07-02373 singulus news 34 · 2016-01-04 · with the same 405 nm diode laser diode that has been...

[news]ISSUE 34 MAY 2007

NEWS MAGAZINE FOR OUR BUSINESS FRIENDS

Also in this Issue: � New CRYSTALLINE � SKYLINE II Duplex HD � New TAURUS PLUS � Nano Deposition Technologies

� Service News � BLU-RAY DISC � OPTICAL COATINGS � DECORATIVE COATINGS � MaskTrack® Photomask Equipment

CRYSTALLINE Inline Mastering for 3rd Generation FormatsAt the Media-Tech Expo, LongBeach, USA (May 15-17) SINGULUSMASTERING will present its youngest family member: The CRYSTALLINE.

The new inline platform offersmass production capability of HD DVD, BD and DVD masters. With the CRYSTALLINE the

new SINGULUS MASTERING proprietary Phase TransitionMastering (PTM) process is introduced.

[News Optical Disc] | ISSUE 34 | MAY 2007

CRYSTALLINE: Inline

The CRYSTALLINE system is a fullyautomated inline mastering platform, basedon the “fresh glass substrate in – finishedmaster out” principle. The system is a Class100 cleanroom in itself in with all process stations integrated, thereby avoiding the construction of a real and expensiveclean room.

The robot disc handler at the center of thesystem has proven its speed, flexibility andreliability in the semiconductor industry. Running the system in unattended mode andalso anticipating higher recording speeds,the CRYSTALLINE is equipped with asubstrate warehouse.

Dynamic modeling and simulation have beenapplied for the mechanical design of the newLaser Beam Recorder (LBR). Fundamental new principles include the implementation of a new ultra-precise translation system,consisting of a linear motor, an optical scale(1 nm resolution) and servo-control, and theLearning Feed Forward Focus control.

page 2

CRYSTALLINE: PTM Phase Transition Mastering

Essentially new in the recording of a PTMlayer is that heat is induced to the sensitivelayer of the substrate. In the photoresist process the sensitive layer is only exposedby the laser. Heating of the PTM layer is donewith the same 405 nm diode laser diode thathas been successfully used for many yearsfor CD / DVD mastering with photoresist.The CRYSTALLINE platform contains a“single chamber – three target” sputteringunit developed by SINGULUS TECHNOLOGIES,known as the specialist in the developmentof sputtering technologies. The PTM sputtering module applies the SINGULUS’SmartCathode® principle to obtain maximumlayer thickness uniformity.

CRYSTALLINE: Multi-format: HD DVD, BD & DVD

The CRYSTALLINE is primarily designedfor HD DVD and BD mastering, offering maxi-mum flexibility independent of which formatis required to serve the market. The DVD for-mat can be mastered as well enabling asmooth transition into the new generationformats with a ramping up demand.

The CRYSTALLINE will be officiallyunveiled on Monday, May 14, 5.00 pm at theLong Beach Convention Center.

0.5

1.0

1.5

2.0 x: 0.500 µm/divz: 250.000 nm/divµm

BD

0.5

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1.5

2.0 x: 0.500 µm/divz: 250.000 nm/div

2.5µm

HD DVD

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2.0 x: 0.500 µm/divz: 250.000 nm/div

2.5µm

DVD

[News Optical Disc]

Contact:SINGULUS MASTERING B.V.Marinus v. Meelweg 25657 EN Eindhoven, The NetherlandsPhone: +31 -40 7501 -400Fax: +31 -40 7501 -409E-Mail: [email protected]

Dual layer TechnologyTo give the Blu-ray Disc a large capacitycapability, SINGULUS cooperates with SonyDADC, Salzburg, in further developing the production technology for the mass produc-tion of Blu-ray dual layer Discs with a storagecapacity of 50 GB. The good cooperation withSony DADC offers SINGULUS a big opportunityto establish itself even faster in the marketfor the new disc formats as the leading part-ner of the Hollywood studios demand and togain enormous competitive advantages. SINGULUS will launch the wet-embossingbased dual layer module later this year andgive all customers the option to upgradetheir installed BLU-LINE to dual layer media.

SINGULUS BLU-LINE The Solution for BD 50The BLU-LINE from SINGULUS with a flexiblemachine size and modular arrangement ofprocess modules allows the media manufac-turer to customize the system for the in-house process requirements. The procedurefor upgrading a single layer BLU-LINE into adual layer production line is easy and fast. SINGULUS TECHNOLOGIES has prepared a system which includes substrate molding,layer 0 metallization, high accurate spacer-layer application, layer 1 wet-embossing,layer 1 metallization, cover-layer application,hard-coating, label-side-coating and finalinspection. The arrangement of the duallayer module is specially adjusted for thebest and most cost efficient process to manufacture a dual layer disc. The BLU-LINEdoes include 2 different size systems from a 25GB single layer to a 50GB dual layerprocess. With this broad program we handleany Blu-ray Disc demand, starting fromprocess development up to robust and highpace production of all Blu-ray media.

Embossing Processes – L1 stamper Embossing Processes – L1 replicated

Cover-Layer uniformity 75µm < ± 2µmSpacer-Layer uniformity 2µm + 23µm < ± 1µm

Blu-ray Disc

page 4 [News Optical Disc] | ISSUE 34 | MAY 2007

The HamaTech TAURUS PLUS is a new generation disc replication system for theproduction of recordable CD and DVD (CD-Rand DVDR) as well as HD DVD-R discs. The design is based on thirteen years ofexperience with HamaTech’s CD-R and DVDRprograms. The TAURUS family of productscontinues this successful story.

TAURUS PLUS The HamaTech TAURUS PLUS is an innovativereplication line, dedicated for mass production of CD-R and DVDR on the sameproduction platform. The key features are: � High quality CD-R and DVDR production

on the same line � CD-R production at 1.6 sec cycle time � DVDR production at 1.8 sec cycle time � Standard 2 IMM interface, 3rd IMM Interface

optionally available � Easy CD-R to DVDR line conversion � OEM customer proven high quality system

and components

With all options and following the optimizedsetup, the TAURUS PLUS allows for:

CDR production with up to three injectionmolding machines that results in typical output values of: �more than 45.000 good CD-R/24hrs

(OEM quality level) and

�more than 50.000 sellable CD-R/24hrs.

DVDR manufacturing with up to two injectionmolding machines that result in typical output values of:�more than 28.000 good DVDR/24hrs

(OEM quality level) and �more than 30.000 sellable DVDR/24hrs.

The TAURUS PLUS machine is a “future-proof”system for recordable markets who demandthe flexibility of swapping production capaci-ty from CD-R to DVDR without compromisingthe OEM quality level of each product.

With its high level of process stability, theTAURUS platform is the leading system forrecordable manufacturing.

TAURUS PLUS Production Line for all RecordableFormats

The major project for SINGULUS Service this year has been the integration of theHamaTech customer support into the SINGULUS Business Unit Customer Service.The incorporation of HamaTech spare partsinto SINGULUS headquarters’ stock and datasystem is 90 % accomplished. A systematicapproach was necessary to integrate 12,000HamaTech parts into an existing stock volume of 30,000 parts at SINGULUS.

Roberto Calleja, Head of Business Unit Customer Service, said: "This was and still isa real challenge which the entire Servicestaff has embraced with great enthusiasm.We are pleased to be able to offer Service outof one central location." SINGULUS Service isable to provide technical and hotline serviceto SINGULUS and HamaTech customers!

As a special service, SINGULUS now offers itscustomers a 24 hours, 7 days Help Desk forall technical related questions.

HamaTech Service

page 5

Contact:HamaTech AGc/o: SINGULUS TECHNOLOGIES AGHanauer Landstrasse 103 63796 Kahl am Main, Germany Phone: +49 61 88/4 40-0 Fax: +49 61 88/4 40-110 E-mail: [email protected]

24/7 HAMATECH

HELP DESK

+49 7045 41 911

Open 24 hours!

[News Optical Disc]

As the leading equipment supplier for CD andDVD formats with a global market share ofmore than 65 % the Kahl am Main-based SINGULUS TECHNOLOGIES is proud to present a further enlargement of its productportfolio.

The new SKYLINE II Duplex HD – originallydesigned for CD and DVD 5 media replication- is now able to manufacture in addition HDDVD single layer formats. In combination with

the SPACELINE II – the benchmark in DualLayer DVD and HD DVD production – and theSINGULUS injection molding machines of typeMOLDPRO and EMOULD, a complete family ofHD DVD production equipment is available.

The benchmark SKYLINE II Since the presentation of the SKYLINE II tothe public in 2003, this production tool wasable to tie up seamless to the track record ofits successor SKYLINE I. Out of more than

1900 worldwide installed SKYLINE systems,more than 500 lines are of type SKYLINE II. Being recognized as the working horse withinthe replication industry, the market share of the SKYLINE II surpassed the above men-tioned benchmark like SPACELINE II also did.

Differences to SPACELINE II Whereas SPACELINE II is designed to manu-facture DVD 5, DVD 9, DVD 10 and HD DVD (single and dual layer formats), the SKYLINE II

SKYLINE II Duplex HD Now ready for Single Layer HD DVD ProductionTogether with SPACELINE II a Complete Family of Production Lines for All Single and Dual Layer DVD & HD DVD Formats

[News Optical Disc] | ISSUE 34 | MAY 2007

Duplex HD is prepared for CD, DVD5 and HDDVD single layer production. Besides thatSPACELINE II is equipped with additionaldevices to enable the manufacturing of dual layer formats, SKYLINE II can easily be identified as a member of the SINGULUSfamily of replication equipment.

Consistency facts As most SINGULUS customers are using SKYLINE II and SPACELINE II equipment in parallel, one of the main objectives for SINGULUS´ engineers has been, to considerthe implementation of non-variable parts onboth type of lines. Therefore these customersdo benefit from a remarkable reduction onthe amount and costs of spare parts withintheir stocks, generally increasing their availability in parallel.

Also the visualization was designed identical-ly on both lines, allowing a fast transfer andreduced training for operating personnel.This includes a single-push-button solutionenabling a quick switch between the formatsto be manufactured. Therefore in most casesonly a stamper change is necessary. Freely configurable parameter sets do provide bestsupport to prepare a format exchange,reduce the conversion time and increase theuptime.

OutlookOf course both SKYLINE II and SPACELINE II do achieve the most cost-efficient disc production, highest product quality and yield available in the market. Based on this measures and paired with its capabilities in manufacturing HD DVD formats, it is predicted that both replication lines willremain the benchmark within the industry.

[News Optical Disc]

Since the decision in 2002 to enter the newbusiness area of thin film deposition tools formagneto – electronic applications, SINGULUShas manufactured six of their TIMARIS PVDbridge tools (wafer size up to 300mm diame-ter). Besides MRAM technology SINGULUS hasqualified the TIMARIS for other applications,especially as a production tool for Thin FilmHeads (TFHs) required in Hard Disk Drives(HDD). SINGULUS is also cooperating withQimonda to qualify the TIMARIS for a standardsemiconductor application in the frame of theSEA-NET project, a European-funded integratedproject including 27 industrial and institutionalpartners. All applications require the depositof ultra–thin metallic and insulating films andfilm stacks down to nanometer thickness andbelow with extremely high requirementsregarding thickness and material uniformities.

The special capabilities of the TIMARIS and theaddressed market for this type of machinehave led to the decision to give the respectivebusiness unit inside of SINGULUS the name“Nano – Deposition – Technologies” (NDT).

The Multi–Target–Module (MTM) as key component of the TIMARIS PVD tool incorpo-rates Linear Dynamic Deposition (LDD) technology in combination with ten (10) sputter targets in one vacuum chamber. Thistechnology is especially designed for deposition of ultra–thin films, magnetic films,high–quality metallic, conductive and insulat-ing films and multiple film stack depositioncomprising these materials without needing tobreak the ultra-high vacuum. The LDD technol-ogy is the key to deliver world class materialuniformity across large wafers and exceptionalprecise control of ultra thin layer thicknessdown to 1% of a nanometer. SINGULUS’ TIMARISsystem is designed as a flexible cluster tool.Additional modules to the MTM are availableto configure a complete machine according tothe customers specifications. These modulesare the Oxidation module, Soft–Etch module,Combi–module, and Static PVD module. Furthermodules are under development. The

latest version of the MTM incorporates the full scope of sputtering techniques: DCmagnetron sputtering, pulsed DC magnetronsputtering, RF magnetron and diode sputtering as well as combinations of it areselectable by recipe. Substrate bias is offeredas an option.

In 2006, SINGULUS announced the sale of fourTIMARIS thin-film deposition system for MRAMwafer production & Thin Film Head Applica-tions. Two of these TIMARIS systems havepassed their technical acceptance in Q1 of thisyear. Another TIMARIS system has been soldand is now delivered to GRANDIS in Silicon Valley/USA for the MRAM application. As part of the purchase contract, Grandis & SINGULUSsigned an agreement to jointly developadvanced TMR films for MRAM based on theSpin–Torque – Transfer technology (STT). Grandis is one of the leading groups develop-ing this technique. MRAM is a non-volatilememory technology that also provides high-speed read and write operation as well asunlimited rewriting capability. Whereas the originally pursued “classical” MRAM technology could not fulfill all the scalingrequirements according to the semiconductorITRS roadmap (which led to the withdrawal ofseveral tier-one semiconductor manufacturersfrom MRAM development), the STT technologyis now promising to be scaled down according

to the requirements. As a result, a number ofbig semiconductor companies (e.g. Samsung,TSMC, Toshiba, Sony and others) are againworking to develop the MRAM technology. Thegoal is to replace the volatile DRAM by MRAMand to use MRAM as embedded memory in sev-eral applications. The cooperation with Grandiswill ensure that Singulus NDT is involved in thevery promising STT technology development.

Thin Film Heads (TFH)� High Moment Material (Writer–Material)� TMR (Reader Material)� GMR (Reader Material)� Deposition of seed and gap layers

Semiconductor� MRAM� HK Dielectrics� Metal Gates� Phase Change material deposition� Seposition of EUV mirrors

(Extreme Ultra - Violet) for next generation of lithography� SAW/BAW film deposition

At Semicon West, the largest capital equipment exhibition show worldwide (in San Francisco from July 16-20, 2007), the SINGULUS Nano Deposition TechnologiesGroup will display its activities to its customers.

SINGULUS Nano Deposition Technologies

8page [News Nano Deposition Technologies] | ISSUE 34 | MAY 2007

HamaTech’s Advanced Process Equipment(APE) division provides photomask and waferprocessing equipment & solutions for theworldwide semiconductor industry. The business activities of this division weretransferred to an independent legal entity.

As a member of the SINGULUS Group, HamaTech APE will look into potential syner-gies and benefits of the overall company’snetwork, especially with SINGULUS’ NanoDeposition Technologies (NDT) division.HamaTech APE has expanded its leading rolefor equipment for the cleaning and process-ing of photo masks; its global market sharein these sub-segments is to more than 30 %.

As technology of integrated circuits (ICs)evolves to ever shrinking dimensions, themanufacturing of photomasks becomes moreand more challenging. For HamaTech APEwith its expertise in photomask cleaning,developing and baking these increasing

demands provide the opportunity to differentiate itself from its competitors byoffering leading solutions for its customers.Six out of the top ten semiconductor companies, and all three major merchantmask manufacturers are customers ofHamaTech APE, giving it access to developleading technologies with them. A JointDevelopment Program on EUV and opticalblank and mask cleaning with SEMATECH, asemiconductor consortium of renowned chipproducers like Intel, IBM, TI, Freescale, Samsung, and others, is of high strategicimportance. This cooperation enables HamaTech APE to address already today thefuture requirements of cleaning, leading toan excellent competitive position for HamaTech APE´s most advanced MaskTrack®

cleaners.

Overall, well over 10 MaskTrack® systems aswell as several other equipments were deliv-ered to leading customers in the business

year 2006, and well over 20 systems havebeen ordered by customers by Q1/2007. Combined with the exclusive customer port-folio this proves the great success of theMaskTrack® product introduced only in 2005.The majority of these equipments are used inmask cleaning, where today the most severechallenges exist for the demands of 65 and45nm chip technologies: Such cleaning has tobe accomplished without leaving a singleparticle of a critical size (e.g. 60 nm) on themask surface, while at the same time thestructure of similar size must not be dam-aged, optical properties may not be altered,and any chemical traces on the mask surfacemust be avoided.

MaskTrack® Photomask Equipment

page 9

Contact:HamaTech APE GmbH & Co. KGFerdinand-von-Steinbeis Ring 10D-75447 Sternenfels, Germany Phone: +49 (0) 70 45 / 41 - 8 Fax: +49 (0) 70 45 / 41 - 239 www.hamatech-ape.de

[News HamaTech APE’s MaskTrack® Equipment]

10page

SINGULUS presented its innovative inline oph-thalmic lens coating machine OPTICUS at theMIDO in Milan from May 4 to May 7. This wasthe first time that the machine was operatingon display at a show. Visitors were able toview the machine that will revolutionize traditional eye lens production. SINGULUS’proven Inline coating process stems from theinline production of CDs and DVDs and auto-mates the production process, considerablyreducing personnel and logistics require-ments as well as other expenses.

Dr. Steffen Runkel, Technical Director OpticalCoatings, comments: “We are happy to present our OPTICUS coating machine for thefirst time to the tradeshow in Milan. Thismarks another milestone in the introductionof this new machine concept to the market.”

SINGULUS achieved an important breakthrough with this machine concept lastDecember, when the first OPTICUS coatingmachine for plastic ophthalmic lenses wasqualified for production and technically

accepted by a customer. In total, threemachines were delivered in 2006, which areemployed in pilot production and daily massproduction of eyeglass lenses.

Dr. Runkel adds: “The fruitful cooperationwith several renowned eyeglass producersand the resulting exchange of know-how was a great help to the development of themachine, and strengthens our position in theeyeglass market."

[News Optical Coatings] | ISSUE 34 | MAY 2007

OPTICUS - For Coating of Eyeglass LensesFirst Time at the MIDO in Milan

In November 2005, SINGULUS had introducedthe metallization system SINGULUS 3DS, aninnovative machine for decorative vacuumcoating of plastic parts. This machine is arevolutionary new development in the seg-ment of metallisation for complex plastic sur-faces. With the sputtering process used in theSINGULUS 3DS, three-dimensional plasticparts can be handled and coated in vacuumwith decorative metallic layers.

On the basis of the SINGULUS 3DS metallizer,a new system which integrates all necessaryproduction steps from the injection moldingmachines to the metallization and the appli-cation of anti-scratch finishes was developed:the DECOLINE. All production processes arecompletely automated.

The DECOLINE was developed in cooperationwith Balda AG, Bad Oeynhausen in October 2006. In January, SINGULUS TECHNOLOGIES announced this cooperationto the public. The new production line forthe processing of plastic covers for mobilephones, handheld game devices and otherplastic parts will be marketed under thebrand DECOLINE. Amongst electronic devices,the line provides many advantages in

applications like packaging for cosmetics & personal care, toys, automobile industries,household appliances and many other applications.

The delivery to the key customer Balda willtake place in May 2007.

The new DECOLINE will also be shown on theK show in Duesseldorf/Germany from October24-31, 2007.

DECOLINEA New Production Line for Surface Processing ofPlastic Parts

[News Decorative Coatings]

NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS

Associated Companies

Switzerland:SINGULUS MOLDING AG Schlachthofstrasse 35 CH-8200 SchaffhausenPhone: +41 -52 632-62 22Fax: +41 -52 632-62 61E-Mail: [email protected]

HeadquartersSINGULUS TECHNOLOGIES AGHanauer Landstrasse 103, D-63796 Kahl, GermanyPhone: +49 - 61 88 - 440 - 0Fax: +49 - 61 88 - 440 - 110E-mail: [email protected]: www.singulus.de

Germany:SINGULUS EMOULD GmbHSt.-Jobser-Strasse 52D-52146 WürselenPhone: +49-24 05-60 19-13Fax: +49-24 05-60 19-25E-Mail: [email protected]

Netherlands:SINGULUS MASTERING B.V.Marinus v. Meelweg 25657 EN EindhovenPhone: +31 -40 7501 -400Fax: +31 -40 7501 -409E-Mail: [email protected]

SINGULUS TECHNOLOGIES AG Subsidiaries

Brazil SINGULUS TECHNOLOGIES LATIN AMERICA LTDA.

Tel.: +55-11-3641-0113, Fax: +55-11-3641-0110

E-mail: [email protected]

France SINGULUS TECHNOLOGIES France S.A.R.L.

Tel.: +33-3893-11129, Fax: +33-3896-17264


Great Britain/ SINGULUS TECHNOLOGIES UK LTD.

Ireland Tel.: +44-1793-7842-00, Fax: +44-17 93-784-222


Italy SINGULUS TECHNOLOGIES ITALIA S.R.L.

Tel.: +39-071-7930-312, Fax: +39-071-7930-821


Singapore SINGULUS TECHNOLOGIES Asia Pacific

Tel.: +65-67 41 19 12, Fax: +65-67 41 12 13


Spain SINGULUS TECHNOLOGIES IBERICA S.L.

Tel.: +34-936-750-025, Fax: +34-935-906-426


Taiwan SINGULUS TECHNOLOGIES TAIWAN LTD.

Tel.: +886-2-2748-3366, Fax: +886-2-2748-6565


USA/Canada SINGULUS TECHNOLOGIES INC.

Tel.: +1-860-683-8000, Fax: +1-860-683-8010


USA/ SINGULUS TECHNOLOGIES INC.

West-Coast Tel.: +1-805-373-6216, Fax: +1-805-371-7433

Office E-mail: [email protected]

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SINGULUS TRAINING10 Years of Training Classes

During the last ten years, we have providedtraining to 7,235 participants in our trainingcenters worldwide. With your continuedfeedback, we have designed programs thatare presented on-site, incorporating intensivehands-on, practical experience. We have alsotailored our instruction to the specific skilllevels of your personnel.

In short, we have listened and improved ourtraining strategy to better suit your needsand production schedules. Our speciallystructured and customized training courseswill provide the content to meet your requirements.

We have experienced training instructors inthe U.S., Asia, the Netherlands and Germany.Learn from the experts – in one of our in-house training classrooms or in your own facility – how best to improve the performance and uptime of your equipmentand get ready for the high productiondemands of the season.

Please contact:

Headquarters worldwide:[email protected]

North America:[email protected]

Asia Pacific/Australia:[email protected]

SINGULUS Mastering:[email protected]

Let us know your needs and we are pleased to prepare an offer for you.

Use the opportunity... be good - become better!

07-02373 singulus news 34 · 2016-01-04 · with the same 405 nm diode laser diode that has been...

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