ESD SYSTEM OVERVIEW

Sample Holder plate

Bias Filament

Cu Sample1

2

B-A gaugeRGA

Bias Sample

Electrometer

Butterfly valve

Pumping group

Conductance

Gas Injection Line

Filament

Filament Power Supply

Transport rod

Full Range Gauge

ESD SYSTEM OVERVIEW

Cu SAMPLES

Cu Samples

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

w/o etch

Passivation

SLAC etch

CERN 2 2 2 2 2 2 2 2 2 2 2 2 24

Bodycote 2 2 2 2 2 2 2 2 2 18SLAC 2 2 2 2 2 4 14

2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 4 56

Hydrogen (1 bar)

elliptical

Vacuum REFERENCE Vacuum Argon (mbar) H2 (mbar) H2 (1 bar) Vacuum Argon (mbar) Hydrogen (mbar)

main steps: Machinin

g Cleaning

Heat treatment

ESD

Bake – out: lower part

12

3

4

5

6/11 78

9

10

TC Part of the system Equip. Description T ( C ̊� )1 TMP valve 1 Jacket + 1 TC 1502 T flanges 3 Collars + 1TC 1503 T body 1 Tape +1TC 1504 Full Range Gauge 1 Tape +1TC 1505 Cross chamber flanges 3 Collars + 1 TC 150

6 &11 RGA 4(2+2) Collars + 2 TC 2007 B-A Gauge 2 Collars + 1 TC 2508 Sample Holding 1 Tape +1TC 1509 Butterfly valve 1 Tape +1TC 12010 Filament 2 Tapes +1TC 150

Bake – out: upper part

1B

2B3B

4BTC Part of the system Equip. Description T ( C ̊� )

1B (12) Cross body 1flange+1cross body+1viewport + 1TC 1502B Rod 1Tape+1TC 803B Pirani + Penning 1 Tape + 1 TC 1804B Elbow body + Elbow flange+bellow 2 Tape +1 flange + 1TC 150

TMP rack TMP Valve 1 jacket 150

RGA scans

RGA scans (valve closed)

Circuit

A

A

V

V

+15 V

2-3 A

35 KV

Degassing: 9 Cycles @ 0.35KV

0 50 100 150 200 250 300 350 400 450

5.00E-008

5.20E-008

5.40E-008

5.60E-008

5.80E-008

6.00E-008

6.20E-008

6.40E-008

P (

mb

ar)

Time (s)

0.35 KV

0 2 4 6 8 10 12

1E-12

1E-11

1E-10

1E-9

Ion

Cu

rre

nt

Cycle

H2 H2O N2/CO O2 F Ar CO2

0.35KV

H2 %H2O

%N2/CO

% O2 % F % Ar %CO2

%

9.56 34.1 16.9 13 12.4 9.25 36.9

Degassing: 9 Cycles @ 0.70KV

0 50 100 150 200 250 300 350 400 450 500 5507.00E-008

8.00E-008

9.00E-008

1.00E-007

1.10E-007

1.20E-007

1.30E-007

P (

mb

ar)

Time (s)

0.70 KV

0 3 6 9 121E-12

1E-11

1E-10

1E-9

Ion

Cu

rre

nt

Cycle

H2 H2O N2/CO O2 F Ar CO2

H2 %H2O

%N2/CO

% O2 % F % Ar %CO2

%

23 34 30.8 40 18.9 16.2 44.9

Degassing: 9 Cycles @ 1.5KV

0 50 100 150 200 250 300 350 400 450 5001.47E-007

1.48E-007

1.49E-007

1.50E-007

1.51E-007

1.52E-007

1.53E-007

P (

mb

ar)

Time (s)

0.70 KV

0 3 6 9 121E-12

1E-11

1E-10

1E-9

Ion

Cu

rre

nt

Cycle

H2 H2O N2/CO O2 F Ar CO2

1.5KV

H2 %H2O

%N2/CO

% O2 % F % Ar %CO2

%

0.94 -0.22 0.77 3.7 -0.44 -3.29 1.47

Calibration: H2

0.000000 0.000001 0.000002 0.000003 0.000004 0.000005 0.000006

0.00E+000

3.00E-008

6.00E-008

Ion

Cu

rre

nt [

A]

PSVT [mbar]

Equation y = a + b

Adj. R-Squa 0.99465

Value Standard Err

Ion Current Intercept 7.21842E- 4.74445E-10

Ion Current Slope 0.00846 2.0664E-4

Calibration Factor

Calibration: N2

0.000000 0.000001 0.000002 0.0000030.00E+000

1.00E-010

2.00E-010

3.00E-010

Ion

Cu

rre

nt

PN2

Equation y = a + b*

Adj. R-Squar 0.99296

Value Standard Erro

B Intercept 2.35101E-1 3.10656E-12

B Slope 9.60535E-5 2.69433E-6

Calibration Factor

Calibration: N2 2nd set of data

0.0000000 0.0000002 0.0000004 0.0000006

0.00E+000

2.00E-010

4.00E-010

Ion

Cu

rre

nt [

A]

PSVT [mbar]

Equation y = a + b*x

Adj. R-Squa 0.9997

Value Standard Err

Ion Current Intercep -1.00073E-1 1.0463E-12

Ion Current Slope 7.16529E-4 3.78484E-6

Calibration Factor

Degassing: 30 Cycles @ 0.35 KV

0 600 1200

-6.00E-013

-4.00E-013

-2.00E-013

0.00E+000

2.00E-013

4.00E-013

6.00E-013

Cur

rent

(A

)

Time (s)

0 200 400 600 800 1000 1200 1400 1600

3.00E-007

3.20E-007

3.40E-007

3.60E-007

3.80E-007

P (

mba

r)

real time (s)

0.35 KV

0 10 20 30

1E-12

1E-11

1E-10

Ion

Cur

rent

Cycle

2 18 28 32 38 40 44

0 5 10 15 20 25 30

1.00E-010

1.50E-010

2.00E-010

Ion

Cur

rent

#Cycle

2 18 28

CURRENT!!!!!

0 100 200 300 400 500 600

0.0

4.0x10-7

8.0x10-7

1.2x10-6

1.6x10-6

I

Time

Desorption Yield

kTI

eSpp

S

jjjj

)( )0()1(

Desorption Yield

0 1x1015 2x1015 3x1015 4x1015 5x1015

10-4

10-3

10-2

10-1

(m

ol/e

- )

Dose (e-/cm2)

H2 CH4 H2O N2 C2H6 CO2

2010_09_22

0.0 2.0x10144.0x10146.0x10148.0x10141.0x10151.2x1015

10-4

10-3

10-2

10-1

(m

ol/e

- )

Dose (e-/cm2)

H2 CH4 H2O N2 C2H6 CO2

Des Yield 2010_09_24

• 15 RGA Cycles for background Signal + biassing of the sample• 15 RGA Cycles with the filament switched on• filament + sample degassing

Desorption Yield

• switch on the filament• 15 RGA Cycles for background pressure• 15 RGA Cycles with the sample biased

0.0 3.0x1014 6.0x1014 9.0x1014 1.2x1015 1.5x1015 1.8x1015

-9.0x10-4

-6.0x10-4

-3.0x10-4

0.0

(m

ol/e

- )

Dose(e-/cm2)

H2 CH4 H2O N2 C2H6 CO2