence quantum yield measurement us ing mul t i -channel analyzer in which a φ3.3-inch integrating sphere and wavelength sensi t iv i ty dependence are completely corrected
Excitation wavelength : 245～725nm
Measurement wavelength : 196～958nm
Sample : Thin film, powder and solution
Main specifications
・ Primary property measurement of solar cell using solar simulator(1SUN condition)
・ Measurement of wavelength sensitivity dependence(IPCE) of power generation
property with filtered xenon lamp
(IPCE = Incident Photon-to-Current
Conversion Efficiency)
Main specifications
・ Maximum work size : 100×100mm
・ Load lock chamber : Ten-stage cassette
・ Organic deposition chamber : Resistance heating 8 sources
・ Metal deposition chamber : Resistance heating
4 sources
Main specifications
・ Measurement of changes in power
generation under continuous
irradiation
・ Solar simulator (1SUN condition) : 4Ch
・ White LED : 8Ch
Main specifications
<Excitation light source>
Basic wavelength : 690～1000nm
Output: 1.4W (@790nm, @80MHz)
Double wave : 345～420nm
Output: 3mW (@355nm, @8MHz)
Pulse width : <100fs
Repeat: 8kHz～8MHz<Streak camera> Time resolution : 15ps
Sweep time : 1ns～10ms / full scale Trigger jitter : 20ps (fastest range)
Sensitivity wavelength : 200～850nm
Main specifications
・ Measurement of absorption spectrum,
transmittance, and reflectance
・ Measurement wavelength : 190～1100nm
・ Double-beam measuring method
Main specifications
Deposition equipment Equipment for device manufacturing, lifetime evaluation, device characteristics evaluation
Evaluation equipment / device manufacturing support equipment
Thin-film basic properties evaluation equipment
Main specifications
・ Maximum substrate size ： 200mm×200mm・ Load lock chamber ： 13-stage cassette・ Pretreatment chamber ： UV/ozone cleaning, heating, nitrogen cooling・ Organic deposition chamber ： Four-round revolver × 1 set Three-round revolver × 2 sets Resistance heating × 2 sets Total 12 of sources of material can be introduced and a maximum 4 of sources can be simultaneously evaporated.・ Metal deposition chamber ： Resistance heating × 2 set E-beam gun with controlled influence of suppressed secondary electrons on substrate × 1 set・ Sputter deposition chamber ： 6-inch cathode × 1 set・ CVD deposition chamber : SiO
xN
y film can be formed.
・ Spare port ： a chamber can be added depending on research content
Main specifications
・ Maximum film-depositiou range ： φ120mm・ 3-inch cathode ： 2 sets, magnetic and non-magnetic RF（300W）・DC（500W）・ 6-inch cathode ： 1 set (dedicated for ITO)・ Heating temperature during deposition： room temperature ～500ºC・ Gas introduction ： O2
,Ar,N2
・ 5-stage cassette type・ Automatic deposition by recipe input
Main specifications
・ 250W ultrahigh-pressure mercury lamp・ Radiation diameter:φ200(WD 180)・ Illuminance : 14mW/cm2
Main specifications
・ Work size ： 25×25 mm, 100×100 mm･ Bottom-emission and top-emission substrates can be measured.･ Luminescence, emission spectrum, chromaticity coordinates, etc., can be measured by emission angle by using the rotary stage.
Main specifications
・ Measurement of n (refractive index), k (extinction constant) and t (film thickness)・ Work size : approx. 20×20 mm～200×200 mm・ Measurement time : approx. 10 seconds・ Fitting model : Forouchi-Bloomer model
Summary of equipment（1F） Summary of equipment（2F）
Organicdepositionchamber
Organicdepositionchamber
Observation directionfrom entrance
Metaldepositionchamber
Metaldepositionchamber
Pretreatmentchamber
PretreatmentchamberSpare portSpare port
CVDchamber
CVDchamber
Sputteringdepositionchamber
Sputteringdepositionchamber
Load lockLoad lock
Transferrobot
Transferrobot
Glovebox
Glovebox
Glovebox
Glovebox
Main specifications
・ Circulated inert gas purification unit using dehydration/deoxidization catalyst・ Removal of circulating organic solvents by activated carbon・ Oxygen/moisture ： 1ppm or less・ Working space ： 1250×750×900（mm）・ Spin-coating speed ： 300～8,000rpm±3rpm・ 10 steps and 100 patterns of programming・ Substrate size ： approx. 10×10 mm～100×100 mm
Sputtering equipment
Transparent organic EL device made usingorganic device manufacturing equipment
UV irradiation equipmentOrganic EL total luminous flux measuring equipment / luminance orientation measuring equipment
Main specifications
・ Work size : 100×100 mm～200×200mm・ Cleaning method : high-pressure jet cleaning (9Mpa)・ Cleaning time : 2.5 minutes
Glass substrate cleaning equipment: HPMJ cleaning equipment
Optical thin film property measuring equipment
Main specifications
・ Measurement of film thickness and stress・ Work size: approx. 50 µm～55 mm・ Measurement time: approx. 3～400 seconds・ Sample stage size: φ150mm
Contact-type gap measurement
Organic device manufacturing equipment
Spin coater with glovebox dedicated for wet processes
Main specifications
・ Measurement of changes in light emission with continuous low voltage applied・ Maximum number of mounted devices : 150 Ch・ Constant temperature mechanism : 10ch × 15 patterns・ 4 patterns of load conditions per 1Ch (4 elements for one substrate)・ Trace of luminance changes with a luminance meter・ Observation of light-emitting state with a CCD camera
Main specifications
・ Organic photonics device storage characteristics
evaluation in constant temperature and
humidity control environment
・ Constant temperature control range : +5～+85ºC
・ Constant humidity control range : 40～95%rh
Main specifications
・ Organic transistor characteristics
evaluation
・ 3-probe and shield box
・ Semiconductor parameter analyzer :
Keithley-manufactured model 4100
Main specifications
・ Work function measurement of 3.4eV～6.2eV
・ Work size : 50×50 mm, thickness 10mm
One-point measurement
・ Measurement time : 10sec / 1 energy point
Main specifications
・ Mask size ： 25～100mm・ Minimum L/S : 0.8µm or less・ Alignment accuracy : within ±3µm・ Soft/hard contact and gap exposure
Exposure equipment with mask alignment mechanism
Device manufacturing equipment
Organic solar cell lifetime evaluation equipment Constant temperature/humidity storage tester
Organic EL lifetime evaluation equipment
Organic solar cell characteristics evaluation equipment
Atmospheric photoelectron spectrometer
Picosecond fluorescence lifetime measuring equipment Absolute luminescence quantum yield measuring equipment
Organic transistor characteristics evaluation system
Spectrophotometer
Absolute luminescence quantum yield measurement us ing mul t i -channel analyzer in which a φ3.3-inch integrating sphere and wavelength sensi t iv i ty dependence are completely corrected
Excitation wavelength : 245～725nm
Measurement wavelength : 196～958nm
Sample : Thin film, powder and solution
Main specifications
・ Primary property measurement of solar cell using solar simulator(1SUN condition)
・ Measurement of wavelength sensitivity dependence(IPCE) of power generation
property with filtered xenon lamp
(IPCE = Incident Photon-to-Current
Conversion Efficiency)
Main specifications
・ Maximum work size : 100×100mm
・ Load lock chamber : Ten-stage cassette
・ Organic deposition chamber : Resistance heating 8 sources
・ Metal deposition chamber : Resistance heating
4 sources
Main specifications
・ Measurement of changes in power
generation under continuous
irradiation
・ Solar simulator (1SUN condition) : 4Ch
・ White LED : 8Ch
Main specifications
<Excitation light source>
Basic wavelength : 690～1000nm
Output: 1.4W (@790nm, @80MHz)
Double wave : 345～420nm
Output: 3mW (@355nm, @8MHz)
Pulse width : <100fs
Repeat: 8kHz～8MHz<Streak camera> Time resolution : 15ps
Sweep time : 1ns～10ms / full scale Trigger jitter : 20ps (fastest range)
Sensitivity wavelength : 200～850nm
Main specifications
・ Measurement of absorption spectrum,
transmittance, and reflectance
・ Measurement wavelength : 190～1100nm
・ Double-beam measuring method
Main specifications
*If transportation is by car, we recommend getting on the Nishi-Kyushu Expressway from the Fukuoka Urban Expressway. It takes about 20 minutes from Imajuku IC.
Imajuku IC
Kyudai-Gakkentoshi
Fukuoka IC
Kyushu Expressway
Dazaifu ICNishi Kyushu Expressway
For Karatsu,Maebaru
JRChikuhi Line
Showa BusLine
Nishitetsu BusLine
Susenji Imajuku Meinohama Nakasu-Kawabata
SubwayNanakuma
Line
SubwayHakozaki
Line
JRKagoshimaMain Line
Shinkansen
SubwayKuko Line
Urban Expressway
Urban Expressway
For Kumamoto
For Kitakyushu,Kokura
NishitetsuOmuta Line
FukuokaAirportTenjin
HakataStation
Yokohama
Imajuku
Imajuku
Iiji
Big Orange Mae(Front of Big Orange)
KyushuUniversity
Kyushu University,Ito Campus
Fukuoka Industry-Academia Symphonicity
Fukuoka industry-academia Symphonicity （FiaS）
Center for Organic Photonics and Electronics Research（OPERA）, Kyushu University
Susenji-Nishi
Susenji
Taromaru-Higashi
Route 202
JR Chikuhi Line
Route 202 Bypass
Nishi Kyushu Expressway
Imajuku IC
Imajuku Otsuka
Organization for Promotion Academic Cityby Kyushu University
（OPACK）
Kyudai-Gakkentoshi
Kyudai Kogakubu Mae (Front of Faculty of Engineering, Kyushu University)
Taromaru-Nishi
Fukuoka Industry, Science & Technology FoundationFukuoka i3 Center for Organic Photonics and Electronics Research5-14, Kyudai-Shinmachi, Nishi-ku, Fukuoka City, Fukuoka, Japan 819-0388TEL：092-805-1850 FAX：092-805-1851 E-mail：[email protected]：http://i3-opera.ist.or.jp
FukuokaAirport
Subway Kuko Line
24 minutes
Nishitetsu Bus
TenjinShowa Bus JR Chikuhi Line
Meinohama （track sharing）
Kyudai-GakkentoshiStation
Tenjin （about 43 minutes）
about 13 minutes
Hakata Station （about 55 minutes）
30 minutes35 minutes
Hakata Station ABus Stop
Tenjin 2BBus Stop
Tenjin KitaBus Stop
HakataStation
Required time from major locations in Fukuoka City
Area in detail
Access
Nishi FireDepartmentMotooka Branch