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Springer Series in Electronics and Photonics 24 Edited by D. H. Auston
Springer Series in Electronics and Photonics Editors: D.H. Auston W. Engl T. Sugano
Volume 21 Picosecond Electronics and Optoelectronics Editors: G.A. Mourou, D.M. Bloom, C.-H. Lee
Volume 22 High-Speed Electronics Basic Physical Phenomena and Device Principles Editors: B. Kallback and H. Beneking
Volume 23 Gyided-Wave ACOllstOOptic Interactions, Divices, and Applications Editor: C. S. Tsai
Volume 24 Picosecond Electronics and Optoelectronics II Editors: EJ. Leonberger, C.H. Lee, E Capasso, and H. Morkoc
This series was originally published under the title Springer Series in Electrophysics and has been renamed starting with Volume 22.
Volumes 1-20 are listed on the back inside cover
Picosecond Electronics and Optoelectronics II Proceedings of the Second OSA-IEEE (LEOS) Incline Village, Nevada, January 14-16, 1987
Editors: F. J. Leonberger, C. H. Lee, F. Capasso, H. Morkoc
With 235 Figures
Springer-Verlag Berlin Heidelberg New York London Paris Tokyo
Dr. Frederick John Leonberger United Technologies Research Center, East Hartford, CT 06108, USA
Chi H. Lee University of Maryland, Dept. of Electrical Engineering, College Park, MD 20742, USA
Federico Capasso AT&T Bell Laboratories, Room 7A-209, 600 Mountain Avenue Murray Hill, NJ 07974, USA
Hadis Morkoc University of Illinois, Dept. of Electrical Engineering, Champaign Urbana, IL 61801, USA
Series Editors:. Dr. David H. Auston Columbia University, Dept. of Electrical Engineering, New York, NY 10027, USA
Professor Dr. Walter Engl Institut fUr Theoretische Elektrotechnik, Rhein.-Westf. Technische Hochschule, Templergraben 55, D-5100 Aachen, Fed. Rep. of Germany
Professor Takuo Sugano Department of Electronic Engineering, The Faculty of Engineering, The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113, Japan
ISBN-13:978-3-642-72972-0 e-ISBN-13:978-3-642-72970-6 DOl: 10.1007/978-3-642-72970-6
This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, re-use of illustrations, recitation, broadcasting, reproduction on microfilms or in other ways, and storage in data banks. Duplication of this publication or parts thereof is only permitted under the provisions of the German Copyright Law of September 9, 1965, in its version of June 24, 1985, and a copyright fee must always be paid. Violations fall under the prosecution act of the German Copyright Law.
© Springer -Verlag Berlin Heidelberg 1987 Softcoverreprint of the hardcover 1st edition 1987
The use of registered names, trademarks etc. in this publication does not imply, even in the.absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use.
2153/3150-543210
Preface
Over the past five years, there has been an enormous increase in the interest in and understanding of electronic and optoelectronic devices operating in the picosecond (multigigahertz) range. This has been fueled in a significant way by the spectacular advances in picosecond laser technology, electro optic sampling, III-V devices, and wideband fiber optic systems. Partly to address these advances, a new conference jointly sponsored by the IEEE Lasers and Electrooptics Society (IEEE (LEOS)) and the Optical Society of America (OSA) was founded and its first meeting held in March 1985. The purpose of this meeting was to bring together workers in the areas of electronics and optoelectronics who share a common interest in the physics and technology of picosecond solid-state electronic and optoelectronic devices, their multigigahertz applications, and ultrafast measurement techniques. Emphasis was placed on the interdisciplinary aspects of these areas, since each area is covered by its own topical meeting. This meeting was quite successful and led to a second meeting, of which this volume forms the proceedings.
The Second Picosecond Electronics and Optoelectronics Meeting was held at Incline Village, Nevada, January 14-16, 1987. Subjects covered at the meeting included picosecond and femtosecond optical probing of electronic devices and integrated circuits, multi gigahertz digital and microwave electronic devices and circuits, cryogenic operation of electronic circuits and striplines, high-speed lasers, detectors and integrated optic modulators, picosecond carrier transport, resonant tunneling and quantum-well devices, photoconductive switches, and optical microwave devices and applications. The meeting was attended by over 215 scientists and 65 papers were presented. The conference was co-sponsored by the IEEE Lasers and Electrooptics Society and the Optical Society of America in cooperation with the IEEE Electron Device and Microwave Theory and Techniques Societies.
We gratefully aclmowledge the generous grants from the Air Force Office of Scientific Research (AFOSR), the National Science Foundation (NSF) and the Office of Naval Research (ONR) which provided funding for the meeting. Finally, we would specially like to thank Joan Carlisle of the Optical Society of America for her personal and thoroughly professional management of this meeting. East Hartford, June 1987 The Editors
V
Contents
Introduction By F.J. Leonberger, C.H. Lee, F. Capasso, and H. Morkoc
Part I High-Speed Probing Techniques
A Non-contact Electro-optic Prober for High Speed Integrated Circuits
1
By J.A. Valdmanis and S.S. Pei (With 6 Figures) ............ 4
Photoconductive Generation of Subpicosecond Electrical Pulses and Their Measurement Applications By D. Grischkowsky, C.-C. Chi, LN. Duling III, W.J. Gallagher, N.H. Halas, J.-M. Halbout, and M.B. Ketchen (With 7 Figures) 11
Picosecond Sampling of GaAs Integrated Circuits By K.J. Weingarten, M.J.W. Rodwell, and D.M. Bloom (With 10 Figures) ................................... 18
Electro-optic Sampling of High-Speed, InP-Based Integrated Circuits By J.M. Wiesenfeld, R.S. Tucker, A. Antreasyan, C.A. Burrus, and A.J. Taylor (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . . . 25
Electro-optic Sampling Analysis of Timing Patterns at Critical Internal Nodes in Gigabit GaAs Multiplexers/Demultiplexers By X.-C. Zhang, R.K. Jain, and R. Hickling (With 6 Figures) 29
A Technique for Wing Suppressed IR Sampling By J. Nees and S. Williamson (With 3 Figures) ............. 33
Picosecond Electrical Pulse for VLSI Electronics Characterization By J.-M. Halbout, P. May, M.B. Ketchen, H. Jackel, G.P. Li, C.-C. Chi, M. Scheuermann, and M. Smyth (With 3 Figures) ... 36
Ultrafast Optics Applied to Modern Device Research By G. Mourou, K. Meyer, J. Whitalcer, M. Pessot, R. Grondin, and C. Caruso (With 8 Figures) ........................ 40
VII
An Optically Strobed Sample and Hold Circuit By C. McConaghy (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . 49
Laser Pulsed E-Beam System for High Speed I.C. Testing By P. May, J.-M. Halbout, and G. Chiu (With 2 Figures) ...... 53
Photo emissive Testing of High-Speed Electrical Waveforms By A.M. Weiner, P.S.D. Lin, and RB. Marcus (With 5 Figures) 56
High-Speed Optical Logic Using GaAs By H.M. Gibbs, N. Peyghambarian, Y.H. Lee, J.L. Jewell, A. Migus, A. Antonetti, D. Hulin, and A. Mysyrowicz . . . . . . . . . 61
Comparison of Sampling Oscilloscopes with ~35 ps Transition Durations. By J.R Andrews (With 2 Figures) .............. 64
Picosecond Optoelectronic Study of a Thin Film Transmission Line Structure. By G. Arjavalingam, J.-M. Halbout, G.V. Kopcsay, and M.B. Ketchen (With 2 Figures) ...................... 67
Part II Transient Transport
Direct Subpicosecond Measurement of Carrier Mobility of Photo excited Electrons in GaAs By M.C. Nuss and D.H. Auston (With 4 Figures) ........... 72
Nonstationary Transport in MODFETs and Heterojunction Devices. By K. Hess (With 3 Figures) .................... 79
Monte Carlo Investigation of Hot Photo excited Electron Relaxation in GaAs. By M.A. Osman, H.L. Grubin, P. Lugli, M.J. Kann, and D.K. Ferry (With 5 Figures) ........................ 82
Longitudinally Localized Optical Carrier Injection for Femtosecond Transport Studies By D.H. Reitze, T.R Nuss, and M. Downer (With 5 Figures) ... 86
Femtosecond Nonequilibrium Electronic Heat Transport in Thin Gold Films By S.D. Brorson, J.G. Fujimoto, and E.P. Ippen (With 4 Figures) 89
Part III Ballistic Transport and Resonant Tunneling
Ballistic Transport and Energy Spectroscopy of Hot Electrons in THETA Devices By M. Heiblum (With 7 Figures) . . . . . . . . . . . . . . . . . . . . . . . . 94
VIII
Microwave and Millimeter-Wave Resonant Tunneling Diodes By T.C.L.G. Sollner, E.R Brown, and W.D. Goodhue (With 7 Figures) ............................ . . . . . . .. 102
Quantum Transport Calculation of Resonant-Tunneling Response Time. By W.R Frensley (With 4 Figures) ................. 109
Resonant Tunneling Electron Spectroscopy. By F. Capasso, S. Sen, A.Y. Cho, and A.L. Hutchinson (With 2 Figures) ............ 113
Analysis of Transit Time Effects due to Spacer Layers in Quantum Well Oscillators. By V.P. Kesan, T.D. Linton, P.A. Blakey, D.P. Neikirk, and B.G. Streetman (With 4 Figures) .......... 116
Part IV Quantum Wells
High-Speed Phenomena in GaAs Multiple-Quantum-Well Structures. By A. Mysyrowicz, D. Hulin, A. Migus, A. Antonetti, H.M. Gibbs, N. Peyghambarian, and H. Morkoc (With 3 Figures) 122
Picosecond Carrier Transport in GaAs Quantum Wells By J. Shah and RA. Hopfel (With 8 Figures) .............. 127
Quantum-Confined Stark Effect in InGaAs/lnP Quantum Wells Grown by Metal-Organic Chemical Vapor Deposition By 1. Bar-Joseph, C. Klingshirn, D.A.B. Miller, D.S. Chemla, U. Koren, and B.1. Miller (With 2 Figures) ................ 135
Dynamics of Below-Gap Photo excitation in GaAs Quantum Wells By J.E. Zucker, D.S. Chemla, A. Von Lehmen, and J.P. Heritage (With 3 Figures) .................................... 139
Optical Reading of InGaAs Modulation Doped Field Effect Transistor. By 1. Bar-Joseph, D.S. Chemla, C. Klingshirn, D.A.B. Miller, J.M. Kuo, and T.Y. Chang (With 2 Figures) 143
Part V High-Speed Electronic Devices
Molecular Beam Epitaxy (MBE) for High-Speed Devices By A.Y. Cho ...................................... 148
Multigigahertz Logic Based on InP MISFETs Exhibiting Extremely High Transconductance. By A. Antreasyan, P.A. Garbinski, V.D. Mattera Jr., and H. Temkin (With 5 Figures) ........... 152
Millimeter-Wave Integrated Circuits By B.B. Spielman (With 2 Figures) ...................... 156
IX
Enhanced Performance Ultrabroadband Distributed Amplifiers By G. Zdasiuk, M. Riaziat, R. LaRue, C. Yuen, and S. Bandy (With 6 Figures) ......... . . . . . . . . . . . . . . . . . . . . . . . . . .. 160
High-Performance Quarter-Micron-Gate MODFET By J.J. Berenz (With 3 Figures) ........................ 165
Progress and Challenges in HEMT LSI Technology By M. Abe, T. Mimura, K. Kondo, and M. Kobayashi (With 8 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 169
Picosecond Switching in Josephson Tunnel Junctions By R. Sobolewski, D.R. Dykaar; T.Y. Hsiang, and G. Mourou (With 4 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 177
Modulation Efficiency Limited High Frequency Performance of the MODFET. By M.C. Foisy, J.C. Huang, P.J. Tasker, and L.F.Eastman (With 2 Figures) ...................... 181
Development of 18 GHz GaAs Static Frequency Dividers and Their Evaluation by Electrooptic Sampling. By J.F. Jensen, K.J. Weingarten, and D.M. Bloom (With 5 Figures) .......... 184
Characteristics of Shielded Microstrip Lines on GaAs-Si at Millimeter-Wave Frequencies By M.l. Aksun and H. Morkoc (With 4 Figures) ............. 188
Part VI Fast Lasers and Detectors
Characteristics, Packaging and Physics of Ultra High Speed Diode Lasers and Detectors. By J.E. Bowers and C.A. Burrus. . . . . . .. 194
Energy Variations in Optical Pulses from Gain-Switched AIGaAs Diode Lasers By R.T. Hawkins, J.H. Goll, and N.C. Anheier (With 2 Figures) 198
Frequency Chirping in Pulse Modulated Gain and Index Guided Single Quantum Well Lasers By A. Larsson, P. Andersson, and A. Yariv (With 4 Figures) 201
InP fGaInAsfInP PIN Photodiode with FWHM < 18 ps By S.Y. Wang, K.W. Carey, and B.H. Kolner (With 4 Figures) 205
Fast GaAs Photoconductive Detectors with High Sensitivity Integrated in Coplanar Systems onto GaAs Substrates By H. Schumacher, U. Salz, and H. Beneking (With 4 Figures) 209
MESFET Compatible IMSM Detectors By D.L. Rogers (With 4 Figures) ........................ 214
x
Picosecond Optical Autocorrelation Experiments on Fast Photo detectors By T.F. Carruthers and J.F. Weller (With 3 Figures) ......... 220
Detection of 10 JLm Infrared Radiation via Intersubband Absorption in Doped GaAs Quantum Wells. By B.F. Levine, K.K. Choi, C.G. Bethea, J. Walker, and R.J. Malik (With 2 Figures) ...... 224
Part VII Photoconductive Switching Devices
Carrier Lifetime Dependence on Ion Implantation in Silicon By F.E. Doany, D. Grischkowsky, and C.-C. Chi (With 3 Figures) 228
An Investigation of Photoconductive Picosecond Microstripline Switches on Self-Implanted Silicon on Sapphire (SOS) By P.' Polak-Dingels, G. Burdge, C. H. Lee, A.C. Seabaugh, R.T. Brundage, M.l. Bell, and J. Albers (With 4 Figures) ...... 232
Picosecond Optoelectronic Switches Using Composite Electronic Materials. By E.A. Chauchard, C. H. Lee, V. Diadiuk, and G.W. Turner (With 2 Figures) ...................... 237
High Speed, High Repetition Rate, High Voltage Photoconductive Switching. By W.R. Donaldson (With 2 Figures) ............ 241
Generation and Forming of Ultrashort High Voltage Pulses By H.A. Sayadian, S.T. Feng, J. Goldhar, and C. H. Lee (With 5 Figures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 245
Silicon Pulse Sharpening Diodes - Switching Kilovolts in Tens of Picoseconds. By M.D. Pocha, J.D. Wiedwald, C.G. Dease, and M.M. Contreras (With 5 Figures) .................... 248
Graphite as a Picosecond Laser Activated Opening Switch By E.A. Chauchard, C. H. Lee, C.Y. Huang, and A.M. Malvezzi (With 2 Figures) ....... . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 252
Part VIII Optical Microwave Techniques
Radar and Electronic Warfare Applications of Multigigahertz Optical Components and Systems. By H.F. Taylor (With 2 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 256
Characteristics and Applications of Wideband Guided-Wave Devices. By C.M. Gee, R.J. Morrison, G.D. Thurmond, and H.W. Yen (With 4 Figures) ........ . . . . . . . . . . . . . . . .. 261
XI
A New Optoelectronic CW Microwave Source By C.J. Clark, E.A. Chauchard, K.J. Webb, K. Zaki, C.H. Lee, P. Polak-Dingels, H.A. Hung, and H.C. Huang (With 4 Figures) 269
Optical Intensity Modulation to 40 GHz Using a Waveguide Electrooptic Switch. By S.K. Korotky, G. Eisenstein, R.S. Tucker, J.J. Veselka, and G. Raybon (With 5 Figures) .............. 272
Picosecond Response of an Optically Controlled Millimeter Wave Phase Shifter By C.-K.C. Tzuang, D. Miller, T.-H. Wang, P. Cheung, T. Itoh, D.P. Neikirk, P. Williams, and M. Downer (With 3 Figures) .... 276
Picosecond Optoelectronic Transceivers By A.P. DeFonzo, C.R. Lutz, and M. Jarwala (With 4 Figures) .. 280
High Speed Opto-isolator for Radar Applications By J.P. Anthes, P. Garcia, K.Y. Lau, and 1. Ury (With 3 Figures) 285
Index of Contributors . . . . . . . . . . . . . . . . . . . . . . . . . .. 289
XII
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