mems ultrasonic sensors - people @ eecs at uc berkeley · 2019-04-25 · 1 swarm lab university of...
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1 SWARM Lab University of California Berkeley Sensor & Actuator Center
MEMSUltrasonic Sensors
Richard Przybyla, Hao-Yen Tang, Stefon Shelton†,Prof. David Horsley†, and Prof. Bernhard Boser
University of California, Berkeley & †Davis
2 SWARM Lab University of California Berkeley Sensor & Actuator Center
[D.R. Griffin, J. Animal Behaviour, 1960]
Uses ultrasound to navigateIdentifies insects from wing velocityTargets mosquitoes from 80 cm away
3 SWARM Lab University of California Berkeley Sensor & Actuator Center
Range Resolution
Voltage
Time
∆𝒓
∆𝒓≅ 25mm
4 SWARM Lab University of California Berkeley Sensor & Actuator Center
fo ≈ 190kHzBW ≈ 6.3kHz
–
AlN pMUT Operation
Si
Al
450μm250μm
+
AlN
AlNMo
AlNAl
1μm
2μm
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Angle Measurement
-60 -40 -20 0 20 40 60
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75
-60 -40 -20 0 20 40 60
0.25
0.3
0.35
0.4
0.45
0.5
0.55
0.6
0.65
0.7
0.75Range
Angle
θ
6 SWARM Lab University of California Berkeley Sensor & Actuator Center
Medical Ultrasonography
Good resolution possible because of large transducer
7 SWARM Lab University of California Berkeley Sensor & Actuator Center
Custom Readout ASIC
Amplitude Tracking
8 SWARM Lab University of California Berkeley Sensor & Actuator Center
2.5mm2mm x 1mmactive area
CMOS ASIC
MEMS ultrasound chip
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www.chirpmicro.com
10 SWARM Lab University of California Berkeley Sensor & Actuator Center
11 SWARM Lab University of California Berkeley Sensor & Actuator Center
Capacitive Fingerprint SensorHumidity Spoofing
Ref: FPC1011F3 Area Fingerprint Sensor, http://www.fingerprints.com/wp-content/uploads/2014/01/FPC1011F3_product-sheet_.pdf
Dry Finger
Wet Finger
“Paper” fake fingerprint
Captured Image
12 SWARM Lab University of California Berkeley Sensor & Actuator Center
Operating Principle
ZPDMS = 1.5 MRayl
PDMSPin
Ultrasonic wave
Pin
Transmission line Characteristic ImpedanceèAcoustic Impedance
Z = ρv(Density × Speed of Sound)
PDMS
Dermis
Epidermis
13 SWARM Lab University of California Berkeley Sensor & Actuator Center
System Integration
CMOS(0.18µm, 24V)
MEMS
Anchor
CMOS
MEMS
Eutectic Bonding