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  • Getting Started with HFSS:A Silicon Spiral Inductor

    ANSYS, Inc.275 Technology DriveCanonsburg, PA 15317Tel: (+1) 724 746 3304Fax: (+1) 724 514 9494General Information: AnsoftInfo@ansys.comTechnical Support: AnsoftTechSupport@ansys.com

    September 2010Inventory ********

  • The information contained in this document is subject to change without notice. Ansoft makes no warranty of any kind with regard to this material, including, but not limited to, the implied warranties of merchantability and fitness for a particular purpose. Ansoft shall not be liable for errors contained herein or for incidental or consequential damages in connection with the furnishing, perfor-mance, or use of this material.

    2010 SAS IP Inc., All rights reserved.ANSYS, Inc.275 Technology DriveCanonsburg, PA 15317USATel: (+1) 724-746-3304Fax: (+1) 724-514-9494

    General Information: AnsoftInfo@ansys.comTechnical Support: AnsoftTechSupport@ansys.com

    HFSS and Optimetrics are registered trademarks or trademarks of SAS IP Inc.. All other trademarks are the property of their respective owners.

    New editions of this manual incorporate all material updated since the previous edition. The manual printing date, which indicates the manuals current edition, changes when a new edition is printed. Minor corrections and updates that are incorporated at reprint do not cause the date to change.Update packages may be issued between editions and contain additional and/or replacement pages to be merged into the manual by the user. Pages that are rearranged due to changes on a previous page are not considered to be revised.

    Edition Date Software Version

    1 Jan 2006 10.02 May 2007 11.03 February 2009 12.04 September 2010 13.0

  • Getting Started with HFSS: A Dielectric Resonator Antenna Problem

    iii

    Conventions Used in this GuidePlease take a moment to review how instructions and other useful infor-mation are presented in this guide.

    Procedures are presented as numbered lists. A single bullet indicates that the procedure has only one step.

    Bold type is used for the following:- Keyboard entries that should be typed in their entirety exactly as shown. For example, copy file1 means to type the word copy, to type a space, and then to type file1.

    - On-screen prompts and messages, names of options and text boxes, and menu commands. Menu commands are often separated by car-ats. For example, click HFSS>Excitations>Assign>Wave Port.

    - Labeled keys on the computer keyboard. For example, Press Enter means to press the key labeled Enter.

    Italic type is used for the following:- Emphasis.- The titles of publications. - Keyboard entries when a name or a variable must be typed in place of the words in italics. For example, copy file name means to type the word copy, to type a space, and then to type a file name.

    The plus sign (+) is used between keyboard keys to indicate that you should press the keys at the same time. For example, Press Shift+F1 means to press the Shift key and the F1 key at the same time.

    Toolbar buttons serve as shortcuts for executing commands. Toolbar buttons are displayed after the command they execute. For example,

    On the Draw menu, click Line means that you can click the Draw Line toolbar button to execute the Line command.

    Alternate methods or tips are listed in the left margin in blue italic text.

  • Getting Started with HFSS: A Dielectric Resonator Antenna Problem

    iv

    Getting Help

    Ansys Technical SupportTo contact Ansys technical support staff in your geographical area, please log on to the Ansys corporate website, https://www1.ansys.com.You can also contact your Ansoft account manager in order to obtain this information.All Ansoft software files are ASCII text and can be sent conveniently by e-mail. When reporting difficulties, it is extremely helpful to include very specific information about what steps were taken or what stages the simulation reached, including software files as applicable. This allows more rapid and effective debugging.

    Help MenuTo access online help from the HFSS menu bar, click Help and select from the menu: Contents - click here to open the contents of the online help. Seach - click here to open the search function of the online help. Index - click here to open the index of the online help.

    Context-Sensitive HelpTo access online help from the HFSS user interface, do one of the follow-ing: To open a help topic about a specific HFSS menu command, press

    Shift+F1, and then click the command or toolbar icon. To open a help topic about a specific HFSS dialog box, open the dia-

    log box, and then press F1.

  • Contents-1

    Table of Contents

    1. Introduction

    2. Setup Silicon Spiral Inductor ModelSetting Tool Options . . . . . . . . . . . . . . . . . . . . . 2-2Opening a New Project . . . . . . . . . . . . . . . . . . . 2-3Set Solution Type . . . . . . . . . . . . . . . . . . . . . . . . 2-4Creating the 3D Models for Dielectrics . . . . . . . 2-4

    Set Model Units . . . . . . . . . . . . . . . . . . . . . . . . 2-4

    Set Default Material for Substrate . . . . . . . . . . 2-5

    Create Substrate . . . . . . . . . . . . . . . . . . . . . . . 2-6

    Set Default Material for Oxide Substrate . . . . 2-7

    Create Oxide . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

    Set Default Material for Passivation . . . . . . . . 2-9

    Create Passivation . . . . . . . . . . . . . . . . . . . . . 2-9

    Set Default Materialfor Air Box . . . . . . . . . . . . 2-10

    Create Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

    Create Radiation Boundary . . . . . . . . . . . . . . . 2-11

    Create Ground . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

    Assign a Perfect E boundary to the Ground . . 2-13

    Hide Dielectrics . . . . . . . . . . . . . . . . . . . . . . . . 2-14

    Create Spiral Inductor Geometry . . . . . . . . . . . . 2-14

  • Getting Started with HFSS :Spiral Inductor

    Contents-2

    Set Default Material . . . . . . . . . . . . . . . . . . . . . 2-14

    Create Offset Coordinate System . . . . . . . . . . 2-15

    Create Spiral Path . . . . . . . . . . . . . . . . . . . . . . 2-15

    Create Spiral Path . . . . . . . . . . . . . . . . . . . . . . 2-17

    Set Grid Plane . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

    Create Underpass . . . . . . . . . . . . . . . . . . . . . . 2-19

    Create Via1 . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

    Create Via2 . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

    Create Feed . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

    Unite Spiral Objects . . . . . . . . . . . . . . . . . . . . . 2-22

    Solve Inside Conductors . . . . . . . . . . . . . . . . . 2-23

    Seed Mesh Conductors set for Solve Inside . . 2-24

    Set Default Material for Ground Ring . . . . . . . 2-25

    Create Ground Ring . . . . . . . . . . . . . . . . . . . . 2-25

    Create Inner Ring . . . . . . . . . . . . . . . . . . . . . . 2-26

    Complete the Ring . . . . . . . . . . . . . . . . . . . . . . 2-27

    Create Extension 1 . . . . . . . . . . . . . . . . . . . . . 2-28

    Create Extension 2 . . . . . . . . . . . . . . . . . . . . . 2-29

    Create Source 1 . . . . . . . . . . . . . . . . . . . . . . . . 2-29

    Create Source 2 . . . . . . . . . . . . . . . . . . . . . . . . 2-30

    Group the Conductors . . . . . . . . . . . . . . . . . . . 2-30

    Assign Excitation for Source1 . . . . . . . . . . . . . 2-31

    Assign Excitation for Source2 . . . . . . . . . . . . . 2-33

    Show All . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33

    Boundary Display . . . . . . . . . . . . . . . . . . . . . . 2-33

    3. Analyze Spiral ConductorAnalysis Setup . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

    Creating an Analysis Setup . . . . . . . . . . . . . . . 3-2

    Adding a Frequency Sweep . . . . . . . . . . . . . . 3-2

    Save Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3Model Validation . . . . . . . . . . . . . . . . . . . . . . . . 3-3Analyze . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

  • Getting Started with HFSS :Spiral Inductor

    Contents-3

    Solution Data . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3Create Reports . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

    Create S-parameter vs. Frequency . . . . . . . . . 3-4

    Custom Equations Output Variables . . . . . . . . 3-5

  • Getting Started with HFSS :Spiral Inductor

    Contents-4

  • Introduction 1-1

    1 Introduction

    In this exercise, we will use HFSS to create, simulate, and analyze a 2.5 turn spiral inductor.

  • Getting Started with HFSS: Spiral Inductor

    1-2 Introduction

    Nominal Design: Spiral: 2.5T, W=15um, S=1.5um, Rad=60um

    M6, 2um, = 2.8e7 S/m

    Underpass: M5, 0.5um, = 2.8e7 S/m Stackup:

    Passivation: 0.7umr = 7.9

    Oxide: 9.8umr = 4.0

    Substrate: 300umr = 11.9, = 10 S/m

    The following features of the Ansoft HFSS are used to create this passive device model 3D Solid Modeling

    Primitives: Box, Rectangles, Cylinders

  • Getting Started with HFSS: Spiral Inductor

    Introduction 1-3

    Boolean Operations: Subtract, Unite, Duplicate Boundary

    Boundary Conditions: Perfect H/Natural Excitations

    Ports: Lumped Gap Source Port Analysis

    Sweep: Fast Frequency Results

    Cartesian plotting Fields

    Fast Frequency Sweep/Field Plots

  • Getting Started with HFSS: Spiral Inductor

    1-4 Introduction

  • Setup Silicon Spiral Induct

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