vlsi
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EL 511 VLSI Design1
EL 511 VLSI Design
Instructor: Mazad S. Zaveri
Faculty Block 4, Room 4206Email: [email protected]
http://intranet.daiict.ac.in/~mazad_zaveri/
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EL 511 VLSI Design2
N-type substrate (or body) In P-channel MOSFET
Depending on the applied gate-voltage MOS Cap could exhibit the
following conditions: Flat band (VG = 0) Accumulation (VG > 0) Depletion (VG < 0) Onset of inversion (VG = VT) Inversion (VG < VT)
VLSI systems work at 0 to +ve Volts. How do we give ve voltages to P-MOSFET?
MOS Capacitor with N-type substrate - Under Various Bias Conditions
0VT
Applied Volt. VG
Inversion Depletion Accumulation
Onset of Inversion Flat band
(VG < 0)
(VG < 0)
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EL 511 VLSI Design3
Ei (surface)
Ei (bulk)
Equations (according to Pierrets book) Numerical Examples
Consider NA = 1018 cm-3 What is surface potential at inversion?
Consider ND = 1018 cm-3 What is surface potential at inversion?
Draw the approx. band diagram ?
[ ][ ]
1 ( ) ( )
1 ( ) ( )
ln
ln
2
S i i
F i F
AF
i
DF
i
S F
E bulk E surfaceq
E bulk E bulkq
NkTq n
NkTq n
=
= = =
= At the depletion to inversion transition point
P-type semiconductor
N-type semiconductor
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EL 511 VLSI Design4
Equations (from Pierret)
1/ 2
0
1/ 2
0max
0
2
2 2
SS
A
SF
A
A
S
KWqN
KWqN
qN WK
= =
=E
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EL 511 VLSI Design5
MOS Cap: P-type substrate Similar in functioning to the n-type substrate MOS Cap
But the relation of applied gate voltage to the various exhibited MOS Cap conditions are reversed
0 VT
Applied Volt. VG
InversionDepletionAccumulationOnset of InversionFlat band
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EL 511 VLSI Design6
P-type substrate: Flat Band Condition When VG = 0 (No applied
bias) Metal Fermi-level and substrate
Fermi-level are aligned No band bending
Assuming that the workfunction of metal and semiconductor are equal (ideal condition)
The characteristics of the substrate (concentration of holes) is the same everywhere (in the bulk and near the surface)
Block charge diagram No generated charges
Surface
Bulk
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EL 511 VLSI Design7
P-type substrate: Accumulation When VG
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EL 511 VLSI Design8
P-type substrate: Depletion
When VT> VG >0 Relatively
Metal Fermi-level goes down (relative to substrate EF) Band bending will be such that
Ei (surface) moves closer to EF The concentration of holes decreases at/near the
surface How? Holes near the surface are repelled (due to applied +ve
bias on gate); i.e. electron from bulk will be attracted, and will fill up missing bonds (holes) at acceptor atoms
Hence, these acceptor atoms become -ve charged ionized acceptor atoms (fixed charges), and create a depletion region.
Block charge diagram +ve charge on the gate
Leads to a -ve charge (ionized acceptors in depletion region) near the surface
arpitUnderline
arpitUnderline
arpitUnderline
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EL 511 VLSI Design9
P-type substrate: Onset of Inversion and Inversion When VG >= VT (VG = VT at Onset of Inversion)
Relatively Metal Fermi-level continues to go down (relatively to substrate
EF) Band continue to bend (same direction as VT> VG >0)
Ei (surface) crosses the EF level, and continues to move down Hole concentration continues to decrease near the surface Electron concentration continues to increase near the surface
When Ei(surface) = EF, we have p(surface) = n(surface) = ni When Ei(surface) < EF, we have n(surface) > p(surface), and
n(surface) < p(bulk) When EF - Ei(surface) = Ei(bulk) - EF, we have inversion of the
surface We have n(surface) = p(bulk), majority carriers at surface are
now electrons Also, in other words, Ei(bulk) - Ei(surface) = 2[Ei(bulk)- EF], at
inversion Block charge diagram
More +ve charge on the gate Leads to a -ve charge (ionized acceptors in depletion region) near
the surface Depletion region width grows (assume max. at inversion)
Leads to increase in -ve charged electrons at surface
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EL 511 VLSI Design10
MOS Cap Structure: Summary
Depending on the applied gate voltage MOS Cap exhibits:
Accumulation Depletion Inversion
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EL 511 VLSI Design11
NMOS transistor aka N-Channel MOSFET Cut-off Region
When 0
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EL 511 VLSI Design12
Ideal IV Equations (NMOS)
Linear or
Resistive or
Un-saturated
Saturation
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EL 511 VLSI Design13
Ideal IV Characteristics NMOS What is the meaning of this
plot? Vds
DC (fine) sweep from 0 to 1.8V Vgs
DC (step) sweep 0.6, 0.9, 1.2, 1.5, 1.8
Where are linear and saturation regions in the plot? Boundary condition
Vds >= Vgs-Vt Can we approx verify this
graph, with the given equations?
Can we find the resistance of the transistor in linear/resistive region from this plot?