phe ellipsometer

Who we are:Angstrom Advanced is the leading supplier for ellipsometers. We offer full range of ellipsometers for thin film thickness measurement and optical characterization for refractive index and extinction coefficient (n & k). The Angstrom Advanced ellipsometer family includes discrete wavelength ellipsometers (single wavelength ellipsometers and multi-wavelength ellipsometers), deep UV, UV, VIS, NIR and IR spectroscopic ellipsometers. Our ellipsometers have been delivered to many renowned universities, research institutes and companies worldwide. Angstrom Advanced's goal is to supply the most accurate and repeatable ellipsometers with the highest standard of customer satisfaction. Many upgrade accessories are available for different applications.

What we do:Angstrom Advanced Inc is one of the largest suppliers for ellipsometers in the world and we have the widest range of ellipsometers in the globe. We offer ellipsometers, after-sales service, training and contract laboratory testing services.

PHE101 Discrete Wavelength Laser EllipsometerPHE101 Multi-Wavelength Ellipsometer]PHE101S Variable Angle Discrete Wavelength Ellipsometer for Solar Cell ApplicationPHE102 UV/VIS NIR Spectroscopic EllipsometerPHE103 UV/VIS NIR Spectroscopic EllipsometerPHE104 Infrared Spectroscopic Ellipsometer

Angstrom Advanced Inc.

Angstrom Advanced Inc. 50 Braintree Hill Park, Suite 201, Braintree MA, 02184Phone: (781)519-4765 Fax: (781)519-4766 [email protected]

1 ． PHE-101 Discrete Wavelength Ellipsometer

Parameters ：Light Source: He-Ne Wavelength: 632.8nmAccuracy of film thickness: 0.005nmAccuracy of Refractive index: 0.001Measurement speed: Less 1 secondIncident angle ： 20 to 90 ， 5/StepThickness range ： 0-6,000nm

Functions/Features ：Thin film’s thickness, refractive index and

extinction coefficient, single or Multi-layer;Second laser is used to make alignment most

convenient and accuracy;Economical cost.

Full material library; Data and graph output function; Based on windows XP operation system;

Integrated data acquisition, analysis software; Sample size up to 300mm; wide applications, such as dielectrics,

semiconductors, metal, organics and more; Angstrom Advanced Inc. 50 Braintree Hill Park, Suite 201, Braintree MA, 02184Phone: (781)519-4765 Fax: (781)519-4766 [email protected]

2 ． PHE-101Multi-Wavelength EllipsometerParameters ：Light Source ： He-Ne and semiconductor LasersWavelength: 532, 632.8, 1064nm, …Accuracy of film thickness: 0.005nmAccuracy of refractive index: 0.0005Incident angle ： 20 to 90 ， 5/StepRepeatability ： Psi=0.01 ， Delta=0.02 Thickness range: 0-10,000nm

Functions/Features:Integrated data acquisition, analysis software ；Thin film’s thickness, refractive index and extinction coefficient, single layer or multi-layer;Second Laser is used to make alignment most convenient and accuracy;Full material library, generate Psi and Delta with any sample structures;Simulate experimental data and give fitting parameter values, confidence and correlation matrix;Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database;User can build own dispersion formula and database;Data and graph output function.


3 ． PHE-101S Variable Angle Discrete Wavelength Ellipsometer for Solar Cell Application

Parameters ：Light Source ： He-Ne and semiconductor LasersWavelength: 632.8nm standard, 543, 594, 612, 633, 1150nm…

Accuracy of film thickness: 0.001nm for 10 nm SiO2 on silicon

Accuracy of refractive index: 0.0001Incident angle ： 30 - 90 ， 5 0.01 /StepRepeatability ： Psi=0.01 ， Delta=0.02 Thickness range: 0-6,000nm

Functions/Features:Integrated data acquisition, analysis software ；Thin film’s thickness, refractive index and extinction coefficient, single layer or multi-layer;Second Laser is used to make alignment most convenient and accuracy;Full material library, generate Psi and Delta with any sample structures;Simulate experimental data and give fitting parameter values, confidence and correlation matrix;Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database;User can build own dispersion formula and database;Data and graph output function.


4 ． PHE-102 UV/VIS NIR Spectroscopic Ellipsometer

Functions/Features ： Film’s thickness, refractive index and extinction coefficient, single or

multi-layer; Powerful software with full materials library, Full Cauchy, EMA,

Lorenz et. al. dispersion formula and a lot of database; Transmittance and reflectance Automated angle of incidence 20- 90(optional), Wafer Mapping & Motorized X-Y Sample stage, 3D graph display (optional);

Parameters ： Wavelength: 250-1100nm(190-1100nm),

250-1700nm(250-2300nm); Incident angle ： 20 to 90 ， 5/Step; Repeatability ： Psi=0.01 ， Delta=0.02 ; Thickness range 0-30,000nm


5 ． PHE-103 UV/VIS, NIR Spectroscopic Ellipsometer

Parameters ： Wavelength: 250-1100nm(190-1100nm), 250-1700nm

(250- 2300nm); Incident angle ： 20 to 90 ， automated 0.01/Step; Repeatability ： Psi=0.01 ， Delta=0.02 ; Vertical Sample stage

Functions/Features ： Film’s thickness, refractive index and extinction coefficient, single or multi-layer;

Powerful software with full materials library, Full Cauchy, EMA, Lorenz et. al. dispersion formula

and a lot of database; Transmittance and reflectance; Automated angle of incidence 20-20- 90(optional), Wafer Mapping & Motorized X-Y Sample stage,

3D graph display (optional);


6 ． PHE-104 Infrared Spectroscopic Ellipsometer

Functions/Features ： Film’s thickness, N & K measurement;

Resistivity measurements and doping profiles; Identification of chemical bonds and buried layers investigation ; Transmittance and reflectance;

Parameters ： Wavelength: 4000-400cm-1(2.5-25um) Beam size: 1X34mm Automated incident angle ： 35 to 90 ， 0.01/Step


phe ellipsometer

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