metallization and functional structures by aerosol jet ... · metallization and functional...
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117.10.2012
Optomec Aerosol Jet User Group Meeting 2012
Aerosol Jet International User Group Meeting
Metallization and Functional Structures by Aerosol Jet deposition
Andreas Brose
Institut für Mikro-
und SensorsystemeLehrstuhl Mikrosystemtechnik
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Optomec Aerosol Jet User Group Meeting
IntroductionOtto‐von‐Guericke‐University Magdeburg
MEMS MID Reliability
Chair ofMEMS‐Technology
Institute for Micro and Sensor Systems (IMOS)
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Facilities
R & DDesign and Simulation lab
(30m2)
MEMSMEMS-cleanroom
(class: 100, 150m²)
ReliabilityReliability lab
(50m²)
PackagingPackaging labs
(72m² + 100m²)
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Optomec Aerosol Jet User Group Meeting
3D-MID activities
EquipmentEquipment
• 1&2-shot injection molding
• LDS/Hot embossing/Aerosol-Jet® deposition
• PVD/Galvanic/ElectrolessPlating
• Soldering/Wire Bonding/Flip-Chip
• electric characterization withenvironment simulation
• X-ray Analysis
ServicesServices
• Consultation/Conceptual Design
• Simulation/CAD
• Prototyping/Pilot Run
• Testing & Qualification
• Reliability of Chip on MID/Flex
• Product Miniaturization by MID
• Medical MID Systems
• MID Sensor Structures
Research Research ––
MEMS on MIDMEMS on MID
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Pattern generation
additive subtractive
masked processes maskless processes
Screen printing Stencil printingThin filmprocesses
Inkjet Aerosol Flamecon
Nano particle inks
Catalytic seed layer(MicroCat)
Passivation / Isolation(non conductive)
Function materials(resistors, piezoelectric, medicals, …)
Metallization
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Aerosol Jet System @ IMOS
moving stage
Aerosol generation
deposition head
camera
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Optomec Aerosol Jet User Group Meeting
Overview: applicated inks
• Nano particle based inks
- Silver, Gold, Platinum, Copper
• Catalytic ink (MicroCat)
-
Seed layer for additional plating
processes
• Function- and isolation layers
-
Dielectrics (adhesives, resists),
Piezoelectrics (PZT)
• Sintering necessary
• Layer thickness < 1µm
• Electroless plating of
Cu/Ni/Au
• No thermal treatment
• Viscosity up to 1000cP
• Particle size up to 500nm
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2D-metallizations
Gold electrodes on MEMS-Chip
Platinum electrodes on Langasite (LGS)
micro cantilever
RF-resonant circuitSilver on glass (Pyrex)
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3D-metallizations
• cooling device for high-power LED module
• Silver deposition on ceramic heat sink (AlN)• challenge: covering the edges
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Optomec Aerosol Jet User Group Meeting
3D-metallizations
• cooling device for high-power LED module• nano-copper ink (Intrinsiq Materials, Inc)• sinter process: laser sintering (Nd:YAG)
• difficult wetting behavior→ heating substrate and ink
• insufficient jetting stability
• improvable conductivity
Copper issues:
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Optomec Aerosol Jet User Group Meeting
Catalytic ink process flow
• Aerosol Jet deposition of catalytic ink
- contains Palladium, 2component-adhesive, organic solvent
• Drying step
• Activation by reducing agent
• Electroless plating of
- Copper/Nickel (NiP)/Gold
• Low temperature process→
no sintering
• good conductivity• solderable surface• noncorrosive
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Antenna on 3D-MID
4 working planes
continuous pattern
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Reliability testing
measuring and comparing the shear strength of SMDs mounted on MID-substrates
metallization by aerosol deposition of catalytic ink
LDS-metallization
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Catheter marker for MR imaging• insufficient contrast between polymer
catheter and human tissue
• minimal invasive surgery requires newtools for better imaging
• Idea: local amplification ofmagnetic field with resonantcircuit at the catheter tip
• 1st discrete version: coiledcopper wire and SMD capacitor
• Objective: integration by AerosolJet metallization
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MRI-Marker for catheter devices
printed helix with catalytic ink
electroless plating
return loss S11
loose coupling with measure coil
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MRI-Marker – Multi layer layout
metal 1: Cu (electroless plated)
dielectric: PET heat shrink tubing
metal 2: Cu/Au (electroless plated)
C
L
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Validation with 3T-MRI
• Working Markersprovide positiveimage contrast
• Positive contrastenables computer- assisted tracking
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3 Tesla-MRI installed at University of Magdeburg in September 2012
• Only for scientific use!
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Function materials
• Passivation layers
-
Selective deposited protective
coating for encapsulation of SMD
components
• PZT-layer on silicon membrane
-
PZT-powder containing suspension
(95% of the particles < 300nm)
- average layer thickness: 3µm
- sintering at 600°C
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Optomec Aerosol Jet User Group Meeting
layer thickness (µm)
perm
ittiv
ity
Function materials
• Permittivity of Aerosol Jet deposited
PZT film higher than screen printed
and electrophoretic deposited films
• X-ray analysis showed inhomogeneous
film thickness
X-ray analysis:
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Optomec Aerosol Jet User Group Meeting
Aerosol coating of CMUT-gas sensor
membrane
cavity
substrate
0.2 mm
2.6 mm
single element
In cooperation with chair of measurement and sensor technology at OvGU
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Optomec Aerosol Jet User Group Meeting
Aerosol coating of CMUT-gas sensor
In cooperation with chair of measurement and sensor technology at OvGU
Material Abbreviation State Solvent Solvents’ BP (℃)
Concentration(mg/mL)
Methyl-β-Cyclodextrin β-CD Solid Ethanol 78.4 3 or 6
4-tert-Amyl-Calix[8]arene CA Solid Chloroform 61.2 0.5
Polyethylenimine PEI Liquid Water 100 1.5
Cyanopropylphenyl Dimethylpolysiloxane OV 225 Liquid Ethyl
acetate 77.1 3
Polydimethylsiloxane PDMS Liquid Ethyl acetate 77.1 3
• Multi-channel CMUT coated with various sensing materials
- Enables sensor array to analyze gas mixtures
Coating materials:
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Optomec Aerosol Jet User Group Meeting
Aerosol coating of CMUT-gas sensor
Aerosol Jet coating
Advantages:
• precise patterning
• controllable output volume
• thin and uniform layers
Coffee ring
dropping with micro pipette
In cooperation with chair of measurement and sensor technology at OvGU
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Optomec Aerosol Jet User Group Meeting
Contact
Andreas BroseOtto-von-Guericke-University MagdeburgIMOS
Phone: +49 (0) 391 / 67-58227Fax: +49 (0) 391 / 67-12609eMail: [email protected]