ee141- spring 2003bwrcs.eecs.berkeley.edu/classes/icdesign/ee141_s03/...electromigration, inductive...

22
1 EE141 Interconnect Effects Input-Output EE141- Spring 2003 Lecture 25 EE141 Dealing with Capacitive Cross Talk Avoid floating nodes Protect sensitive nodes Make rise and fall times as large as possible Differential signaling Do not run wires together for a long distance Use shielding wires Use shielding layers

Upload: others

Post on 23-Jan-2021

14 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

1

EE141

Interconnect EffectsInput-Output

EE141- Spring 2003Lecture 25

EE141

Dealing with Capacitive Cross Talk

Avoid floating nodes Protect sensitive nodes Make rise and fall times as large as possible Differential signaling Do not run wires together for a long distance Use shielding wires Use shielding layers

Page 2: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

2

EE141

Delay Degradation

Cc

- Impact of neighboring signalactivity on switching delay

- When neighboring lines switchin opposite direction of victimline, delay increases

Miller EffectMiller Effect

- Both terminals of capacitor are switched in opposite directions(0 → Vdd, Vdd → 0)

- Effective voltage is doubled and additional charge is needed(from Q=CV)

EE141

Impact of Cross Talk on Delay

r is ratio between capacitance to GND and to neighbor

Page 3: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

3

EE141

Interconnect ProjectionsLow-k dielectrics

Both delay and power are reduced by dropping interconnectcapacitance

Types of low-k materials include: inorganic (SiO2), organic(Polyimides) and aerogels (ultra low-k)

The numbers below are on theconservative side of the NRTS roadmap

Generation 0.25µm

0.18µm

0.13µm

0.1µm

0.07µm

0.05µm

DielectricConstant

3.3 2.7 2.3 2.0 1.8 1.5

εεεε

EE141

How to Battle CapacitiveCrosstalk

Substrate (GND)

GND

ShieldinglayerVDD

GND

Shieldingwire

Avoid large crosstalk cap’s Avoid floating nodes Isolate sensitive nodes Control rise/fall times Shield! Differential signaling

Page 4: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

4

EE141

Driving Large Capacitances

Vin Vout

CL

VDD

• Transistor Sizing• Cascaded Buffers

EE141

Using Cascaded Buffers

CL = 20 pF

In Out

1 2 N

0.25 µµµµm processCin = 2.5 fFtp0 = 30 ps

F = CL/Cin = 8000fopt = 3.6 N = 7tp = 0.76 ns

(See Chapter 5)

Page 5: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

5

EE141

Output Driver Design

Trade off Performance for Area and EnergyGiven tpmax find N and f Area

Energy

( ) minminmin12

1

1

1

1...1 A

f

FA

f

fAfffA

NN

driver −−=

−−=++++= −

( ) 22212

11

1...1 DD

LDDiDDi

Ndriver V

f

CVC

f

FVCfffE

−≈

−−=++++= −

EE141

Delay as a Function of F and N

101 3 5 7

Number of buffer stages N

9 11

10,000

1000

100

t

p

/

t

p

0

F = 100F = 1000

F = 10,000

t p/t

p0

Page 6: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

6

EE141

Output Driver Design

Transistor Sizes for optimally-sized cascaded buffer tp = 0.76 ns

Transistor Sizes of redesigned cascaded buffer tp = 1.8 ns

0.25 µµµµm process, CL = 20 pF

EE141

How to Design Large Transistors

G(ate)

S(ource)

D(rain)

Multiple

Contacts

small transistors in parallel

Reduces diffusion capacitance

Page 7: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

7

EE141

Bonding Pad Design

Bonding Pad

Out

InVDD GND

100µm

GND

Out

EE141

ESD Protection

When a chip is connected to a board, there isunknown (potentially large) static voltagedifference

Equalizing potentials requires (large) chargeflow through the pads

Diodes sink this charge into the substrate –need guard rings to pick it up.

Page 8: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

8

EE141

ESD Protection

Diode

PAD

VDD

R D1

D2

X

C

EE141

Chip Packaging

ChipL

Bonding wire

Mountingcavity

Leadframe

Pin

•Bond wires (~25µm) are usedto connect the package to the chip

• Pads are arranged in a framearound the chip

• Pads are relatively large(~100µm in 0.25µm technology),with large pitch (100µm)

•Many chips areas are ‘pad limited’

Page 9: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

9

EE141

Pad Frame

Layout Die Photo

EE141

Chip Packaging

An alternative is ‘flip-chip’:» Pads are distributed around the chip» The soldering balls are placed on pads» The chip is ‘flipped’ onto the package» Can have many more pads

Page 10: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

10

EE141

INTERCONNECT

Dealing with Resistance

EE141

Impact of Resistance

Impact of resistance is commonly seen inpower supply distribution:» IR drop» Voltage variations

Power supply is distributed to minimize the IRdrop and the change in current due toswitching of gates

How to drive long RC wires» Major impact on performance in today’s ICs

Page 11: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

11

EE141

RI Introduced Noise

VDD

X

I

I

R’

R

VDD - ∆V’

∆V

∆V

φpre

EE141

Power and Ground Distribution

GND

VDD

Logic

GND

VDD

Logic

GND

VDD

(a) Finger-shaped network (b) Network with multiple supply pins

Page 12: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

12

EE141

Resistance and the PowerDistribution Problem

Source: Simplex

•• Requires fast and accurate peak current predictionRequires fast and accurate peak current prediction•• Heavily influenced by packaging technologyHeavily influenced by packaging technology

BeforeBefore AfterAfter

EE141

Power Distribution

Low-level distribution is in Metal 1

Power has to be ‘strapped’ in higher layers ofmetal.

The spacing is set by IR drop,electromigration, inductive effects

Always use multiple contacts on straps

Page 13: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

13

EE141

Electromigration (1)

Limits dc-current to 1 mA/µm

EE141

Electromigration (2)

Page 14: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

14

EE141

The Impact of Resistivity

CN-1 CNC2

R1 R2

C1

Tr

Vin

RN-1 RN

0 0.5 1 1 .5 2 2 .5 3 3 .5 4 4 .5 50

0 .5

1

1 .5

2

2 .5

time (nsec)

volta

ge

(V

)x= L/10

x = L/4

x = L/2

x= L

0 0.5 1 1 .5 2 2 .5 3 3 .5 4 4 .5 50

0 .5

1

1 .5

2

2 .5

time (nsec)

volta

ge

(V

)x= L/10

x = L/4

x = L/2

x= L

Diffused signalDiffused signalpropagationpropagation

Delay ~ LDelay ~ L22

The distributedThe distributed rcrc--lineline

EE141

The Global Wire Problem

(((( ))))outwwdoutdwwd CRCRCR693.0CR377.0T ++++++++++++====

Challenges No further improvements to be expected after the

introduction of Copper (superconducting, optical?) Design solutions

» Use of fat wires» Insert repeaters — but might become prohibitive (power, area)» Efficient chip floorplanning

Towards “communication-based” design» How to deal with latency?» Is synchronicity an absolute necessity?

Page 15: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

15

EE141

Interconnect:# of Wiring Layers

# of metal layers is steadily increasing due to:

• Increasing die size and device count: we need more wires and longer wires to connect everything

• Rising need for a hierarchical wiring network; local wires with high density and global wires with low RC

substrate

poly

M1

M2

M3

M4

M5

M6

Tins

H

WS

ρρρρ = 2.2µΩµΩµΩµΩ-cm

0.25 µm wiring stack

Minimum Widths (Relative)

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

1.0µ1.0µ1.0µ1.0µ 0.8µ0.8µ0.8µ0.8µ 0.6µ0.6µ0.6µ0.6µ 0.35µ0.35µ0.35µ0.35µ 0.25µ0.25µ0.25µ0.25µ

M5

M4

M3

M2

M1

Poly

Minimum Spacing (Relative)

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

1.0µ1.0µ1.0µ1.0µ 0.8µ0.8µ0.8µ0.8µ 0.6µ0.6µ0.6µ0.6µ 0.35µ0.35µ0.35µ0.35µ 0.25µ0.25µ0.25µ0.25µ

M5

M4

M3

M2

M1

Poly

EE141

Interconnect Projections:Copper

Copper is planned in full sub-0.25µm process flows and large-scaledesigns (IBM, Motorola, IEDM97)

With cladding and other effects, Cu~ 2.2 µΩ-cm vs. 3.5 for Al(Cu)⇒40% reduction in resistance

Electromigration improvement;100X longer lifetime (IBM,IEDM97)

» Electromigration is a limiting factorbeyond 0.18 µm if Al is used (HP,IEDM95)

Vias

Page 16: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

16

EE141

Diagonal Wiring

y

x

destination

Manhattan

source

diagonal

• 20+% Interconnect length reduction• Clock speed

Signal integrityPower integrity

• 15+% Smaller chipsplus 30+% via reduction

Courtesy Cadence X-initiative

EE141

Using BypassesDriver

Polysilicon word line

Polysilicon word line

Metal word line

Metal bypass

Driving a word line from both sides

Using a metal bypass

WL

WL K cells

Page 17: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

17

EE141

Reducing RC-delay

Repeater

EE141

Repeater Insertion (Revisited)

Taking the repeater loading into account

For a given technology and a given interconnect layer, there exiFor a given technology and a given interconnect layer, there existsstsan optimal length of the wire segments between repeaters. Thean optimal length of the wire segments between repeaters. Thedelay of these wire segments isdelay of these wire segments is independent of the routing layer!independent of the routing layer!

Page 18: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

18

EE141

INTERCONNECT

Dealing with Inductance

EE141

L di/dt

CL

V’DD

VDD

L i(t)

VoutVin

GND’

L

Impact of inductanceon supply voltages:• Change in current inducesthe change in voltage• Longer supply lines havelarger L

Page 19: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

19

EE141

L di/dt: Simulation

t

t

t

vout

iL

vL

20mA

40mA

5V

0.2V

0.0

1.0

2.0

3.0

4.0

5.0

Vou

t(V)

0

10

20

I L(m

A)

2 4 6 8 10t (nsec)

-0.3

-0.1

0.1

0.3

0.5

VL(V

)

tfall = 0.5 nsec

tfall = 4 nsec

Signals Waveforms for Output Driver connected To Bonding Pads(a) vout; (b) iL and (c) vL.

The Results of an Actual Simulation are Shown on the Right Side.

EE141

Choosing the Right Pin

ChipL

Bonding wire

Mountingcavity

Leadframe

Pin

Page 20: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

20

EE141

Decoupling Capacitors

SUPPLY

Boardwiring

Bondingwire

Decouplingcapacitor

CHIPCd

Decoupling capacitors are added:• on the board (right under the supply pins)• on the chip (under the supply straps, near large buffers)

EE141

De-coupling Capacitor Ratios

EV4» total effective switching capacitance = 12.5nF» 128nF of de-coupling capacitance» de-coupling/switching capacitance ~ 10x

EV5» 13.9nF of switching capacitance» 160nF of de-coupling capacitance

EV6» 34nF of effective switching capacitance» 320nF of de-coupling capacitance -- not enough!

Source: B. Herrick (Compaq)

Page 21: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

21

EE141

EV6 De-coupling CapacitanceDesign for ∆Idd= 25 A @ Vdd = 2.2 V, f = 600

MHz» 0.32-µF of on-chip de-coupling capacitance was

added– Under major busses and around major gridded clock drivers– Occupies 15-20% of die area

» 1-µF 2-cm2 Wirebond Attached Chip Capacitor(WACC) significantly increases “Near-Chip” de-coupling

– 160 Vdd/Vss bondwire pairs on the WACC minimizeinductance

Source: B. Herrick (Compaq)

EE141

EV6 WACC

587 IPGA

MicroprocessorWACC

Heat Slug

389 Signal - 198 VDD/VSS Pins389 Signal Bondwires

395 VDD/VSS Bondwires

320 VDD/VSS Bondwires

Source: B. Herrick (Compaq)

Page 22: EE141- Spring 2003bwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s03/...electromigration, inductive effects Always use multiple contacts on straps 13 EE141 Electromigration (1) Limits

22

EE141

Design Techniques to address L di/dt

Separate power pins for I/O pads and chip core Multiple power and ground pins Position of power and ground pins on package Increase tr and tf Advanced packaging technologies Decoupling capacitances on chip and on board